MEMS Everywhere:

Making the world more sensitive!

Semicon Taiwan 2012 baron@yole.fr

2012

MEMS Sensor & Actuator Applications

Sensing
applications

Voice / Sound
Silicon microphones

Motion / position
Gyroscopes

Pressure monitoring
Pressure -sensors

Projecting / receiving Light

Micromirrors

RF related functions
Oscillators / Resonators

Managing fluids
Ink-jet MEMS modules

Emerging MEMS
-Displays, MEMS

Accelerometers TPMS modules Microbolometers

RF-MEMS switches

Microfluidic & Bio-chips

Auto-focus actuators

Magnetometers

FBAR / BAW filters

Humidity sensors

Fusion sensor combos & IMUs

SAW filters

The application scope for MEMS sensors and actuators is broad but highly fragmented!
2012

An Expanding Array of Products

maturity of selected MEMS devices
with expected CAGR to 2015

Inkjet printheads

BAW duplexers
Optical MEMS for projection / 6% Optical MEMS switch / 19% Automotive TPMS Microphones / 11% Microbolometers / 12% Accel / Gyro combos (ESC) / 49% Accel/Gyro combos for mobile / 80% Energy harvesting MEMS Speakers Silicon oscillators Auto Focus / 348% RF-MEMS for radio front end module / 171% 9/10DOF inertial combos / 105% MEMS mirrors picoprojectors Microdisplay / 110%

Emerging
2012

Development

Mature

Decline

Continued Strong Growth

2011-2017 Forecast (in US$M)(in M$) MEMS Market forecast 2009-2017 value
$25 000M
Yole Developpement March 2012

Other Oscillators RF MEMS Microdispensers (microfluidics) Microfluidics for IVD Microfluidics for Research Other optical MEMS

$20 000M

$15 000M

Projection systems Micro displays PIR & Thermopiles Microbolometers Inertial combos Digital Compass Gyroscopes

$10 000M

$5 000M

Accelerometers Microphones Pressure Sensors InkJet Heads

2010 2011 2012 2013 2014 2015 2016 2017
4

$0M
2012

Consumer Market Builds Dominance MEMS Market Value Evolution (in $M)
$25 000M

Yole Developpement March 2012 Telecom

$20 000M Revenues (in M$)

Medical
$15 000M

Industrial Aeronautics

$10 000M

Defense
$5 000M

Consumer
Automotive

$0M
2009 2010 2011 2012 2013 2014 2015 2016 2017

Mobile applications are driving >50% of the volume with a CAGR ~ 13% Telecom and medical will grow ~20% in the next 5 years Industrial also significant with growth of ~13% expected
2012

TOP 30 MEMS Players

Global ranking
$1 200

2011 TOP 30 MEMS Players

Yole Dveloppement March 2012 913 907

Yole Developpement April 2012

$1 000

762

$800

US$M

$600

738 362 336

284

279

261

255

251

250

$400

237

174

153

150

144

144

136

121

102

90

$200

110

77

76

75

62

56

55

$0

2012

51

2011 MEMS Ranking 2011/2010 CAGR TOP 30 Ranking

2011/2010 CAGR Ranking TOP 30 MEMS Players
100%

Yole Developpement April 2012

80%

60%

40%

20%

0%

-20%

-40%

2012

TOP 30 MEMS Foundries

Global ranking
245

2011 MEMS Foundries Ranking Yole Dveloppement March 2012

Yole Developpement April 2012

$250

$200

$150

US$M
$100

49

47

26

24

23

20

$50

37

17

16

15

15

12

12

$0

2012

Putting the Smart in Smart Phones

consumer mobile devices driving demand
MEMS & sensors in mobile phone

2012

2011-2017 Market Overview

Application trends
2011-2017 Market Trends for MEMS in cell phones and tablets
Arrows show market size evolution from 2011 (start of arrow) to 2017 (end of arrow)

2012-2015 CAGR (in value)

AF Oscillators / resonators

150%

Other emerging MEMS Micromirrors

RF MEMS switches / capacitors 100%

Microdisplays Psensors Combos 9DOF Combos A+G

50%
Combos A+M

10%
BAW filters Accel.

BAW duplexers Microphones Gyros. Magnetometers

-15% $20M
2012

$100M

$300M

$500M

Market

10

Key MEMS suppliers to cell phone makers

(as of May 2012)
2011 Cell Phone Market Shares (in volume)
- Total = 1511M units Source Yole dveloppement, IDC, Gartner May 2012
For Motorola: Kionix, ST Micro (MEMS acceleros) InvenSense (MEMS gyros) AKM (magnetos) Knowles, Wolfson (MEMS
microphones)
SonyEricsson 2% Others, Counterfeit & Unlicenced 26% Nokia 27%

For Nokia: ST Micro, Analog Devices (MEMS

acceleros)

ST Micro (MEMS gyros) AKM, Aichi MI (magnetos) Knowles, ST Micro (MEMS microphones)

TriQuint, Avago (BAW filters)

Huawei 2% Motorola 2% HTC 3% RIM 3% ZTE 4% LG Apple 4% 6% Samsung 21%

For Samsung: ST Micro, Bosch Sensortec, Kionix

(MEMS acceleros)

For HTC:

InvenSense (MEMS gyros)

Avago, TriQuint (BAW
filters)

ST Micro, InvenSense (MEMS gyros)

AKM (magnetos)
Knowles (MEMS microphones) TriQuint, Avago (BAW filters) Wispry (RF-MEMS antenna tuner)

For RIM: Bosch Sensortec, Freescale (MEMS

acceleros)

For LG: For ZTE: Kionix, Freescale

(MEMS acceleros)

TI (micromirrors) For Apple: ST Micro (MEMS acceleros) ST Micro (MEMS gyros) AKM (magnetos) Knowles, AAC Acoustics (MEMS microphones) TriQuint, Avago (BAW filters)

Bosch Sensortec, Kionix, Freescale (MEMS

acceleros)

InvenSense
(MEMS gyros)

InvenSense (MEMS
gyros)

InvenSense (MEMS gyros) Knowles (MEMS

microphones)

TriQuint (BAW
filters)
2012

TriQuint, Avago (BAW

filters)

TriQuint (BAW filters)

11

Penetration Rate: Replacement

power of incumbency

50% 45% 40% 35% 30% 25% 20% 15% 10% 5% 0%

Penetration in mobile phones and tablets (%)

Yole dveloppement May 2012

2002

2003

2004

2005

2006

2007

2008

2009

2010

2011 2012e 2013e 2014e 2015e 2016e 2017e

Silicon microphones penetration - % (historical data) BAW filters penetration - % (historical data)
2012

12

Penetration Rate: New Function

Acceptance = takeoff

Penetration in mobile phones and tablets (%)

80%
Yole dveloppement May 2012

70% 60% 50% 40% 30% 20% 10% 0%

2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012e 2013e 2014e 2015e 2016e 2017e

Magnetometer penetration - % (historical data) MEMS gyroscopes penetration - % (historical data) MEMS accelerometers penetration - % (historical data)
2012

13

The Growing Billion Unit Club

MEMS cumulative shipments by selected companies (Munits)
3000
Yole dveloppement May 2012

2500
2000 1500 1000 500

Knowles microphones ST MEMS Poly. (Knowles microphones) Poly. (ST MEMS)

2012

Avago FBAR shipments Bosch MEMS Poly. (Avago FBAR shipments) Poly. (Bosch MEMS)

Freescale MEMS SiTime MEMS oscillators Linaire (Freescale MEMS) Linaire (SiTime MEMS oscillators)

14

Alpha MEMS Companies

Top 4 suppliers have >50% market share in 5 different MEMS markets

2012

15

2009-2011 market shares evolutions

ST is growing, Avago decrease InvenSense appears

2012

16

Global MEMS Market for Mobile Phones / Tablets

Breakdown by product category

Silicon microphones Pressure sensors

Energy harvesting Environmental sensors (temperature, humidity) Micro fuel cells Microspeakers Touchscreen Joystick Auto-Focus Microdisplay Micro-mirror for picroprojectors

MEMS timing devices MEMS switch / variable capacitors BAW filters BAW duplexers
2012

Accelerometers Magnetometers Gyroscopes 6 to 9DOF inertial combos

17

2011 market shares for discrete inertial sensors

2012

18

Motion sensors
Still the hottest sensors in mobile devices
Market for motion sensors in mobile devices is both large and still quickly expanding
Driven by the increase of the attach rate (even gyroscopes are now accepted in the market) And by the global increase of the smartphone and tablet market Market ($M)

Motion sensors for mobile phones and tablets - 20092017 market ($M)
2000
Yole dveloppement May 2012

1800 1600 1400 1200 1000 800 600 400 200 0 2009 2010 2011 2012e2013e2014e2015e2016e2017e
MEMS accelerometers Magnetometers Combos accelerometers gyroscopes MEMS gyroscopes Combos accelerometers magnetometers Combos 9DOF

Market for discrete inertial sensors is predicted to decrease from 2014

Discrete MEMS accelerometer maturates Discrete gyroscopes and magnetometers still growing for a few years However technical evolutions are still observed: towards 1x1mm accelerometers and 2x2mm gyroscopes within a few years

Global market will stabilize after 2014

Continuous growth in volume, but prices will keep decreasing Combo sensors will grow: each element will be more mature, integration is combo will lead to cost reduction

2012

19

Key elements of a MEMS microphone module

Encapsulation
(metal lead, molding compound, PCB)

Glob-top
material

ASIC die Wire-bond interconnect MEMS die Die attach material

MEMS microphone module
(Source Knowles Acoustics)

Substrate
(PCB laminate, Ceramic, Leadframe)

Note: some elements described here can be optional or redundant depending on the exact design choices made by each MEMS module manufacturer
2012

20

Microphones for mobile applications

Value chain estimation in 2017
2012 market: $508M, 1421 Munits 2017 market: $829M, 3227Munits

MEMS Microphone Cost Structure in 2012

MEMS die, test, dicing (with foundry overhead if any) 16,5% ASIC die, test, dicing (with foundry overhead if any) 11,6% MEMS manufacturing $130M - $140M

ASIC manufacturing

$100M - $110M

Gross Margin $300M $320M

Gross margin (Cost of sales, G&A, R&D, Operational margin) 43,0%

Assembly & packaging $210M - $230M

Final test, yield losses $25M - $40M Final test & yield losses 3,6% Final packaging 25,2%

2012

21

2011 Key MEMS Player Activity Estimate

outsourced packaging assembly, test & calibration

~ $2B

~ $8B

~ $0.4B

~ $1B

~ $0.4B

~ $0.2B

Fabless / Fab-light

IDMs

* Revenue estimates related to MEMS

ASIC foundrie s

MEMS foundries

WLP houses

BE & Test houses

OSATs

Substrate houses

2012

22

Next WAVE of emerging MEMS

DelfMEMS switch

Implantable pressure sensor (from Sensimed)

Sand 9 MEMS Oscillator

AudioPixel microspeaker

Oscillators + micromirrors + displays + switches & variable capacitors + temperature sensors + AF + microspeakers + other emerging MEMS From $13M to $2.3B market (2017)
Samsung Galaxy Beam features TI DLP

Sensirion Humidity Sensor

(in cell phones and tablets)

Wispry antenna tuner on cell phone board

NextInput SoftTouch interface Polight MEMS autofocus

2012

TI temperature sensor versus a competing thermopile sensor

23

Conclusion & Perspectives

After 3 relatively flat years, MEMS sales jumped 25% in 2010 and the 2011 market kept increasing
Consumer market has the strongest influence on the MEMS industry

Inertial combos will account for more than 1/3 of the global inertial MEMS market in 2017
It is now challenging for newcomers to enter the mobile market
Newcomers can target new applications, in this case they need to create a new market For existing applications there are already several solid suppliers and prices are already low. The only possibility for newcomers is to introduce radical changes

High volume MEMS is not limited to 3 categories of MEMS (inertial, BAW, microphones)
SiTime: the first player to pass the 100M units barriers for those emerging MEMS markets Whos next?
2012

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Thank you very much for your attention!

Visit us during SemiconTaiwan 2012 @ Booth #1327

2012

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