Assignment 1 10M11EC222:Microelectronics and MEMS Technology (Strict Deadline:13/02/2013)

Note: 1.No extensions will be entertained on any accounts. 2. This is an individual assignment 3. Proper referencing is expected. Avoid Plagiarism

Q. 1 Enlist mechanical properties of Single Crystalline Structure which favors it for MEMS & differentiate it with Poly Crystalline Structure. Q. 2 With help of neat diagram, describe development of cantilever structure. Q.3 Make an equivalent circuit for the mechanical system in the figure below.

Q.4 For the circuit below, use complex impedances to find the transfer function I 1 (s) / V (s).

Q. 5 Derive transformation matrix for figure below.

Q. 6 Elaborate on modeling of Fig a. and Fig b.

FIG a

Fig b

Q.7 For a IDT based system shown in figure below, Determine the frequency response