Optical MEMS

ABSTRACT

Optical MEMS (Micro-Electro-Mechanical Systems) is the integration of

mechanical elements, sensors, actuators, and electronics on a common
silicon substrate through microfabrication technology. And Optical MEMS
has created a new fabrication paradigm for optical devices and systems.
Using tools developed for the integrated-circuits industry, Optical MEMS
brings unprecedented levels of miniaturization and integration to optical
communication systems. Today , the capacity of optical communication
networks is limited by the switches that are electronic in their core. Optical
MEMS is transforming the telecommunications infrastructure by providing
all-optical switches that enable high-capacity networks. Optical MEMS
devices are driving the trend toward all-optical telecommunication networks.
With the ability to directly manipulate an optical signal, MEMS have several
applications that eliminate unnecessary optical-electrical-optical (O-E-O)
conversions. In optical communication, electrical components such as
inductors and tunable capacitors can be improved significantly compared to
their integrated counterparts if they are made using optical MEMS
technology. With the integration of such components, the performance of
communication circuits will improve, while the total circuit area, power
consumption and cost will be reduced. 

In addition, the mechanical switch, it is a key component with huge potential

in various microwave circuits. Optical MEMS technology is currently used in
low- or medium-volume applications. It proves to be a boon for the modern
world.

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AKNOWLEDGEMENT

TABLE OF CONTENTS

ABSTRACT……………………………………………………………………….2
AKNOWLEDGEMENT…………………………………………………………..3
TABLE OFCONTENTS…………………………………..……………………..4

1. Introduction…………………………………….……………...................5
2. What is MEMS?..…………………….. ..….………………...................5
3. What is Optical MEMS?..………………..…...…………………............6
4. MEMS mirrors ...………………..……...……………….........................7
4.1 Types……………………………………………………………..7
4.2 Torsional Mirror………………………………………………….8
4.3 Piston mirror……………………………………………………..12
5. Applications ...…………………………....……...…………………..…..13
5.1 Display of imaging system…...………………………………...14
5.1.1 DMD…………………..…………………………...15
5.1.2 GLV………………………………………………...16
5.2 Fire Optic communication………………………………..…….18
5.3 Adaptive Optics………………………………………………….19
5.4 Data storage……………………………………………………..21
5.5 Use in medicine…………………………………………………22
6. Disadvantages of Optical MEMS devices..…………………………...24
7. Conclusion……………..………………………………………..............25
8. References……………………………………………………………….26

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 1. Introduction

The increasing quest for transporting large amounts of data at a fast speed,
search for adaptive optics and high resolution video graphics along with
miniaturization of electronic components has evolved a new era in micro-
structure world .The sophisticated technology of Optical MEMS devices,
currently used in low- or medium-volume applications proves to be a boon
and outshines all tradiotional devices.

2. What is MEMS ?

Micro-Electro-Mechanical Systems (MEMS) is the integration of

mechanical elements, sensors, actuators, and electronics on a common
silicon substrate through microfabrication technology. While the
electronics are fabricated using integrated circuit (IC) process sequences
(e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical
components are fabricated using compatible "micromachining" processes
that selectively etch away parts of the silicon wafer or add new structural
layers to form the mechanical and electromechanical devices.

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Microelectronic integrated circuits can be thought of as the "brains" of a
system and MEMS augments this decision-making capability with "eyes"
and "arms", to allow microsystems to sense and control the environment.
Sensors gather information from the environment through measuring
mechanical, thermal, biological, chemical, optical, and magnetic
phenomena. The electronics then process the information derived from
the sensors and through some decision making capability direct the
actuators to respond by moving, positioning, regulating, pumping, and
filtering, thereby controlling the environment for some desired outcome or
purpose

3. WHAT IS Optical MEMS?

The integration of micro-optics and micro-electromechanical systems has

created a new class of Microsystems , termed micro-opto-electro-
mechanical systems (MOEMS).

Optical MEMS (Micro-Electro-Mechanical Systems) is the integration of

mechanical elements, sensors, actuators, and electronics on a common
silicon substrate through microfabrication technology. And Optical MEMS
has created a new fabrication paradigm for optical devices and systems.
Using tools developed for the integrated-circuits industry, Optical MEMS
brings unprecedented levels of miniaturization and integration to optical
communication systems. Today , the capacity of optical communication
networks is limited by the switches that are electronic in their core. Optical
MEMS is transforming the telecommunications infrastructure by providing
all-optical switches that enable high-capacity networks. With the ability to
directly manipulate an optical signal, MEMS have several applications that

5
eliminate unnecessary optical-electrical-optical (O-E-O) conversions. In
optical communication, electrical components such as inductors and
tunable capacitors can be improved significantly compared to their
integrated counterparts if they are made using optical MEMS technology.
With the integration of such components, the performance of
communication circuits will improve, while the total circuit area, power
consumption and cost will be reduced. In addition, the mechanical switch,
as developed by several research groups, is a key component with huge
potential in various microwave circuits. Optical MEMS technology is

currently used in low- or medium-volume applications.

4. MEMS Mirrors

• In Optical MEMS mechanical motion of microstructures is used for

manipulation of photons.
• MEMS Mirrors are the most critical component for optical MEMS
technology.
• MEMS mirrors are useful to
– Modify the optical path on the chip
– Couple Light in and out of optical fibers
– Redirect light in image formation devices

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4.1 MEMS Mirrors: Types
• Two fundamental types of mirrors based on motion

Torsional mirrors Piston mirrors

Piston mirrors move

Torsional mirrors deflect light
perpendicular to the plane of
spatially by rotating the mirror
the mirror and shift the phase
surface relative to the plane
of the incoming light

4.2. Torsional Mirrors

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Mechanical Restoring Torque

• The restoring mechanical torque exerted on the plate by the beams for
an
angular rotation θ is given by
Mechanical Restoring Torque

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 TM = kθθ

where

Electrostatic Torque

Electric Field

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Electro static torque produced by an incremental plate length dx located at
x is given by

Total electrostatic torque is obtained by integrating the incremental torque

over the plate length

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Stability Analysis
In the stable region, initially the electrostatic torque is greater than the
mechanical restoring torque TE < TM
To reach a stable equilibrium point, the plate will rotate so as to
compensate the electrostatic torque that increases with square of the
voltage by a restoring mechanical torque that increases in proportion to
the angular rotation
At equilibrium TE = TM

We obtain

For equilibrium in the stable region,

A restoring torque will bring the plate back to its initial position even in the
presence of any small perturbation in the angular displacement.

4.3 Piston Mirrors

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5.Applications
A few applications of Optical MEMS include

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• Display and Imaging Systems
• Fiber Optic Communication
• Optical Scanning Systems
• Adaptive Optics
• Data storage
• Medicine

5.1 Display and Imaging Systems

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MEMS technology is well suited for making sophisticated imaging
devises which includes features such as
 High Resolution
 High Contrast and Brightness
 Small Size
 Controlled in both digital mode and analog
modes
 New market such as portable projector and
large screen TV Micromirror Array

Two types of imaging devices :

– Digital Mirror Device
– Grating Light Valve

5.1.1 DMD

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Digital micromirror device (DMD) technology focuses on the impact of a
fully digital video display system. It redefines the architecture of an entire
video system that can dramatically decrease costs and increase
performance from current display technologies (CRT and LCD).

The inherent nature of a digital display tends toward high-performance

applications, such as highdefinition or high-quality displays. In addition,
the digital nature of the technology matches well with today's surge in
computer graphics display. In contrast, rapid integration of digital
semiconductor technology could enable low-cost applications of the
technology, such as consumer TV or personal viewers. Future displays
will focus on the display of media from several sources, such as digital
multimedia TVs or personal ports into the "information superhighway." In
general, the scope of the DMD display application space is very large and
seemingly ever- increasing high definition or high-quality displays. In
addition, the digital nature of the technology matches well with today's
surge in computer graphics display. In contrast, rapid integration of digital
semiconductor technology could enable low-cost applications of the
technology, such as consumer TV or personal viewers. While digital
displays have inherent high performance, this can be traded for a cost
advantage in these applications. Future displays will focus on the display
of media from several sources, such as digital multimedia TVs or personal
ports into the "information superhighway." In general, the scope of the
DMD display application space is very large and seemingly ever-
increasing.

.
5.1.2 GLV

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The Grating Light Valve (GLV) technology is a micromechanical phase
grating. By providing controlled diffraction of incident light, a GLV device
will produce bright or dark pixels in a display system.With pulse width
modulation, a GLV device will produce precise gray-scale or color
variations. Built using
micro electromechanical system (MEMS) technology, and designed to be
manufactured using mainstream.IC fabrication technology, the GLV device
can be made both small and inexpensively. A variety of display systems
can be built using GLV technology each benefiting from the high contrast
ratio, fill ratio, and
brightness of this technology. In addition, GLV technology can provide
high resolution, low power consumption, and digital gray-scale and color
reproduction.

A Grating Light Valve (GLV) device consists of parallel rows of reflective

ribbons. Alternate rows of ribbons can be pulled down approximately one-
quarter wavelength to create diffraction effects on incident light . When all
the ribbons are in the same plane, incident light is reflected from their
surfaces. By blocking light that returns along the same path as the incident
light, this state of the ribbons
produces a dark spot in a viewing system. When the (alternate) movable
ribbons are pulled down, however, diffraction produces light at an angle
that is different from that of the incident light. Unblocked, this light
produces a bright spot in a viewing system.

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The Grating Light Valve uses reflection and diffraction to create dark and bright image

areas.

If an array of such GLV elements is built, and subdivided into separately

controllable picture elements, or pixels, then a white-light source can be
selectively diffracted to produce an image of monochrome bright and dark
pixels. By making the ribbons small enough, pixels can be built with
multiple ribbons producing greater image brightness. If the up and down
ribbon switching state can be made fast enough, then modulation of the
diffraction can produce many gradations of gray and/or colors.
.
There are several means for displaying color images using GLV devices.
These include color filters with multiple light valves, field sequential color,
and sub-pixel color using "tuned" diffraction gratings.

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5.2 Fibre optic communication

Optical MEMS has brought unprecedented levels of miniaturization and

integration to optical communication systems. Today , the capacity of
optical communication networks is limited by the switches that are
electronic in their core. Optical MEMS is transforming the
telecommunications infrastructure by providing all-optical switches that
enable high-capacity networks.It has features like
 Switching Speed in µs/ms range
 Low Crosstalk / Low Insertion Loss
 Small Size / Low Cost
 Scalability to Large Number of I/O Port

Optical MEMS devices are driving the trend toward all-optical

telecommunication networks. With the ability to directly manipulate an
optical signal, MEMS have several applications that eliminate
unnecessary optical-electrical-optical (O-E-O) conversions. In optical
communication, electrical components such as inductors and tunable
capacitors can be improved significantly compared to their integrated
counterparts if they are made using optical MEMS technology. With the
integration of such components, the performance of communication
circuits will improve, while the total circuit area, power consumption and
cost will be reduced. In addition, the mechanical switch, as developed by
several research groups, is a key component with huge potential in
various processing and communication circuits.

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5.3 Adaptive Optics

Optical MEMS can be used to create adaptive optics chips which can be
used for wavefront correction systems. There are a variety of application
for wavefront correction systems ranging from advanced military targeting
systems to preview systems for advanced surgeries.

Adaptive Optics systems are in use today on large Astronomical

telescopes. Adaptive optics remove the optical imperfections that result
from peering through the atmosphere. These systems are built today with
expensive macro technology. While they work very well, these systems
are very expensive. Large telescopes are not that sensitive to costs, so
they can readily afford the present significant costs in order to improve the
quality of the images that see. More widespread adoption of adaptive
optics, and wavefront correction is hampered, however, by the significant

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costs of traditional systems.

MEMS offer the promise of achieving low cost adaptive optics systems.
With lower cost, there are many applications which could benefit from
wavefront correction. Some applications under consideration for a low cost
adaptive optics system include preview systems for LASIK surgery,
ophthalmic phoropters, and fundus imaging systems. Fundus imaging
systems are used by eye doctors to image the retina, and detect
degenerative eye disease. The challenge is that image quality from
present systems is poor, and the disease can be in advanced stages
before a doctor can detect it. Improving the image quality through use of
affordable MEMS adaptive optics systems will allow surgeons to detect
degenerative eye disease at much earlier stages where it is easier to treat,
and before vision is affected.

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MEMS chips have been created to meet the demanding requirements of
the vision science community. The chip will enable the creation of high
performance, cost effective adaptive optics systems. The vision science
community has significant interest in obtaining such systems for a variety
of ophthalmic applications. This chip will enable a true paradigm shift, and
will permit the placement of high performance imaging systems into the
hands of ophthalmologists and optometrists. These chips should enable
order of magnitude improvements in the doctor's ability to image the
retina, and as such, will dramatically increase the ability to diagnose
degenerative ophthalmic conditions while they are still treatable.
Enhanced capabilities in fundus imaging will enable earlier detection of
disease, better measurement of treatment effectiveness, and the
development of improved treatment methods.

5.4 Data Storage

Optical data storage is a promising field to which the optical MEMS

technology can be applied. Tight integration of optical and mechanical
components is needed for the optical head for data storage in the next
generation. The diffraction limit in optical storage using a lens can be
overcome by near-field optical technology. An optical storage system
with a multi-probe array based on scanning near-field optical
microscopy (SNOM) is proposed. An integrated SNOM probe with a
micro aperture for generation of the optical near-field has already been

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fabricated. The data is stored in the optical array of mirrors which can
be extracted easily.This gives us voluminous data storage facility at a
very low cost.

5.5 Use in Medicine

Optical MEMS facilitates advanced surgery, ophthalmic phoropters, and

fundus imaging systems. Fundus imaging systems are used by eye
doctors to image the retina, and detect degenerative eye disease.

The challenge is that image quality from present systems is poor, and the
disease can be in advanced stages before a doctor can detect it.
Improving the image quality through use of affordable MEMS adaptive
optics systems will allow surgeons to detect degenerative eye disease at

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much earlier stages where it is easier to treat, and before vision is
affected.

Optical biopsy provides high-resolution, cross-sectional imaging of tissue

noninvasively.

There are several optical biopsy techniques including optical coherence

tomography (OCT), nonlinear optical (NLO) imaging and confocal imaging.
Conventional optical imaging systems are too bulky and have slow
imaging speed and its solution is using MEMS mirrors and lenses for
miniaturization

The following images shows Endoscopic OCT imaging and Confocal

microscopic imaging which proves to be a boon for modern medical
treatements.

1. MEMS Endoscopic OCT Imaging

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2. Confocal Microscopic Imaging ---

6.Disadvantages of Optical MEMS devices

• High driving voltage (~100V), which raises safety concern

• Small rotation angle (<30°), resulting in low imaging efficiency

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• Relatively small aperture size (~0.5mm), resulting in low image
resolution
• Small linear displacement (<45μm) (small imaging depth for
confocal imaging)
• Limited degree-of-freedom (DOF) ( Multiple DOF desired.)
• Fabrication of optical MEMS components (Time consuming,
Process R&D required ,Expensive startup, Complex business
relationship )

7.Conclusion

Optical MEMS promises to revolutionize nearly every product category by

bringing together silicon-based microelectronics with micromachining
technology, and optical components thus making possible the realization
of complete systems-on-a-chip. Optical MEMS is an enabling

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technology allowing the development of smart products, augmenting the
computational ability of microelectronics with the perception ,control
`capabilities and communication of micro-sensors , micro-actuators and
micro-mirrors and expanding the space of possible designs and
applications.

8. References:

 Scientific American India, January-2008 Issue

 Optical fibres and fibre optic communication systems,Subir K Sarkar,
S.Chand Publications
 www.sciam.co.in

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 www.wikipedia.co.in
 www.centralchronicle.co.in
 www.freepatentsonline.com
 www.omems.com

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