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HUKINGS Solid State RF Generator Data Sheet

HSRFG-13.56MHz-5000W
HUKINGS solid state Radio-frequency generators provide continuous wave (CW) output power
adjustable from 100 W to 3000 W at frequencies ranging between 13.56 MHz and 433 MHz.

This generator(13.56MHz) is ideally designed for all plasma applications including, PECVD, HDPCVD,
PVD, ALD, etc, and manufacturing of integrated circuits, solar cells, flat panel displays, LEDs and data
storage devices, etc.
HUKINGS solid state Radio-frequency generators feature:
1)

Semiconductor (longer life time than magnetron & no high voltage)

2)

True RMS detector with linear measurement of reflected and forward power

3)

Compact size and lighter weight

4)

Frequency stability equals 13.56MHz, forward power referenced to rating 250KHz

5)

Regulation tolerance of 1.5%

6)

point within power range

7)

Automatic load mismatch protection

Address: No. 1408, North of Tianfu Dadao Road, High-Tech District, Chengdu, 610000, Sichuan, China.
Tel: +86-28-8411-1861 Fax: +86-28-6792-0663 Web: www.hukings.com E-mail: info@hukings.com
HUKINGS and its logo are trademarks of HUKINGS or one of its subsidiaries.
Copyright @ 2016 HUKINGS All rights reserved.

Your Reliable Source for Solid State Amplifiers and Generators

HUKINGS Solid State Radio-frequency generators- HSRFG-13.56MHz-1000W Technical Specification
Model

HSRFG-13.56MHz-5000W

Rated power output

5000W

Frequency stability

13.56MHz 0.005%

Dynamic power rang

10-5000W

Load impedance rang

unlimited

Harmonic output & distortion

< -40dBc

Load mismatch protection

Automatic; forward power limits typically 0.25ms

after reverse power reaches a pre-programmed
level 20% of rated power.

VSWR

1.1:1 5000W
2.0:1 3250W
3.0:1 2000W

Regulation tolerance

> 5000 W: 1.5%

SP < 500 W: 10.0 W

Primary AC power source

3800/400 VAC, 3/PE~ (3W+G) 15A/PHASE

Cooling system

Water flow at 2.0 Gal. /Min. (7.6 LPM) minimum

at +5C to +35C.
Connections provided to accept 3/8 male (NPT)
pipe thread.

Power readout

Digital readout displays frequency and forward,

reflected and load power

Safety compliance

NRTL Listed: UL3111-1 (1994) CAN/CSA C22.2

No. 1010.1-92 EN61010-1:1993; A2:1995

EMC compliance

EN50081-2: 1992 EN50082-2: 1995

Remote interface connectors

Standard: RS-232 Subminiature Type-D 9-pin

digital; optional custom interface cards available.

RF output connector

Type N

Weight

91 lbs. (41.3 kg)

Dimensions(HxWxD)

8.72x19rack mountx22.1
(221x483x560 mm)

Issued by HUKINGS
Version2.16
Address: No. 1408, North of Tianfu Dadao Road, High-Tech District, Chengdu, 610000, Sichuan, China.
Tel: +86-28-8411-1861 Fax: +86-28-6792-0663 Web: www.hukings.com E-mail: info@hukings.com
HUKINGS and its logo are trademarks of HUKINGS or one of its subsidiaries.
Copyright @ 2016 HUKINGS All rights reserved.