Professional Documents
Culture Documents
-
1.
...............................................................................................................3-3
1.1.
1.2.
1.3.
1.4.
1.5.
, ..........................3-3
..........................................................................3-3
1.2.1. ...............................................................................................3-4
1.2.2. ...................................................................................................3-5
1.2.3. ............................3-6
1.2.4. ..................................................................................3-6
..................................................................................................................3-7
...................................................................3-8
...........................3-10
1.5.1. ..................................................................................3-11
1.5.2. ..................3-14
1.5.2.1. ........................... 3-14
1.5.2.2. ................................................................ 3-16
1.5.2.3. ................................................................. 3-19
1.6.
1.5.3. .............................................................................................3-21
1.5.4. .....................................................................................................3-22
1.5.5. ...........................................................................3-27
1.5.6. ..........................................................................................3-28
1.5.7. .................................................................................3-28
...............................3-29
1.6.1. ..................................................................................3-30
1.6.2. ..................3-32
1.6.2.1. ........................... 3-32
1.6.2.2. ................................................................ 3-34
1.6.2.3. ................................................................. 3-37
1.6.3.
1.6.4.
1.6.5.
1.6.6.
2.
.....................................................................................................3-39
...........................................................................3-42
..........................................................................................3-43
.................................................................................3-44
- .......................................................3-45
2.1.
2.2.
2.3.
2.4.
2.5.
......................................................................................................3-45
2.1.1. .........................................................................................3-45
2.1.2. ..................................................................................................3-46
2.1.3. DFL.............................................................3-46
2.1.4. ..............................................................................................3-48
2.1.5. ........3-51
2.1.6. .....................................................................3-52
2.1.7. ..............................................................................................................3-56
2.1.8. ................................................................................3-60
2.1.9. ................................................................................................3-61
- ....................................................................................3-62
2.2.1. ...........................................................................3-62
2.2.2. .........................................................................................3-63
2.2.3. ..............................................................................................................3-63
..................................................................................................3-64
2.3.1. ...........................................................................3-64
2.3.2. .........................................................................................3-65
2.3.3. .............................................................................................3-66
2.3.4. ..............................................................................................................3-67
........................................................................3-68
2.4.1. ...........................................................................3-68
2.4.2. .........................................................................................3-68
2.4.3. .............................................................................................3-69
2.4.4. ..............................................................................................................3-70
2.4.5. .............................................................................3-71
........................................................................................................3-71
3-1
2.6.
2.7.
3.
- ...........................................3-85
3.1.
3.2.
3.3.
4.
........................................................................................................3-85
3.1.1. .........................................................................................3-85
3.1.2. ..................................................................................................3-86
3.1.3. ..........................................................3-86
3.1.4. Mag.............................................................3-90
3.1.5. ..............................................................................................3-91
3.1.6. ........3-94
3.1.7. .....................................................................3-96
3.1.8. ............................................................................................................3-100
3.1.9. ..............................................................................3-104
3.1.10. .............................................................................................3-104
....................................................................3-105
3.2.1. .........................................................................3-105
3.2.2. .......................................................................................3-105
3.2.3. ...........................................................................................3-106
3.2.4. ............................................................................................................3-107
..................................................................................................3-108
3.3.1. .........................................................................3-108
3.3.2. .......................................................................................3-108
3.3.3. ...........................................................................................3-109
3.3.4. ............................................................................................................3-111
3.3.5. ..........................................................................3-111
.............................................................................................................3-112
4.1.
4.2.
4.3.
4.4.
4.5.
3-2
2.5.1. ...........................................................................3-71
2.5.2. .........................................................................................3-72
2.5.3. .............................................................................................3-72
2.5.4. ..............................................................................................................3-74
2.5.5. ............................................................................3-75
...............................................................................3-76
2.6.1. ...........................................................................3-76
2.6.2. .........................................................................................3-76
2.6.3. .............................................................................................3-77
2.6.4. ..............................................................................................................3-78
................................................................................3-78
2.7.1. ...........................................................................3-78
2.7.2. .........................................................................................3-81
2.7.3. .............................................................................................3-81
2.7.4. ..............................................................................................................3-83
.................................................................................................................................3-112
(DFL(HEIGHT))............................................................................3-112
4.2.1. ...................................................................................................3-112
4.2.2. ........................................................................3-113
4.2.3. .............................................................................3-113
4.2.4. ...................................................................................3-116
4.2.5. ......................................................................................................3-118
4.2.6. ..........................................................................3-119
4.2.7. .........................................................................................3-122
(IPR-LOW(BIAS VOLTAGE))..........................................................3-123
4.3.1. ......................................................................3-124
4.3.2. ..........................................................................3-126
(MAG(HEIGHT))..................................................................3-127
4.4.1. ......................................................................3-127
4.4.2. ..........................................................................3-128
4.4.3. ...................................................3-130
(PHASE(HEIGHT)).........................................................................3-131
4.5.1. ......................................................................3-131
4.5.2. ...........................................................3-133
3. -
3. -
1.
. ,
.
1.1. ,
:
1
(. . 3-3).
(. . 3-7).
,
, (. .
). 4 .
(. . 3-8).
:
(. . 3-10);
(. . 3-29).
1.2.
!
.
:
1. ,
, ;
2. ,
;
3. ,
, .
3-3
1.2.1.
:
1.
(. 1-1).
HEAD, .
. 1-1
2. ,
(. 1-2, . 1-3).
. 1-2
. 1-3
3. ,
SCANNER, SCAN+SENSOR,
. ,
SCAN+SENSOR.
3-4
3. -
1.2.2.
:
1.
(. 1-4).
HEAD HEAD,
.
. 1-4
2. ,
SCANNER
SCANNER SCAN+SENSOR
.
, SCAN+SENSOR.
3. (. 1-5, . 1-6).
. 1-5
. 1-6
3-5
1.2.3.
, ,
:
1. .
CONTROLLER 2,
(. 1-7).
. 1-7
2.
(. 1-8).
. 1-8
1.2.4.
,
:
;
Z ;
X,Y .
3-6
3. -
Z-OFF X,Y-OFF (. 1-9).
. 1-9. XY Z
1.3.
1. .
2. :
, ;
NOVA.exe, .
.
3. .
.
.
,
.
, ,
,
:
. ;
;
, .
. 40
, .
3-7
! Nova
,
Z Z
( ).
Z.
ToolsNova PowerScriptScripts ADCDACCalibration_1_6.
1.4.
Default.par
.
, Default.par
.
, Default.par
, .
(par-).
par- , :
1. Settings Calibrations
Load Calibrations (. 1-10).
. 1-10
PARFiles, . 1-11.
par-,
par- :
SmXXXcl.par
zXXXcl.par
XXX
cl
3-8
3. -
. 1-11
2. par-, .
3. Open par-.
.
par- , :
,
XY;
.
, Default.par. :
1. Settings Calibrations
Save Calibrations (. 1-12).
. 1-12
2. Save As (. 1-13).
Default.par.
3-9
. 1-13
.
1 , , ..,
, XY.
, ,
- ,
.
.
1.5.
:
1. (. . 3-11).
2.
(. . 3-14).
3. (. . 3-21).
5. (. . 3-22).
6. (. . 3-27).
7. (. . 3-28).
.
3-10
3. -
1.5.1.
,
( )
(. 1-14).
. 1-14
. 1-15
, ,
, ,
, . 1-15.
, , (. 1-14) .
, :
1. , .
2.
(. 1-15).
3.
.
3-11
:
1. .
,
(. 1-16).
. 1-16
. 1-17
2. (. 1-17) ,
.
, . .
.
3.
(. 1-18, . 1-19),
.
. 1-18
3-12
. 1-19
3. -
4. (. 1-20),
. 1-19.
. 1-21.
. 1-20
. 1-21
5.
.
(. 1-22).
. 1-22
6. (. 1-23).
:
a. 3 (. 1-23), ;
b. (.
1-24) (. 1-23);
;
c. ,
.
3-13
. 1-23.
1 ; 2
; 3
. 1-24.
1.5.2.
1.5.2.1.
,
,
. 1-26.
,
, ,
1, 2 (. 1-25, . 1-26).
.
, ,
, ,
.
3-14
3. -
. 1-25
1, 2 X,Y
; 3, 4
. 1-26
,
(. 1-27).
.
. 1-27
! !
( ,
,
( 0.25 .). .
).
Aiming (. 1-28)
).
3-15
. 1-28
,
.
:
DFL
LF
Laser
,
,
, .
1.5.2.2.
1. , .
.
10-15
, (. 1-29).
3-16
3. -
. 1-29
:
.
(. 1-30). , ,
;
b. . ,
(. 1-31). ,
(, . 1-31);
. . ,
(. 1-32)
.
. 1-30
. 1-31
. 1-32
3-17
,
.
, , .
2. 2 (. 1-33)
. 1
(. . 1-34).
. 1-33
1, 2 X,Y ;
3, 4
3. 2,
(12 . 1-34) , .
. 1-34.
4. 1, .
:
. (23):
;
b. (45):
(. 1-35). .
.
. . 1.5.2.3
. 3-19.
3-18
3. -
5. 2,
(34) , .
( 4).
6. 1, (45)
(. 1-35).
.
7. ,
1, 2.
) ,
) ,
. 1-35.
1.5.2.3.
, ,
(. 1-36).
, ,
, ,
.
. 1-36
3-19
:
1. 3 4 (. 1-33),
(. 1-37). DFL LF
, Laser
.
. 1-37
,
, .
-
Laser ,
, .
.
2. , .
, ,
, 1, 2
, , Laser .
3.
. ,
1 2, -
,
(Laser). Laser
2050 .
4.
3, 4 (
), .
3-20
3. -
1.5.3.
,
, ,
,
.
, ,
.
. .
:
1. (. 1-39) ,
.
2.
(. 1-38) (. 1-39).
. 1-38.
. 1-39.
3. ,
, (. 1-40).
. 1-40. ,
3-21
4.
.
1.5.4.
, :
40 .
15 .
100 .
,
, .
24190.5 .
, .
.
0.5 .
,
.
( 1012 )
SU001. ( 1015 )
SU002.
. 1-41. SU001
3-22
. 1-42. SU002
. ,
SU001 ,
2 . ,
,
.
.
3. -
,
SU015
(. 1-43).
. 1-43. SU015
! ,
. 0.5
( . . 3-26).
,
, ,
(. 1-44).
. 1-44
(. 1-45).
.
3-23
. 1-45.
. 1-46.
SU001, SU002, SU0015 (. . 3-22).
(. . 1-46).
, ,
(. 1-47).
. 1-47.
! ,
.
0.5 (
. . 3-26).
(. 1-48). ,
.
. 1-48.
3-24
3. -
1. (,
).
2.
, , (. 1-49).
. 1-49.
3. (
. . 3-22, 3-23). ,
.
4.
(BV) 1 (. 1-50), 2.
. 1-50
1 (BV); 2
! BV ,
BiasVoltage
BV.
3-25
,
.
.
, .
.
:
1. Scanner Calibration Setup (. 1-51),
Settings Calibrations Change Calibrations.
2. Sample Height, ,
(. 1-51).
3. OK,
.
Sample Height Scanner Calibration Setup.
,
Default.hrd ,
. Default.hrd HRD.
3-26
3. -
Default.hrd
:
1. Default.hrd.
2. , ,
. , 1.5
: Scanner_SampleHeight=1,5.
3. Default.hrd.
, ,
, .
1.5.5.
,
. , ( 1-2 )
, .
1-2 , , .
1.
,
(. 1-52).
. 1-52.
1 ; 2
2. (. 1-52).
3-27
1.5.6.
1. (. 1-52) ,
0.5-1 .
2. , ,
. , ,
.
3.
.
1.5.7.
:
XY Z;
;
;
.
:
1. .
2. 1 2
(. . 1-53).
)
. 1-53
1, 2 , 3
3. , 1
(. . 3 . 1-53) , 2
(. . 1-54). ,
3-28
3. -
.
.
. 1-54
1.6.
:
1. (. 1.6.1 . 3-30).
2.
(. 1.6.2 . 3-32).
3. (. 1.6.3 . 3-39).
4. (. 1.6.4 . 3-42).
5. (. 1.6.5 . 3-43).
6. (. 1.6.6 . 3-44).
.
3-29
1.6.1.
:
1. ,
(
).
. 1-55
2. .
(. 1-55).
.
!
. ,
.
!
, ,
.
3. (. 1-56) ,
.
, . .
.
3-30
3. -
. 1-56
. 1-57
4.
(. 1-57, . 1-58).
.
. 1-58
. 1-59
5. (. 1-59),
. 1-58.
3-31
. 1-60
6.
.
(. 1-60).
1.6.2.
1.6.2.1.
, ,
.
1 2 (. 1-61, . 1-62).
. 1-61
1, 2 ;
3, 4
. 1-62
,
1 2 ,
. 1-62.
3-32
3. -
.
.
,
30 ( )
(. 1-63, . 1-64).
. 1-63
. 1-64
,
(. 1-27). ,
.
. 1-65
! !
( ,
,
( 0.25 .). .
).
Aiming (. 1-28)
).
3-33
. 1-66
,
.
:
DFL
LF
Laser
,
,
, .
1.6.2.2.
1. , .
.
10-15
, (. 1-67).
3-34
3. -
. 1-67
:
.
(. 1-68). , ,
.
b. . ,
- ,
(. 1-69). ,
(, . 1-69).
. . ,
(. 1-70)
.
. 1-68
. 1-69
. 1-70
3-35
,
.
, , .
2. 2 (. 1-71)
. 1
(. . 1-72).
. 1-71
1, 2 ;
3, 4
3. 2,
(12 . 1-72) , .
. 1-72.
4. 1, .
:
. (23):
;
b. (45):
(. 1-73). .
.
. . 1.6.2.3
3-37.
3-36
3. -
5. 2,
(34) , .
( 4).
6. 1, (45)
(. 1-73).
.
7. ,
1, 2.
) ,
) ,
. 1-73.
1.6.2.3.
, ,
(. 1-74).
, ,
, ,
.
. 1-74
3-37
:
1. 3 4 (. 1-71),
(. 1-75). DFL LF
, Laser
.
. 1-75
,
, .
Laser
, , .
.
2. , .
, ,
, 1, 2
, Laser .
3.
. ,
1 2, -
,
(Laser). Laser
2050 .
4.
3, 4 (
), .
3-38
3. -
1.6.3.
,
:
100 .
15 ( 50
).
300 .
,
. 24190.5 .
,
.
.
0.5 .
,
.
( 1012 )
SU001 (. 1-76). ( 1015 ) SU002
(. 1-77).
. 1-76. SU001
. 1-77. SU002
. ,
SU001 ,
2 . ,
,
.
.
,
SU015
(. 1-78).
3-39
. 1-78. SU015
(. 1-79), .
. 1-79.
(. 1-80),
.
,
XY.
. 1-80.
. 1-81.
,
, ,
(. 1-82).
3-40
3. -
. 1-82
! BV ,
BiasVoltage
BV.
1. (,
).
2.
, , (. 1-83).
. 1-83.
3. (
. . 3-39). ,
.
4.
(BV) 1 (. 1-50), 2
3-41
. 1-84
1 (BV); 2
! BV ,
BiasVoltage
BV.
1.6.4.
!
,
,
~ 4 .
1. ,
. ,
( 1-2 ) ,
. :
a. ,
1 (. 1-85),
.
. 1-85
1
3-42
3. -
b. , .
2 ,
.
c. (. 1 . 1-86) ,
.
2.
, ,
, (. 1-86).
. 1-86.
1 ; 2
3. , ,
,
.
:
a.
.
b. , .
0.5 ,
.
c. .
4.
(. 2 . 1-86).
1.6.5.
1. , ,
0.5-1.
2.
.
3-43
1.6.6.
:
XY Z;
;
;
.
:
1. .
2. 1 2
(. . 1-87).
)
. 1-87
1, 2 , 3
3. , 1
(. . 3 . 1-87) , 2
(. . 1-88). ,
.
.
. 1-88
3-44
3. -
2. -
, , , ,
, ,
.
2.1.
2.1.1.
, :
;
;
,
;
;
;
0.51 .
:
1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52).
6. (. 2.1.7 . 3-56).
.
3-45
2.1.2.
, Contact
(. 2-1)
.
. 2-1.
Contact
, .
2.1.3. DFL
DFL,
, ,
. DFL
,
,
.
DFL
4 (. 2-2)
, .
. 2-2.
1, 2 ; 3, 4
3-46
3. -
DFL
1. Aiming (
) (. 2-3).
. 2-3.
,
(. 2-4).
. 2-4.
2. , 4
( , . . 2-2)
DFL 0 0.1 (. . 2-4).
3-47
2.1.4.
:
1. Approach (
) (. 2-5).
. 2-5.
2. Auto SetPoint,
(. 2-6).
. 2-6.
3.
:
, Z-
,
,
(. 2-7).
;
. 2-7.
Set Point,
DFL (.. Set Point=DFL+2);
, .
DFL
,
.
1030 , ,
(. 2-8):
3-48
3. -
. 2-8.
1 ; 2
3-49
. , ,
, .
, (
Z-)
.
.
:
1.
.
2.
3. Scheme.
4. Z- ,
.
5. Aiming
Laser , .
Set Point
Set Point:
Auto SetPoint
(
);
Set Point ,
.
, Set Point
: DFL (510) % Laser
(.. SetPoint = DFL+(0.050.1)*Laser).
Set Point
:
Set Point DFL
.
Set Point
DFL, ,
. ,
Set Point DFL
;
Set Point
DFL,
,
, ;
3-50
3. -
Set Point
DFL,
,
;
Set Point
DFL Laser.
2.1.5.
( FB Gain),
.
( ),
.
DFL (. 2-9).
. 2-9.
0.50.7 ,
. FB Gain.
3-51
:
1. FB Gain
,
(. 2-10).
. 2-10. FB Gain
2. FB Gain, DFL
.
3. FB Gain, .
DFL (. . 2-9).
4. FB Gain,
0.50.7 FB Gain,
DFL.
2.1.6.
Scan (
(. 2-11).
. 2-11.
Scan
(. 2-12).
. 2-12. Scan
1D- ,
.
2D- .
3-52
3. -
Mode ( )
Contact Topography (Constant Force) (. 2-13).
.
. 2-13.
Scan
:
, ,
Z-,
;
, ,
,
, , 0.51 .
, , Set Point, FB Gain.
.
3-53
:
1. ,
2D- (. 2-14).
. 2-14. 2D-
1 ;
2 ,
2.
(. 1 . 2-14).
.
Scan Size.
. ,
3.
. ,
(. 2 . 2-14) .
.
(. . 2-7).
3-54
3. -
, ,
X Y (Point Number),
( Scan Size) (Step Size)
(. 2-15).
. 2-15
Scan Size ;
Step Size .
Scan Size:
Step Size ;
Point Number .
Step Size:
Scan Size ;
Point Number .
, ,
.
, ,
.
(
Frequency) 0.52 (. . 2-15).
,
Sensor Height. :
1. Scan Setings (. 2-16),
Scan.
3-55
. 2-16
2. ,
, SensorHeight.
3. OK,
.
2.1.7.
( TGQ-1, 3 ).
,
, , ,
.
Run,
Scan (. 2-17).
. 2-17. Scan
3-56
3. -
Run:
2D- , ,
(. 2-18),
;
. 2-18.
1D-
(. 2-19);
. 2-19. Height
Scan ,
: Pause, Restart, Stop (. 2-20).
. 2-20
- ,
Stop <Esc>.
3-57
(. . 2-18, . 2-19) ,
.
,
Subtract. None (. . 2-20).
Plane (. 2-21),
, ,
, . 2-18 , . 2-22.
. 2-21
. 2-22.
, 1D-
.
. 2-19, ,
. 2-23.
3-58
3. -
. 2-23. Height
Subtract .
.
.
,
Subtract,
.
, Frequency (. 2-24),
Set Point (. 2-25), FB Gain
(. 2-25).
.
. 2-24
. 2-25
Pause.
,
.
.
, ,
, , :
Frequency. Set Point
FB Gain.
Pause
.
Restart .
3-59
. Pause
,
Restart.
, ,
.
, ,
.
,
,
.
,
.
.
,
Set Point , .
2.1.8.
:
1. File Save.
2. ,
C:\Program Files\NT-MDT\Nova).
3. *.mdt.
3-60
.
NoNameXX.mdt, XX Nova.
3. -
2.1.9.
:
1. (
).
2. , :
a. Approach (
) (. 2-26).
. 2-26. Approach
. 2-27
c. ,
(. 2-28).
Backward
. 2-28
3-61
2.2.
2.2.1.
-
, .
-
, , , ,
- , ,
(, ), .
-
. ,
,
(. 2-29). , .
. 2-29
. 2-30
.
. LF,
.
.
,
,
(. 2-30). .
, .
, ,
. ,
.
3-62
3. -
2.2.2.
- ,
2.1 . 3-45.
1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52). :
Lateral Force.
6. (. 2.1.7 . 3-56).
( ) ,
. 2.1.6 . 3-52
Contact Topography (Constant Force) Lateral Force.
Scan
Mode Lateral Force (. 2-31).
,
, .
. 2-31.
2.2.3.
Run,
Scan:
2D- :
( Height),
( LF) (. 2-32);
3-63
. 2-32.
1D-
(. 2-33).
. 2-33. LF
2.3.
2.3.1.
.
(
).
.
, ,
.
,
. .
(. . 2-34)
( DFL ),
, ,
DFL .
3-64
3. -
. 2-34
,
,
( DFL)
, .
,
DFL .
: , .
. , ( ,
, - ..) ,
.
,
.
.
2.3.2.
, ,
.
1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
3-65
4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52).
6. (. 2.1.7 . 3-56).
,
.
2.3.3.
1. Scan (
(. 2-35).
. 2-35.
. 2-36.
3-66
.
FB Gain ( )
.
.
DFL.
3. -
2.3.4.
Run,
Scan:
2D- , ,
(. 2-37);
. 2-37.
1D-
(. 2-38).
. 2-38. DFL
3-67
2.4.
2.4.1.
, , ,
,
..
,
.
,
. ,
-
.
, ,
- -, p-n ,
2.4.2.
,
2.1 . 3-45.
,
,
.
AU006.
.
1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52).
6. (. 2.1.7 . 3-56).
,
.
3-68
3. -
2.4.3.
1. Scan (
(. 2-39).
. 2-39.
. 2-40.
3. (
).
4. Ipr low .
5. Bias Voltage,
(. 2-41)
.
6. , Bias Voltage ,
Ipr low
110 A.
3-69
2.4.4.
Run,
Scan:
2D- :
( Height),
( Ipr low);
. 2-42.
1D-
(. 2-43).
3-70
Ipr low
3. -
2.4.5.
, :
Set Point ( );
( Bias Voltage) (. . 2-41).
;
(
).
2.5.
!
.
2.5.1.
.
Z-
,
.
.
,
.
, (. 2-44).
. 2-44
.
,
, , .
3-71
2.5.2.
,
2.1 . 3-45.
, ,
.
1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52).
6. (. 2.1.7 . 3-56).
,
,
.
2.5.3.
1. Scan (
(. 2-45).
. 2-45.
. 2-46.
3-72
.
Z- ,
(, ),
.
3. -
:
1. Resonance (
) (. 2-48).
. 2-47.
. 2-48. Resonance
. 2-49
3-73
5. Frequency (. 2-50), .
. 2-50
6. , 25 .
( Amplitude)
(. . 2-48), (
Gain) ( Preamplifier) (. . 2-48).
2.5.4.
Run,
Scan:
2D- :
( Height), -
( Mag) (. 2-51);
3-74
3. -
. 2-51.
. Mag
.
1D-
(. 2-52).
. 2-52. Mag
2.5.5.
, :
Set Point ( );
, ;
( Amplitude) (. . 2-48),
( Gain)
( Preamplifier) (. . 2-48);
( ).
3-75
2.6.
2.6.1.
.
(Set Point), ,
, ( DFL).
DFL
( ).
DFL (,
)
.
. ,
, (
DFL) .
,
(
) ,
. ,
.
- .
.
2.6.2.
,
2.1 , . 3-45.
,
,
.
1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52).
6. (. 2.1.7 . 3-56).
3-76
3. -
,
.
2.6.3.
,
DFL, :
1. Scan Settings (. 2-53),
Scan.
. 2-53.
2.
DFL.
3. OK,
.
3-77
2.6.4.
Run,
Scan:
2D- :
( Height),
( DFL) (. 2-54);
. 2-54.
1D-
(. 2-55).
. 2-55. DFL
2.7.
2.7.1.
.
- .
3-78
3. -
.
,
.
.
,
.
,
.
. 2-56 ,
, .
,
, .
. 2-56
. ,
,
.
, . ,
.
. , ,
.
3-79
,
,
,
(. 2-57).
.
. 2-57
.
,
, .
( ), ,
,
,
. .
, , ,
,
, .. .
.
.
.
3-80
3. -
2.7.2.
(. 3,
. ).
.
,
,
.
AU007.
.
1. (. 2.1.2 . 3-46).
2. DFL (. 2.1.3 . 3-46).
3. (. 2.1.4 . 3-48).
4.
(. 2.1.5 . 3-51).
5. (. 2.1.6 . 3-52).
6. (. 2.1.7 . 3-56).
,
.
2.7.3.
1. Scan (
(. 2-58).
. 2-58.
3-81
. 2-59.
.
Gain Preamplifier,
DFL (. 2-60).
. 2-60
:
Height Mag (. 2-61);
Phase (. 2-61).
. 2-61.
3-82
3. -
2.7.4.
Run,
Scan:
2D- :
( Height),
( Mag),
( Phase) (. 2-62).
. 2-62.
1D-
(. 2-63).
. 2-63. Mag
. ,
,
( DFL).
( LF),
DFL LF (. 2-64).
. 2-64
3-83
2D-
, (. 2-65).
. 2-65.
3-84
3. -
3. -
,
.
3.1.
3.1.1.
.
, AU020 AU030.
.
,
:
;
;
,
;
;
;
0.51 .
:
1. (. 3.1.2 . 3-86).
2. (. 3.1.3 . 3-86).
3. Mag (. 3.1.4 . 3-90).
4. (. 3.1.5 . 3-91).
5.
(. 3.1.6 . 3-94).
6. (. 3.1.7 . 3-96).
7. (. 3.1.8 . 3-100).
3-85
3.1.2.
,
SemiContact (. 3-1)
.
. 3-1.
SemiContact
, .
3.1.3.
:
1. Resonance (
) (. 3-2).
. 3-2.
. 3-3. Resonance
3. ,
( From, To), 90 500 .
4. ,
Run.
3-86
3. -
:
( Mag);
;
,
;
Mag (. 3-4).
. 3-4
5. ,
. ( )
, . 3-4,
, .
( 3.1.4
Mag . 3-90).
, ,
.
,
, ,
. , ,
. 3-5
. 3-9.
3-87
, , ,
(
),
( Gain , Amp Gain ),
.
I. ,
3540 .
,
3540 (. 3-5),
:
. 3-5
1.
Gain, (. 3-6).
. 3-6
2. Mag 2025 ,
Gain . Mag
(. 3-7).
3-88
3. -
. 3-7
3. Mag 2025
,
Run.
4. ,
( 3.1.4 . 3-90),
1-3 .
(. 3-8)
( Preamplifier : 1 10).
. 3-8
II. ,
3540 .
,
3540 (. 3-9), :
. 3-9
3-89
1. Amplitude,
(. 3-10).
. 3-10
2. Amplitude .
3.
, Run.
4. ,
( 3.1.4
Mag . 3-90), 1-3
.
3.1.4. Mag
Mag
2025 .
Mag
. :
1.
Amplitude, (. 3-11) (
01 ).
. 3-11
2. Mag 2025 ,
Amplitude .
Mag (. 3-12).
. 3-12
3-90
3. -
3.
(
: 0.1, 1, 10) (. 3-13).
. 3-13
.
Mag ,
( Gain)
( Preamplifier).
Mag
( Amplitude),
.
, Mag
,
.
3.1.5.
1. Approach (
) (. 3-14).
. 3-14.
2. SetPoint,
(. 3-15).
. 3-15. Approach
3. ,
3-91
:
, Z-
, ,
(. 3-16).
;
. 3-16.
Set Point,
Mag (.. Set Point=Mag/2);
, .
Mag
,
.
1030 , ,
(. 3-17):
3-92
3. -
. 3-17.
1 ; 2
3-93
. ,
, ,
. ,
( Z-)
.
.
, . ,
Mag .
Set Point
Set Point:
Auto SetPoint (
);
Set Point ,
(. 3-18).
. 3-18
Set Point
Mag (.. SetPoint=Mag/2).
. Set Point
Mag.
3.1.6.
( FB Gain),
.
( ),
.
Mag (. 3-19).
3-94
3. -
. 3-19.
0.50.7 ,
. FB Gain.
:
1. FB Gain
,
(. 3-20).
. 3-20. FB Gain
2. FB Gain, Mag
.
3. FB Gain,
.
Mag (. . 3-19).
4. FB Gain,
0.50.7 FB Gain,
Mag.
. FB Gain
0.3,
.
3-95
FB Gain 0.3
, :
1. (
).
2. Mag 2050 %,
( Gain) (
Preamplifier).
3. ( Amplitude)
Mag 2025.
.
,
Mag 20.
4. (
).
5.
( 3.1.7 . 3-96),
14.
3.1.7.
Scan (
(. 3-21).
. 3-21.
Scan
(. 3-22).
. 3-22. Scan
1D- ,
.
2D- .
Mode ( )
Semicontact Topography (. 3-23).
.
3-96
3. -
. 3-23.
:
, ,
Z-,
;
, ,
,
, , 0.51 .
, , Set Point, FB Gain.
.
, :
1. ,
2D- (. 3-24).
. 3-24. 2D-
1 ;
2 ,
3-97
2.
(. 1 . 3-24).
.
Scan Size.
3.
. ,
. ,
(. 2 . 3-24) .
.
(. . 3-16).
, ,
X Y (Point Number),
( Scan Size) (Step Size)
(. 3-25).
. 3-25
Scan Size ;
Step Size .
Scan Size:
Step Size ;
Point Number .
Step Size:
Scan Size ;
Point Number .
3-98
3. -
, ,
.
, ,
.
(
Frequency) 0.52 (. . 3-25).
,
Sensor Height. :
1. Scan Setings (. 2-16),
Scan.
. 3-26
2. ,
, SensorHeight.
3. OK,
.
3-99
3.1.8.
( TGQ-1, 3 ).
,
, , ,
.
Run,
Scan (. 3-27).
. 3-27
Run:
2D- , ,
(. 3-28);
. 3-28.
1D-
(. 3-29);
3-100
3. -
. 3-29. Height
Scan ,
: Pause, Restart, Stop (. 3-30).
. 3-30
- ,
Stop <Esc>.
(. . 3-28, . 3-29) ,
.
,
Subtract. None (. 3-30).
Plane (. 3-31),
, ,
, . 3-28, , . 3-32.
. 3-31
3-101
. 3-32.
, 1D-
.
. 3-29, ,
. 3-33.
. 3-33. Height
Subtract .
.
3-102
.
,
Subtract,
.
3. -
, Frequency (. 3-34),
Set Point (. 3-35), FB Gain
(. 3-35).
.
. 3-34
. 3-35
Pause.
,
.
. ,
, :
Frequency, Set Point
FB Gain.
Restart .
, ,
.
, ,
.
,
,
.
,
.
.
,
Set Point , .
3-103
3.1.9.
:
1. File Save.
2. ,
C:\Program Files\NT-MDT\Nova).
3. *.mdt.
.
NoNameXX.mdt, XX Nova.
3.1.10.
:
1. (
).
2. , :
1) Approach (
) (. 3-36).
. 3-36.
. 3-37
3) , Fast Backward
(. 3-38).
. 3-38
3-104
3. -
3.2.
3.2.1.
.
(Set Point), , ,
( Mag).
Mag ,
( ).
Mag (,
)
.
.
,
,
( Mag),
.
,
,
,
(
) ,
.
.
.
.
3.2.2.
,
3.1 . 3-85.
,
,
.
.
AU020 AU030.
.
3-105
1. (. 3.1.2 . 3-86).
2. (. 3.1.3 . 3-86).
3. Mag (. 3.1.4 . 3-90).
4. (. 3.1.5 . 3-91).
5.
(. 3.1.6 . 3-94).
6. (. 3.1.7 . 3-96).
7. (. 3.1.8 . 3-100).
,
,
.
3.2.3.
,
Mag ,
:
1. Scan Setting (. 3-39) Settings
Scan.
. 3-39.
3-106
3. -
2.
Mag.
3. OK,
.
3.2.4.
Run,
Scan:
2D- :
( Height),
( Mag) (. 3-40);
. 3-40. ( TGQ-1)
1D-
(. 3-41).
. 3-41. Mag
3-107
3.3.
3.3.1.
,
,
, , .
,
. ,
(. 3-42).
. 3-42
.
,
. , ,
,
,
3.3.2.
, ,
.
.
, AU020 AU030.
.
3-108
3. -
1. (. 3.1.2 . 3-86).
2. (. 3.1.3 . 3-86).
3. Mag (. 3.1.4 . 3-90).
4. (. 3.1.5 . 3-91).
5.
(. 3.1.6 . 3-94).
6. (. 3.1.7 . 3-96).
7. (. 3.1.8 . 3-100).
,
,
.
3.3.3.
Mode ( )
Phase Contrast (. 3-43).
.
. 3-43.
:
1. (
).
2. Phase (. 3-44).
. 3-44
3-109
Phase 0 180
, 0
360 .
3. Resonance , Phase (. 3-45)
( ),
(. 3-46).
,
0 180 .
.
. 3-45
. 3-46
3-110
3. -
3.3.4.
Run,
Scan:
2D- :
( Height),
( Phase) (. 3-47).
. 3-47.
1D-
(. 3-48)
. 3-48. Phase
3.3.5.
, :
Set Point ( );
( Phase);
( FB Gain);
( ).
3-111
4.
4.1.
.
.
.
DFL(Height). ,
, ,
.
4.2. (DFL(Height))
z- , ..
DFL(Height).
,
z- ( Height)
DFL. DFL(Height) ,
, ,
.
. ,
.
4.2.1.
,
(.
, 3, 2, . ).
:
1. (. 4.2.2 . 3-113);
2. , ..
(. 4.2.3 . 3-113);
3. (. 4.2.4 . 3-116);
4. (. 4.2.5 . 3-118);
5. (. 4.2.6 . 3-119);
6. (. 4.2.7 . 3-122).
3-112
3. -
4.2.2.
Curves (
(. 4-1).
. 4-1. Curves
4.2.3.
1. a
(. . 4-2).
Height.
. 4-2
.
:
Height
Z;
SetPoint
,
,
;
BiasVoltage
, ,
, .
2. f1(a) ,
.
DFL (. 4-3).
. 4-3
3-113
. a,
,
f1(a).
. 4-4
.
Land ( ) ,
, .
Lift , , ..
.
Land = 0.
. Height
(. 4-5):
1) 1 Height
, Lift,
2) 2 - , Land
3) 3 - , Lift;
4) 4 - Height .
. 4-5
3-114
3. -
1.
(
Point
in
curve)
. 4-6
2. , (
f1(a) safety limits).
. , DFL(Height)
,
, ( Level)
, 5-10 ,
Set Point. , ,
,
, 3-5
Set Point.
Height.
,
. Z-
(. 4-7).
. 4-7. Z-
,
,
, .. Curve Time.
3-115
4.2.4.
.
Select Frame (. 4-8) .
2D-
.
. 4-8
:
;
, ;
.
.
.
:
1. XY Point Set Point (. 4-9).
. 4-9
2. ,
.
3. Curves.
3-116
3. -
,
, .
1. XY Point Set Line (. 4-10).
. 4-10
2. 2D-
, (. 4-11).
<Ctrl>
; .
. 4-11
3. , ,
Positions.
.
1. XY Point Set Grid (. 4-12).
. 4-12
3-117
2. <Ctrl>,
(. 4-13).
.
. 4-13
3. Positions (. 4-12)
X Y.
4.2.5.
.
, ,
, .
, <Esc>
.
3-118
3. -
4.2.6.
(. 4-14). DFL(Heigth)
.
,
,
(. 4-15). .
25 .
. 4-14. DFL(Heigth)
. 4-15. ,
. 4-14 ,
( )
( ).
. , Height,
() ().
.
.
. DFL(Heigth)
. 4-16.
3-119
. 4-16.
.
,
(. 4-17).
. 4-17.
Data,
(. , 2).
- ,
.
3-120
3. -
:
1. Data.
2. (.1 . 4-18).
. 4-18. Data
1 ; 2 ;
3 ; 4
3.
2,
3,
.
4. , ,
4,
( ) .
3-121
4.2.7.
.
.
z- DFL , DFL
, ,
, (. 4-19).
. 4-19
,
Z.
:
F = k Height
(1)
k (. ).
Height.
(Pair Markers)
, . 4-20.
. 4-20
3-122
3. -
DX DY
Height DFL. Height = 25 .
0.03 /. ,
:
F = 0.03 /25 0.8
(2)
, (
) .
, ,
Set Point = 2 .
Height, . 4-21.
Set Point;
DFL
.
. 4-21
Set Point = 2 :
F = 0.03 /81 2.4 .
(3)
3-123
4.3.1.
,
4.2 (DFL(Height)) . 3-112.
.
, .
1. ,
Contact (. 4-22).
. 4-22
2. -
. :
a
Scan (
).
. 4-23
-
(. 4-24):
. 4-24
) ; )
3-124
3. -
1. (
).
2.
Bais Voltage; f1(a) Ipr-low
(. 4-25).
. 4-25
3. ( From, To).
4. (. 4-26).
Curve Time 1 .
. 4-26
4. ( , , )
(. 4-27).
. 4-27
5. .
6.
3-125
4.3.2.
(. 4-28).
Ipr-low(Bias Voltage) .
, ,
.
. 4-28
,
( )
( ).
.
.
.
,
(. 4-29).
. 4-29.
Data,
(. , 2).
3-126
3. -
4.4. (Mag(Height))
z- , .. Mag(Height).
Mag , . Height
, z- .
,
,
.
,
(.
, 3, 2, . ).
4.4.1.
,
4.2 (DFL(Height)) . 3-112.
.
, .
:
1. ,
SemiContact (. 4-30).
. 4-30
2. (
).
3. Height;
f1(a) Mag (. 4-31).
. 4-31
4. ( Land, Lift).
.
3-127
5. (. 4-32).
. 4-32
.
Mag ( Land),
.
Mag 10 %
Mag (
Level 0.5 2 ).
Height
, .
6. ( , , )
(. 4-33).
. 4-33
7. .
8.
4.4.2.
(. 4-34).
Mag(Heigth) .
,
, .
3-128
3. -
. 4-34
,
( ),
( ).
. , Height,
() ().
.
.
.
,
(. 4-35).
. 4-35.
Data,
(. , 2).
3-129
4.4.3.
.
Mag(Heigth)
. ,
, z-
.
,
z- ( Height):
= Height
(1)
,
.
,
, .
Height, Mag
( Set Point) ,
.
,
Mag Height:
Height = K Mag
(2)
.
Mag
Height.
(Pair Markers)
(. 4-36).
DX DY Height Mag.
. 4-36
3-130
3. -
, (2) ,
,
Mag, :
K = Height / Mag = DX / DY= 31.7 / 4 = 7.93 [/]
(3)
:
(4)
= KMag
, Set Point = 8 ,
64 .
. ,
Gain, Lock-In
- ( Scheme ).
, K
. Lock-In ,
. , ,
.
4.5. (Phase(Height))
z- , ..
Phase(Height).
, ,
, ,
.
,
(.
, 3, 2, . ).
4.5.1.
,
4.2 (. 3-112).
. ,
.
:
1. ,
SemiContact (. 4-37).
. 4-37
3-131
2. (
).
3. Height;
f1(a) Phase (. 4-38).
. 4-38
4. ( Land Lift).
.
. (
Land) Height
10-20 % Mag
(. 4-39).
Mag(Height) (. . 4.4
(Mag(Height)) . 3-127).
Height ~ -50 .
Mag
~ 10-20%
. 4-39
5. (. 4-40).
. 4-40
3-132
3. -
6. ( , , )
(. 4-33).
. 4-41
7. .
8.
4.5.2.
(. 4-42).
Phase(Height) .
,
, .
. 4-42
,
( )
( ).
. , Height,
() ().
.
.
3-133
Phase(Height)
, , . , . 4-42
.
.
. 4-43
. . ,
, .. ,
( Amplitude).
. 4-43
.
,
(. 4-44).
. 4-44.
Data,
(. , 2).
3-134