Geers

MECH300G 2/22/01 updated
MECH300G Special Topics in Mechanical Vibrations
Dr. Yi-Kuen Lee

Associate Professor Department of Mechanical Engineering Hong Kong University of Science and Technology meyklee@ust.hk TA: Ran LIN, rlin@ust.hk
http://www.me.ust.hk/~mech300g
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Dr. Y.K. Lee
Outline
What is Vibration? What is MEMS? $$$ History overview Current and future applications: vibration
control (passive & active), vibration-based machines, etc.
Micro accerolerometers, micro gyroscopes, micromechanial filters, micro/nano resonant biosensors

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Dr. Y.K. Lee
Vibration definition
Vibration : Any motion that repeats itself after an
interval of time is called vibration or oscillation.
The swinging of a pendulum and the motion of a plucked string are typical examples of vibration. The study of vibration deals with the study of oscillatory motions of bodies and the forces associated with them.
From Encyclopedia Britannica:

periodic back-and-forth motion of the particles of an elastic body or medium, commonly resulting when almost any physical system is displaced from its equilibrium condition and allowed to respond to the forces that tend to restore equilibrium.
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Dr. Y.K. Lee
Why study vibration?

Vibrations can lead to excessive deflections and failure on the machines and structures To reduce vibration through proper design of machines and their mountings To utilize profitably in several consumer and industrial applications (quartz oscillator for computers, vibration conveyor,
electric tooth brushes, electric massaging unit)
To improve the efficiency of certain machining, casting, forging & welding processes To stimulate earthquakes for geological research and conduct studies in design of nuclear reactors
Dr. Y.K. Lee
Simple vibration systems
Dr. Y.K. Lee
History of Vibration
Harp with bull-headed soundbox 2600 BC (Fig. 1.1) Greek philosopher & mathematician Pythagora (582507BC): first to study musical sound on a scientific basis Chang Heng, astronomer in Han Dynasty invented an accurate seismograph in AD 132 - 1600 years before anyone in the West did. Galileo Galilei (1564-1642): study simple pendulum Issac Newton (1642-1727), Bernoulli (1700-1782) Euler (1707-1783), Lagrange (1736-1813): systematic method Charles Coulombs device for torsional vibration tests 1784 S. Timoshenko (1878-1972): Timoshenko beam theory R. D. Mindlin: Mindlin plate theory Poincare and Lyapunov: nonlinear vibration Duffing and van der Pol: nonlinear vibration in engineering Vibration in nanotech (Nano Electromechanical System, NEMS) Prof Michael Roukes, Caltech: http://nano.caltech.edu/
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Brief History of Vibration Greek philosopher & mathematician Pythagora (582-507BC): first to study musical sound on a scientific basis. He conducted experiments on a vibrating string by using a simple apparatus called a monochord. He further developed the concept of pitch.
pitch = property of sound that varies with variation in the frequency of vibration = frequency of a given tone
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Brief History of Vibration
CHANG Heng () (AD78-139), astronomer in Han Dynasty invented a accurate seismograph in AD 132 1600 years before anyone in the West did (British Professor John Milne, father of modern seismology, invented the horizontal pendulum seismograph in 1880)
1. http://neic.usgs.gov/neis/seismology/part03.html 2. http://en.wikipedia.org/wiki/Seismograph
3. Needham, J. (1959). () Science and Civilization in China, 3, Cambridge, 624-635 (HKUST Library: DS721 .N39)
Dr. Y.K. Lee

Galileo to Rayleigh: Galileo Galilei (1564 1642) - founder of modern experimental science - started experimenting on simple pendulum - published a book, Discourses Concerning Two New Sciences, in 1638, describing resonance, frequency, length, tension and density of a vibrating stretched string Robert Hooke (1635 1703) - found relation between pitch and frequency of vibration of a string
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Dr. Y.K. Lee
Brief History of Vibration Joseph Sauveur (1653 1716)

- coined the word acoustics for the science of sound - founded nodes, loops, harmonics and the fundamental frequency - calculated the frequency of a stretched string from the measured sag of its middle point
Sir Isaac Newton (1642-1727) - published his monumental work, Philosophiae Naturalis Principia Mathematica, in 1686, discovering three laws of motion
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Dr. Y.K. Lee

Joseph Lagrange (1736 1813) - found the analytical solution of the vibrating string and the wave equation Simeon Poisson (1781 1840) - solved the problem of vibration of a rectangular flexible membrane R.F.A. Clebsch (1833 1872) - studied the vibration of a circular membrane Lord Baron Rayleigh - founded Rayleigh-Ritz method, used to find frequency of vibration of a conservative system and multiple natural frequencies
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Dr. Y.K. Lee

Recent contributions: 1902 Frahm investigated the importance of torsional vibration study in the design of propeller shafts of steamships; invented Dynamic Vibration Absorber (1909) Aurel Stodola (1859 1943) - contributed to the study of vibration of beams,plates, and membranes. - developed a method for analyzing vibrating beams which is applicable to turbine blades Carl Gustaf Patrick de Laval (1845 1913) - presented a practical solution to the problem of vibration of an unbalanced rotating disk (The de Laval turbine)
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Dr. Y.K. Lee

1892 Lyapunov laid the foundations of modern stability theory which is applicable to all types of dynamical systems 1920 Duffling and Van der Pol brought the first definite solutions into the theory of nonlinear vibrations and drew attention to its importance in engineering Introduction of the correlation function by Taylor 1950 advent of high-speed digital computers generate approximate solutions
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1950s developed finite element method enabled engineers to conduct numerically detailed vibration analysis of complex mechanical, vehicular, and structural systems displaying thousands of degrees of freedom with the aid of computers Turner, Clough, Martin and Topp presented the finite element method as known today
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Dr. Y.K. Lee
Basic Concepts of Vibration Vibration = any motion that repeats itself after an interval of time Vibratory System consists of: 1) spring or elasticity 2) mass or inertia 3) damper Involves transfer of potential energy to kinetic energy and vice versa
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Dr. Y.K. Lee
Basic Concepts of Vibration Degree of Freedom (d.o.f.) = mininum number of independent coordinates required to determine completely the positions of all parts of a system at any instant of time Examples of single degree-of-freedom systems:
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Examples of single degree-of-freedom systems:
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Examples of two degree-of-freedom systems:
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Examples of three degree-of-freedom systems:
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Example of Infinite-number-of-degrees-of-freedom system:
1. Infinite number of degrees of freedom system are termed continuous or distributed systems 2. Finite number of degrees of freedom are termed discrete or lumped parameter systems 3. More accurate results obtained by increasing number of degrees of freedom
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Dr. Y.K. Lee
Classification of Vibration
1. Free Vibration: A system is left to vibrate on its own after an initial disturbance and no external force acts on the system. E.g. simple pendulum 2. Forced Vibration: A system that is subjected to a repeating external force. E.g. oscillation arises from diesel engines - Resonance occurs when the frequency of the external force coincides with one of the natural frequencies of the system
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1. Undamped Vibration: When no energy is lost or dissipated in friction or other resistance during oscillations 2. Damped Vibration: When any energy is lost or dissipated in friction or other resistance during oscillations 3. Linear Vibration: When all basic components of a vibratory system, i.e. the spring, the mass and the damper behave linearly
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1. Nonlinear Vibration: If any of the components behave nonlinearly 2. Deterministic Vibration: If the value or magnitude of the excitation (force or motion) acting on a vibratory system is known at any given time 3. Nondeterministic or random Vibration: When the value of the excitation at a given time cannot be predicted
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Classification of Vibration Examples of deterministic and random excitation:
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Vibration Analysis Procedure
Step 1: Mathematical Modeling Step 2: Derivation of Governing Equations Step 3: Solution of the Governing Equations Step 4: Interpretation of the Results
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Example of the modeling of a forging hammer
Anvil
Anvil: heavy block of iron or steel with a smooth, flat top on which metals are shaped by hammering
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Collapse of Tacoma Narrow bridge due to wind-induced vibration on July 1, 1940
Located at Bremerton, Washington, USA

http://maclab.alfred.edu/students/harttm/default.html
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Tsing Ma Bridge connecting HK to Airport
Equipped with 600 sensors, L=2.2km

http://mceer.buffalo.edu/publications/sp_pubs/medat2/presentations/Farrar-MEDAT-2/sld006.htm
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Vibration testing for space shuttle
http://www.unitedspacealliance.com/press/photo.htm
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Complex vibration system: fluttering in Boeing 747
Vibration in continuous media

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Different vibration modes in tuning fork
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Vibration and sound generation in tuning fork
Most common tuning fork used by musicians sounds the note of A (440 Hz, international "concert pitch"), which has long been used as a standard tuning note by orchestras. A tiny tuning fork (quartz) is used in digital watches, freq = 215 = 32,768 Hz
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http://www.onlinetuningfork.com
Dr. Y.K. Lee
Simple harmonic motion with circular motion of a point mass
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Vibration frequency and period
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Energy in vibration: KE and PE
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Passive vibration control (I)
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Passive vibration control (II)
Vibration isolator For forging hammer
Vibration isolator for metal forming press
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STACIS 2000 Active Piezoelectric Vibration Control System
Technical Manufacturing Corp. MA 01960, USA www.techmfg.com Canon stepper using STACIS2000
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Dr. Y.K. Lee
The Active Rack Isolation System (ARIS) For Intl Space Station (ISS)
Accelerometer
ISS
http://www.spaceref.com/iss/payloads/aris.html
ARIS
Actuators
Dr. Y.K. Lee
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Whats MEMS?
MicroSystem Technology (MST) popular in Europe Micro-Electro-Mechanical Systems (MEMS) widely used in United States Microengineering sometimes used in UK Micromachines used in Japan in Chinese
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Dr. Y.K. Lee
MEMS definition
MEMS is a study of making machines in micro scale with the fabrication technique in Integrated circuit (IC) industry. The size ranges from micrometer to milimeter (10-6 ~ 10-3 m) MEMS are the systems that integrate sensing actuation computation control communication power
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Dr. Y.K. Lee
Science
Traditional Engineering
MEMS
Nanotechnology
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107 106 105 104 103 102 101 100 10-1 10-2 10-3 10-4 10-5 10-6 10-7 10-8 10-9
Size Does Matter
Biomedical
Unit : Meter
Dr. Y.K. Lee
A brief history of MEMS

1947 1958 1961 1967 1970 1977 1979 1980 1982 1982 1984 1988 1989 1990 1991 1992 1992 1993 1996 2001
invention of the transistor (made from germanium) silicon strain gauges commercialized; first integrated circuit (TI: Jack Kilby) first silicon pressure sensor demonstrated (Kulite) Invention of surface micromachining (Nathanson, Resonant Gate Transistor) first silicon accelerometer demonstrated (Kulite) first capacitive pressure sensor (Stanford) Prof James Angell first thermal inkjet printer (HP lab) Petersen, K.E., "Silicon Torsional Scanning Mirror" disposable blood pressure transducer (Foxboro/ICT, Honeywell, $40) active on-chip signal conditioning First polysilicon MEMS device (Howe, Muller ); HP ThinkJet Rotary electrostatic side drive motors (Fan, Tai, Muller) Lateral comb drive (Tang, Nguyen, Howe) BIACORE microfluidic chip polysilicon hinge (Pister, Judy, Burgett, Fearing) Grating light modulator (Solgaard, Sandejas, Bloom), DARPA USD$80M/yr MCNC starts MUMPS First surface micromachined accelerometer sold (Analog Devices, ADXL50) Digital micro-mirrors array commercialized, DMD (Texas Instrument) Micro optical switch for internet backbone commercialized
Dr. Y.K. Lee
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Early Semiconductor Fabrication
J. Bardeen, W.H. Brattain, The first transistor, a semiconductor triode, Phys. Rev. 74, p.230,1948
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Micro accelerometer
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Micro accelerometer practical design
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ADI Automotive Accelerometers
1993
~1996
~1997
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ADXL202 Beam structure

Tether (Spring)
Anchor point
30 sensing cells per axis 1.2m gaps, 1m feature size 2m thick polysilicon structure suspended 1.6m above substrate 10kHz resonant frequency
Deflection due to 2g acceleration = 5nm = 25010-18F Minimum resolvable deflection = 0.04A = 9010-21F
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Dr. Y.K. Lee
Analog Devices Microgyro

Manufacturer: Analog Devices 2.6 m BiCMOS process
Part Number: AD9430BSV-170 2- m MEMS structures Device Type: Gyroscope Sensor LOCOS isolation Die Size: 11.3mm2 Multiple well design BiCMOS/MEMS integration
The Analog Devices ADXRS150 Gyroscope Sensor is a complete Z-axis rate-sensing device also known as a yaw-rate sensing device. The ADXRS150 Gyroscope Sensor is manufactured using a process that integrates a BiCMOS and mechanical MEMS process on the same substrate.
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Microgears driven by a microengines
US Sandia National Lab MEMS project for nuclear weapon security

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Mechanics courses in HKUST MECH Program

Mech 261: Control principles Mech 371 Introduction to Robotics Mech 300G: Mechanical Vibrations Mech 300F: Numerical methods in Eng. Mech 300H: Introduction to FEM
Mech 103: Mech. & Dyn of Machinery
Mech 101, 202 Solid mechanics (mechanics of material, strength of material) Mech 221 (521) Fluid Mechanics
Mech 593: Finite element method
Mech 523: Computational Fluid Dynamics
Mech 152: Design & Manufacturing I
Mech 252: Design & Manufacturing II Mech 251: CAD/CAM
Mech 398, 399: Final Year Design Project I & II
Mech 098, 099 Industrial Traning 51
Mech 283, 284 Mech Laboratory I & II

Dr. Y.K. Lee
Summary
Whats Vibration and MEMS
Vibration and MEMS history What are the applications of MEMS How MEMS devices works MEMS : Small machines, big opportunity
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Dr. Y.K. Lee
References
Nobel laureate Richard Feynmans talk http://www.zyvex.com/nanotech/feynman.html Forbes magazine special issues on micromachine, Apri 2 2001 http://www.forbes.com/asap/2001/0402/ US Sandia National Laboratories: MEMS research http://mems.sandia.gov/scripts/index.asp NEXUSs MEMS market analysis http://www.sgt-sensor.de/NEXUS.html Special Issues in MEMS: Proceedings of the IEEE, Vol.86, No.8, 1998 HKUST online library: IEEE Xplore
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Dr. Y.K. Lee
Example 1.1 Mathematical Model of a Motorcycle

Fig 1.18(a) shows a motorcycle with a rider. Develop a sequence of three math. models of the system for investigating vibration in the vertical direction. Consider the elasticity of the tires, elasticity and damping of the struts (in the vertical direction), masses of the wheels, and elasticity, damping, and mass of the rider.
Rider strut Tire Wheel
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Dr. Y.K. Lee
strut
Example 1.1 Solution We start with the simplest model and refine it gradually. When the equivalent values of the mass, stiffness, and damping of the system are used, we obtain a singledegree of freedom model (1 DOF) of the motorcycle with a rider as indicated in Fig. 1.18(b). In this model, the equivalent stiffness (keq) includes the stiffness of the tires, struts, and rider. The equivalent damping constant (ceq) includes the damping of the struts and the rider. The equivalent mass includes the mass of the wheels, vehicle body and the rider.
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Dr. Y.K. Lee
Example 1.1 Solution
keq = fun(tire,strut, rider) ceq = fun(strut, rider) meq = fun (wheel, vehicle body, rider)
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Dr. Y.K. Lee
Example 1.1 Solution This model can be refined by representing the masses of wheels, elasticity of tires, and elasticity and damping of the struts separately, as shown in Fig. 1.18(c). In this model, the mass of the vehicle body (mv) and the mass of the rider (mr) are shown as a single mass, mv + mr. When the elasticity (as spring constant kr) and damping (as damping constant cr) of the rider are considered, the refined model shown in Fig. 1.18(d) can be obtained.
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Dr. Y.K. Lee

Subscripts t : tire v: vehicle w: wheel r: rider s: strut eq: equivalent
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Note that the models shown in Figs. 1.18(b) to (d) are not unique. For example, by combining the spring constants of both tires, the masses of both wheels, and the spring and damping constants of both struts as single quantities, the model shown in Fig. 1.18(e) can be obtained instead of Fig. 1.18(c).
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Dr. Y.K. Lee
Example 1.5 Equivalent k of a Crane

The boom AB of crane is a uniform steel bar of length 10 m and x-section area of 2,500 mm2. A weight W is suspended while the crane is stationary. Steel cable CDEBF has x-sectional area of 100 mm2. Neglect effect of cable CDEB, find equivalent spring constant of system in the vertical direction.
B
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Dr. Y.K. Lee

A vertical displacement x of pt B will cause the spring k2 (boom) to deform by x2 = x cos 45 and the spring k1 (cable) to deform by an amount x1 = x cos (90 ). Length of cable FB, l1 is as shown.
2 l1 = 32 + 102 2(3)(10) cos135 = 151.426
l1 = 12.3055 m
x l1, k1,x1 l2=10m, k2, x2
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Dr. Y.K. Lee
The angle satisfies the relation:

2 l1 + 32 2(l1 )(3) cos = 102
cos = 0.8184,
= 35.0736
The total potential energy (U):

1 2 1 U = k1 ( x cos 45) + k2 [ x cos(90 )]2 2 2
(E.1)
A1E1 (100 10 6 )(207 109 ) k1 = = = 1.6822 106 N/m 12.0355 l1 A2 E2 ( 2500 10 6 )(207 109 ) 7 k2 = = = 5.1750 10 N/m 10 l2
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Dr. Y.K. Lee
Potential Energy of the equivalent spring is: 1 2 (E.2 ) U eq = keq x 2 By setting U = Ueq, hence:
keq = 26.4304 106 N/m
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Dr. Y.K. Lee
Harmonic Motion Periodic Motion: motion repeated after equal intervals of time Harmonic Motion: simplest type of periodic motion Displacement (x): x = A sin = A sin t Velocity: Acceleration:
dx = A cos t dt
d 2x dt
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(1.30 )
(1.31)
(1.32 )
= 2 A sin t = 2 x
Dr. Y.K. Lee
Harmonic Motion
Scotch yoke mechanism: The similarity between cyclic (harmonic) and sinusoidal motion.
http://www.engr.colostate.edu/~dga/video_demos/mechanisms/index.html 65
Dr. Y.K. Lee
Harmonic Motion
Complex number representation of harmonic motion: r (1.35) X = a + ib where i = (1) and a and b denote the real and imaginary x and y components of X, respectively. y (Imag)
x (Real)
Dr. Y.K. Lee
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Harmonic Motion Also, Eqn. (1.36) can be expressed as r X = A cos + iA sin (1.36) r (1.43) X = A(cos + i sin ) = Aei
Thus,
r X i = ai + ibi
1 b j
(1.47)
j = tan ; j = 1, 2 aj
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(1.48)
Dr. Y.K. Lee
Harmonic Motion Operations on Harmonic Functions: v Rotating Vector, X = Aeit (1.51)
Displacement = Re[ Aeit ] = A cos t

Velocity = Re[iAeit ] = A sin t = A cos(t + 90)
(1.54)
(1.55)
Acceleration = Re[ 2 Aeit ] = 2 A cos t = 2 A cos(t + 180) where Re denotes the real part
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(1.56)
Dr. Y.K. Lee
Harmonic Motion Displacement, velocity, and accelerations as rotating vectors

r & X
r && X
r X
x(t)
Vectorial addition of harmonic functions

r r r X 1 + X 2 = Re( X ) = A cos(t + )
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r X2
r X r X1
Dr. Y.K. Lee
Example 1.11 Addition of Harmonic Motions
Find the sum of the two harmonic motions x (t ) = 10 cos t and x (t ) = 15 cos(t + 2).
1 2
Solution:
Method 1: By using trigonometric relations: Since the circular frequency is the same for both x1(t) and x2(t), we express the sum as
x(t ) = A cos(t + ) = x (t ) + x (t )
1 2
(E.1)
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Dr. Y.K. Lee

A(cos t cos sin t sin ) = 10 cos t + 15 cos(t + 2) = 10 cos t + 15(cos t cos 2 sin t sin 2)
That is, That is,
(E.2)
cos t ( A cos ) sin t ( A sin ) = cos t (10 + 15 cos 2) sin t (15 sin 2)
(E.3)
By equating the corresponding coefficients of cost and sint on both sides, we obtain
A cos = 10 + 15 cos 2 A sin = 15 sin 2 A=
(10 + 15 cos 2) + (15 sin 2)

2
= 14.1477
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(E.4)
Dr. Y.K. Lee

and
15 sin 2 = tan 10 + 15 cos 2 = 74.5963
1
x2(t) 14.147
(E.5)
2 (rad)= 114.6
74.5963 x1(t)
Method 2: By using vectors: For an arbitrary value of t, the harmonic motions x1(t) and x2(t) can be denoted graphically as shown in Fig. 1.43. By adding them vectorially, the resultant vector x(t) can be found to be x(t ) = 14.1477 cos(t + 74.5963) ( E.6)
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Dr. Y.K. Lee

Method 3: By using complex number representation: the two harmonic motions can be denoted in terms of complex numbers:
x (t ) = Re[ A e
2 2
x (t ) = Re[ A e
1 1
i t
i ( t + 2 )
] Re[10e ] ] Re[15e ]
it i ( t + 2 )
(E.7)
The sum of x1(t) and x2(t) can be expressed as
x(t ) = Re[ Ae
i ( t + )
(E.8)
where A and can be determined using Eqs. (1.47) and (1.48) as A = 14.1477 and = 74.5963
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Dr. Y.K. Lee
Swinging of Pendumum
http://mw.concord.org/modeler1.3/mirror/mechanics/pendulum.html
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Dr. Y.K. Lee
Plucking a string of guitar
http://www.engr.colostate.edu/~dga/high_speed_video/index.ht ml#Mechanisms
http://www.oberlin.edu/physics/catalog/demonstrations/waves/pluckanimation.html http://politicalhumor.about.com/library/images/blbushguitar.htm 75
Dr. Y.K. Lee
Anatomy of a guitar
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Dr. Y.K. Lee
Active vibration control: Smart Tennis Racket
Reduce 50% of vibration
Head Sport AG (www.head.com, Austria) racket integrated with a microchip and piezo composites (smart piezoelectric fiber) to boost the performance of professor players. The vibration also powers the microchip (self-powered electronics)!
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Dr. Y.K. Lee
PRS (Personal Response System)

-PRS can help students to have interactive learning, not just listening the lecture - PRS is useful for the class with large number of students -The students score will be only used to add bonus in your MECH103 final grade.
http://celt.ust.hk/ideas
If you didnt get the PRS handset, please get it in the AV counter (Rm 1030, Lift 1) by this week.
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Dr. Y.K. Lee

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MECH300G 2/22/01 updated

MECH300G Special Topics in Mechanical Vibrations

Dr. Yi-Kuen Lee

MECH300G 2/22/01 updated

Micro accerolerometers, micro gyroscopes, micromechanial filters, micro/nano resonant biosensors

MECH300G 2/22/01 updated

From Encyclopedia Britannica:

MECH300G 2/22/01 updated

Why study vibration?

MECH300G 2/22/01 updated

Simple vibration systems

Dr. Y.K. Lee

MECH300G 2/22/01 updated

MECH300G 2/22/01 updated

MECH300G 2/22/01 updated

Brief History of Vibration

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Brief History of Vibration

MECH300G 2/22/01 updated

Brief History of Vibration Joseph Sauveur (1653 1716)

MECH300G 2/22/01 updated

Brief History of Vibration

MECH300G 2/22/01 updated

Brief History of Vibration

MECH300G 2/22/01 updated

Brief History of Vibration

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Brief History of Vibration

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Examples of single degree-of-freedom systems:

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Examples of two degree-of-freedom systems:

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Examples of three degree-of-freedom systems:

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Example of Infinite-number-of-degrees-of-freedom system:

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Classification of Vibration Examples of deterministic and random excitation:

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Vibration Analysis Procedure

Dr. Y.K. Lee

MECH300G 2/22/01 updated

Example of the modeling of a forging hammer

Dr. Y.K. Lee

MECH300G 2/22/01 updated