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Laser Microfabrication: Thin Film Processes and Lithography
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This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
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Laser Microfabrication - Daniel J. Ehrlich
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