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UCLA Electrical Engineering Department
Henry Samueli School of Engineering and Applied Science
Terahertz composite right/left handed
metamaterial waveguides
Benjamin Williams, Amir Ali Tavallaee, Philip W. C. Hon,
Zhijun Liu, Tatsuo Itoh
UCLA Dept. of Electrical Engineering/California NanoSystems Institute
(CNSI)
QiSheng Chen
(Northrop Grumman Aerospace Systems)
Funding
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5 m
2
THz QC-lasers in metal-metal waveguides
Active region
Typically 50-200 repeated modules (2-10 m thick)
Resonant-LO phonon scattering depopulation for
intersubband population inversion


Metal-metal waveguides
GaAs/Al
0.15
Ga
0.85
As
Terahertz Quantum-Cascade active
~3 THz

0
~100 m
n
+
GaAs substrate
metal
Active region
5-10 m
x100
Metal-metal waveguide
sub-wavelength transverse size
Low loss, high modal confinement factor
Small size low power dissipation


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3
Beam pattern from metal-metal THz waveguide
5-10 m
2-D mode intensity ( ~ 100 m)
10 m
23 m
Sub-wavelength facet size leads to strong divergence in beam with
interference fringes
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Ta/Cu
Ti/Au
Top Surface (broadside) beam pattern
u (deg)
I
n
t
e
n
s
i
t
y

(
a
.
u
.
)

End-fire beam pattern
A.J.L . Adam et al. APL 2006
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THz QC-lasers: Variety of techniques for engineering beam pattern
4
3
rd
order DFB end fire antenna lasers
(Amanti et al. Nat. Phot. 3:586 (2009)) ETH Zurich
Horn antenna (Amanti et al. (Neuchtel)
Electron. Lett. 43 (2007))(also Sandia, U of Paris) 2
nd
-order DFB
surface emitting
laser (Kumar et al., Opt.
Exp., 15, 113 (2007))
MIT/Sandia, (also Harvard, U
Pisa)
2D photonic crystal
surface emitting lasers
(Y. Chassagneux et al., Nature
457:174 (2009)) U of Paris, (also
ETH Zurich)
Facet mounted lens Lee et al. Opt. Lett.
32:2840 (2007) MIT/Sandia

Can metamaterial/antenna concepts be applied?
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INTRODUCTION TO CRLH
METAMATERIALS
5
LH
RH
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Negative-index/ Left-handed materials
Metamaterials: artificial EM materials with novel effective
medium properties
6
Condition for negative index
propagation
c<0, <0
E,H,k related by left-hand rule:
i.e. left-handed (LH) medium
Antiparallel phase and group
velocity

, ~ , where
ikz
E H e k n c
n
i
i
e
c
c c c

=
=
' '' = +
' '' = +
Diagram from V. Shalaev (Purdue)
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Split ring resonator metamaterials
7
Shelby, R. A., Science (2001) 292, 77.
Wires provide dilute electric plasma to
give c < 0 for e < e
pe
Ring resonator provides magnetic
resonance for < 0 for e
rm
< e < e
pm

Unit cell << wavelength
Caloz, Materials Today 12:12 (2009)
e
c
,


Problem: resonant losses
n<0
Smith, D. R., et al., Phys. Rev. Lett. (2000) 84, 4184
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Composite Right/Left Handed Transmission-line
Metamaterials
Transmission-line picture
8
Diagram from V. Shalaev (Purdue)
Permittivity/permeability picture
max(
sh
,
se
)
min(
sh
,
se
)


pure RH
pure-LH
Purely right-handed
L
R
'Az
Az0
C
R
'Az
Purely left-handed
L
L
' /Az
C
L
'/Az
Az0
Composite right/left-handed
C
R
'Az L
L
'/Az
Az0
L
R
'Az C
L
'/Az
' '
' '
/ 1
/ 1
R L sh
L R se
C L
C L
=
=
e
e
CRLH

CRLH

CRLH

0
=
sh
=
se

A. Lai, C. Caloz, and T. Itoh, IEEE Microwave Magazine, Sept 04
radiation
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Microstrip CRLH transmission-line metamaterials
9
A. Lai, C. Caloz, and T. Itoh, IEEE Microwave Magazine, Sept 04
Composite Right/Left-Handed Transmission Line Metamaterials
1D Microstrip implementation
at ~5 GHz
A. Grbic and G. V. Eleftheriades, PRL, 92 (2004)
2D planar CRLH metamaterial
Implementation of microwave 2D perfect lens
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LH
RH
1D CRLH metamaterial transmission line
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CRLH metamaterials in microwave (Itoh group)
10
0
e
0 | =
e
0
( )
c
k
e |
|
= +
=
0
k |
Radiation
Guidance
0
e
0 | =
e
0
k |
RH
LH
Case 1
Case 2
Case 3
Engineered dispersion characteristics Dispersion diagram breakdown
0
e
0 | =
e
0
( )
c
k
e |
|
= +
=
0
k |
Radiation
Guidance
0
e
0 | =
e
0
k |
RH
LH
Case 1
Case 2
Case 3
Engineered dispersion characteristics Dispersion diagram breakdown
= 0 /k
0
= 0 /k
0

=+c
(=k
0
)
Radiation
Guidance
0 10 20 10 0
0
30 +
60 + 60
30
0 10 20 10 0
0
30 +
60 + 60
30
0 10 20 10 0
0
30 +
60 + 60
30
0 10 20 10 0
0
30 +
60 + 60
30
0 10 20 10 0
0
30 +
60 + 60
30
0 10 20 10 0
0
30 +
60 + 60
30
Beam steering in CRLH leaky-wave antennas
demonstrated in microwave (~5 GHz):
Varactor elements are used to tune characteristics of
CRLH line from left-handed to right-handed
Voltage tunable beam steering is demonstrated.
18 V
3.5 V 1.5 V
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Relationship of SRR to CRLH metamaterial
11
CRLH transmission-line can be considered to be arrays of strongly
coupled split-ring resonators


Figure from C. Caloz, Materials Today, March 2009
A. Lai, C. Caloz, and T. Itoh, IEEE Microwave Magazine, Sept 04
Composite Right/Left-Handed Transmission Line Metamaterials
1D Microstrip implementation
at ~5 GHz
SRR
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5 m
12
Building blocks for active metamaterial: THz
quantum-cascade laser + metal-metal waveguide
Metal-metal waveguide: similar to microstrip
transmission line
Metal-metal waveguides
GaAs/Al
0.15
Ga
0.85
As
Terahertz Quantum-Cascade Gain
n
+
GaAs substrate
metal
Active region
5 m
CRLH waveguide: add sub-wavelength
shunt inductors and series capacitors
ISB transitions couple with C
R
electric field
Ti/Au
Ta/Cu
hv=12 meV
~100 m
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Challenge for shunt inductors virtual ground bonding paths
14
C
R
L
L
C
g
Drawbacks of this design:
For active MTM, bonding paths are
required for DC bias these serve
as large virtual ground capacitors
Large ohmic loss in bonding paths
due to conduction currents
g
th,metal
= 23 cm
-1
(True ground plane)
g
th,metal
= 94 cm
-1
(Virtual ground caps)
Virtual ground cap
Active region
E
E
Required threshold gain:
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1D CRLH transmission line metamaterial variations
15
Odd-mode CRLH transmission line
Fundamental mode CRLH transmission line
TM
00
mode
TM
01
mode
5m
5m
~/2n
~/4n
Lossy!
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PASSIVE CRLH
WAVEGUIDES AND
METASURFACE
16
2C
L
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Passive array of CRLH waveguides
17
2C
L
Metal-insulator-metal geometry:
Cu/BCB/Au
Series capacitor C
L
: metal overlay
Shunt inductor L
L
: determined by width
of structure
BCB
/2=22m at shunt
resonance.
Unit cell
circuit model
Z. Liu et al. APL 100:071101 (2012)
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Reflection spectroscopy: p-polarization
18
RH branch
Variable angle FTIR reflection spectroscopy used to extract dispersion relation


For p-polarization (E-field parallel with ridges)
TM
00
(fundamental) mode is excited
Only RH branch is observed
0
max
Measured Absorption
TM
00
mode
|E|
0
sin
inc
k | u =
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Tuning of dispersion: TM
00
mode
19
1.9
2.4
3.1
( )
2 2 2
2
R R
se
L C
p
| e e =
2
1
se R L
L C e =
f
se
Dispersion is well fit by CRLH transmission-line circuit model
Varying patch dimension A varies the series capacitance
C
L
and tunes dispersion.

TM
00
mode
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F
r
e
q
u
e
n
c
y

(
T
H
z
)

Reflection spectroscopy: s-polarization
20
RH branch
LH branch
Measured Absorption
Variable angle FTIR reflection spectroscopy used to extract dispersion relation

For s-polarization (E-field transverse to ridges)
TM
01
mode is excited in waveguide
Both RH and LH branches are observed
TM
01
mode
0
max
|E|
0
sin
inc
k | u =
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Circuit model fits tuning with capacitance C
L
21
0.7
0.8
1.1
Dispersion is well fit by CRLH transmission-line circuit model
No anticrossing observed
Varying patch dimension A varies the series
capacitance C
L
and tunes the dispersion.

2
1
sh L R
L C e =
2
1
se R L
L C e =
Z. Liu et al. APL 100:071101 (2012)
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RADIATION MODEL FOR
THZ METAL-METAL
WAVEGUIDES
22
5-10 m
2-D mode intensity ( ~ 100 m)
10 m
23 m
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Radiation model: Field equivalence principle
23
E
out
,H
out

E
in
,H
in
J

E
out
,H
out

J
s
M
s
Transform mode pattern to tangential E,H fields along
surface.
Convert surface fields to equivalent current sources J
s
, M
s

Integrate to obtain far-field vector potentials F, A.
Field Equivalence principle:
Radiation from sources J inside a
closed surface can be represented
by equivalent current sources on
the surface

s
= M n E
Magnetic surface current

s
= J n H
Electric surface current
4
4
jkR
S
S
jkR
S
S
e
dS
R
e
dS
R

t
c
t

' =
' =
}}
}}
A J
F M
Equivalent surface currents are given by
tangential fields at surface
Actual Problem
Equivalent Problem
n
E
in
=0,H
in
=0

c,
c,
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Cavity model: Beam from fundamental TM
00
mode
24
2
s
= M n E
Cavity model end fire beam
0 +60 -60
0
+60
o (deg)
|

(
d
e
g
)

+30
+30 +30
For TM
00
mode: facets radiate as
two small aperture antennas
End-fire beam pattern from MM THz QCL
A.J.L . Adam et al. APL 2006
For microstrip patch cavity
transverse H is negligible at surface:
transverse E dominates, and is enhanced by ground plane:
2
s
= M n E
0
s
= ~ J n H
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Fundamental mode TM
00
sidewall vs facet radiation
25
w=15 m, h=10 m
TM
00
: |E|
2
mode profile
10 m
For TM
00
mode, facet radiation is ~10
3
times stronger than sidewall radiation
Opposite sidewall magnetic currents M
s
cancel
For n
eff
> 1, rapidly oscillating M
s
tend to cancel in far-field
0.79
3.01
eff
n
I =
=
2
s
= M n E
s
M
L
L
(Q=100 o=17 cm
-1
at n
g
=3)
(P. Hon et al. IEEE Trans. THz Sci&Tech 2:323 (2012))
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Cavity model: Beam from higher order TM
01
mode
26
Cavity antenna model - technique for microstrip patch antennas
Field Equivalence principle:
The fringing E-fields on the waveguide surface radiate
as a phased array of Magnetic dipole currents M
s
.
Top view

2
s
= M n E
E
x
Facet beam pattern - Odd-symmetry
0
+90 -90
0
+90
o (deg)
|

(
d
e
g
)

0
+90 -90
0
+90
o (deg)
|

(
d
e
g
)

Sidewall beam pattern - Even symmetry
I
n
t
e
n
s
i
t
y

TM
01 TM
01
End fire beam
(P. Hon et al. IEEE Trans. THz Sci&Tech 2:323 (2012))
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Lateral mode TM
01
sidewall vs facet radiation
27
Effective index n
eff
is
changed by varying
width of waveguide
(f=2.7 THz)
Length=0.25mm
(P. Hon et al. IEEE Trans. THz Sci&Tech 2:323 (2012))
n
eff
< 2.0
Sidewall dominates
0
+90 -90
0
+90
o (deg)
|

(
d
e
g
)

n
eff
> 2.5
Facet dominates
0
+90 -90
0
+90
o (deg)
|

(
d
e
g
)

0
+90
0
+90
o (deg)
|

(
d
e
g
)

n
eff
< 1.0 leaky-wave
Sidewall - directional
0
g
eff
c
n

|
e
= =
Leaky-wave Guided mode
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Radiation from CRLH waveguides: TM
00
and TM
01
modes
28
2
s
= M n E
TM
00
lateral mode
TM
01
lateral mode
TM
00
mode
Sidewall M
s
dipoles cancel
Gap M
s
dipoles dominate
Couple with E-field polarized
along waveguide

TM
01
mode
Gap M
s
dipoles cancel
Sidewall M
s
dipoles dominate
Couple with E-field polarized
transverse to waveguide

2
s
= M n E
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Surface impedance model p-polarization TM
00
29
2 2 2
1 2
1
2 2
1 1 2
,
1
( ) ,
s
z
z
z
p
w Y Z p
Z Z
p Y Z Y Z p
k
k
k
e
(
+
=
(
+ +

A
For p-polarization, incident radiation couples to
TM
00
mode through series gap capacitor C
L
.
Thus, C
L
is the input port
Good match with HFSS
Surface impedance
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Surface impedance model s-polarization TM
01
30
,
2 2
2
( )
/
,
1
z
s
s
h se
s
z
p
Z
Y k p
k
F Z
e

A
(
=
(
+

Surface impedance
For s-polarization, incident radiation couples to TM
01

mode through shunt capacitor C
R
(i.e. sidewall fields).
Thus, C
R
is the input port
CRLH behavior is observed for this mode
Thus there are two resonances

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Measured and calculated dispersion relations
31
S1: A=6.8 m
S2: A=7.6 m S3: A=8.6 m
Balanced
e
sh
=e
se
Unbalanced
e
sh
>e
se
Unbalanced
e
sh
>e
se
3 different size capacitor overlays: variable C
L
E
x
p
e
r
i
m
e
n
t

S
u
r
f
.

I
m
p
.

M
o
d
e
l

e
se

e
sh

e
se

e
sh

Hon et al. JAP 113:033105 (2013)
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Otto- (prism) coupling for bound mode reflection
spectroscopy
32
Polyethylene prism used to couple
evanescently to bound modes

Characteristic evanescent decay of
bound surface wave for both RH and LH
modes.

RH
LH
|H|
Hon et al. JAP 113:033105 (2013)
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Metasurface dispersion leaky and bound modes
33
s-polarization: CRLH behavior p-polarization: RH-only behavior
No anticrossing observed at light line
No coupling between grazing s-pol
light and TM
01
waveguide mode
Waveguide mode exhibits modest
radiative losses

Anticrossing observed at light line
Strong coupling between grazing p-
pol light and TM
00
waveguide mode
Waveguide mode exhibits large
radiative losses and strong coupling

Hon et al. JAP 113:033105 (2013)
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Surface plasmons and surface waves
34
TM Electric surface plasmons
TE Magnetic surface plasmons
Surface plasmons
Conventional TM (p-pol) Electric Surface plasmons occur at interfaces between materials
with c<0 and c>0.
Equivalent to surface impedance is inductive (X
s
>0)
Magnetic TE (s-pol) surface plasmons occur at interface between <0 and >0
Can be obtained with volumetric metamaterials to obtain <0
Or, can be obtained at metasurface with capacitive surface impedance (X
s
< 0).
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s-pol surface wave: Magnetic surface wave
35
s-polarization: CRLH behavior
No anticrossing observed at light line
No coupling between grazing s-pol
light and TM
01
waveguide mode
More suitable for LWA
Waveguide mode exhibits modest
radiative losses

Surface reactance
guided
mode
guided
mode
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Metasurface comparison: /4 slotted Spoof SP surface
36
No via required
~
0
/50 thickness
Supports
TM electric surface wave (RH-only)
TE magnetic spoof surface plasmon)
(LH and RH branches)

CRLH waveguide metasurface
TE (s-pol)
/4 spoof surface plasmon
Pendry, Martn-Moreno, Garcia-Vidal, Science 305:847 (2004)
Hibbins, Evans, Sambles, Science 308:670 (2005)
+ others
Barlow, et al. Proc. IEE 100, 329 (1953)
resonant slots
0
/4 deep
transforms metal to Z
surf
= inductive
Supports TM surface wave i.e.
Spoof surface plasmon
Z
surf
<
0
/4

TM (p-pol)
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Metasurface comparison: Sievenpiper surface
37
Sievenpiper mushroom metasurface
Lockyear, Hibbins, Sambles, PRL 102:073901 (2009)
D. Sievenpiper, et al. IEEE MTT 47: 2059 (1999)
Z
surf
Via to ground plane provides inductance
Sub-wavelength surface thickness
TM electric surface wave
when Z
surf
= inductive
TE magnetic surface wave (RH only)
when Z
surf
= capacitive
No via required
Sub-wavelength surface thickness
Supports
TM electric surface wave (RH-only)
TE magnetic spoof surface plasmon)
(LH and RH branches)



CRLH waveguide metasurface
TE (s-pol)
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THZ QC-LASER ACTIVE
LEAKY WAVE ANTENNAS
39
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Application: Leaky-wave antennas and beam steering
40
2 THz
1.8 THz
2.2 THz
|
Leaky-wave CRLH antenna:
Scanning of beam with frequency
through broadside (no stopband)
Dispersion diagram
Leaky-wave CRLH antenna:
For modes within the light line
the waveguide will radiate as
a leaky-wave antenna

Possibility of beam shaping
and improved outcoupling
from THz QC-lasers
LH
RH
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no holes
3x6m holes
Effective shunt inductance: TM
01
odd lateral mode
41
C
R
C
R
2L
L
Waveguide (field) picture
Unit cell is rectangular microstrip patch
Cutoff frequency f
sh
at |=0 determined
by width: w
0
/2n=c/2nf
sh
Transmission-line MTM
(circuit) picture
Unit cell is LC resonator
Cutoff frequency at |=0 determined
by shunt resonance e
sh
=(L
L
C
R
)
-1/2
.

2L
L
C
R
L
R
f
sh
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THz QC-laser with active metamaterial antenna
QC-laser
Leaky-wave antenna
408 m
Master-Oscillator + active leaky-wave antenna
QCL laser is held at fixed bias above threshold to generate
TM
01
mode that is fed into antenna

LWA has no series capacitance: RH propagation only

Leaky-wave antenna can be separately biased

Angle of emission depends on dispersion of antenna

8 m
15 m
THz
A. Tavallaee et al. APL 91:141115 (2011)
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Leaky-wave antenna without series capacitance
43
MM QCL pulsed at 77K, MTM antenna passive
THz
77K
Far-field intensity
Far-field intensity
|p (rad)
F
r
e
q

(
T
H
z
)

u (deg)
u (deg)
Laser spectrum
Metamaterial dispersion
Far-field intensity
Far-field intensity
|p (rad)
F
r
e
q

(
T
H
z
)

u (deg)
Far-field intensity
u (deg)
Metamaterial dispersion
Laser spectrum
Far-field intensity
Far-field intensity
|p (rad)
F
r
e
q

(
T
H
z
)

u (deg)
Far-field intensity
u (deg)
Metamaterial dispersion
Laser spectrum
THz QCL + leaky-wave antenna
QCL laser is held at fixed bias above
threshold to generate TM
01
mode that
is fed into antenna
No series capacitors: RH propagation
only

THz QC-laser Leaky-wave antenna
A. Tavallaee et al. APL 91:141115 (2011)
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Modeled beam pattern from leaky-wave antenna
44
Cavity model for LWA beam pattern
Approximate match for emission angle
Beamwidth due to large radiative loss coefficient in LWA.


THz
Cavity model beam pattern
Longitudinal cut beam pattern (u=90)
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LWA Coupling efficiency comparison
45
THz
Efficiency
When antenna is fed by frequency with
n
eff
< 1, slope efficiency is ~20 mW/A
Can be improved with better coupling
from master oscillator to antenna
(3m gap gives calculated 710dB insertion
loss)
5 mW/A (conventional MM edge emitting)
20 mW/A (antenna is passive)
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Leaky-wave antenna near broadside emission
46
Problem with RH-only LWA
Near surface normal emission
(u=0,n
eff
=0), i.e. broadside
Beam is broad
Group velocity is small
Radiated power is low

Loss coefficient:
THz
THz QCL cavity Leaky-wave antenna
8 m
15 m
g
Qv
e
o ~
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Loss coefficient for CRLH leaky-wave antenna
47
CRLH design is more suitable for a leaky-wave antenna
Gapless dispersion relation has non-zero group velocity at |=0

Radiative loss coeff: o50-100 cm
-1
g
Qv
e
o ~
CRLH
no cap
RH only
Frequency (THz)
R
a
d
i
a
t
i
o
n

L
o
s
s

o

(
c
m
-
1
)

(P. Hon et al. IEEE Trans. THz Sci&Tech 2:323 (2012))
RH only
no cap C
L
CRLH
with cap C
L
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Meander CRLH waveguide design with series capacitance
48
Active CRLH design
Near balanced design

Nonzero group velocity at |=0.

Electrically connected
metallization for QC-laser bias
(P. Hon et al. IEEE Trans. THz Sci&Tech 2:323 (2012))
LH
RH
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CRLH animation positive index (forward wave)
49
excitation
Group velocity
Phase velocity
-|E
max
|

0

+|E
max
|

16 m

0
=109 m
Propagation const.
F
r
e
q
u
e
n
c
y

2.75 THz E-field animation
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CRLH waveguide animation near zero index
50
2.66THz
Animation of E
x
field
excitation
Group velocity
Infinite Phase velocity -|E
max
|

0

+|E
max
|

16 m

0
=113 m
Propagation const.
F
r
e
q
u
e
n
c
y

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51
2.55THz
Animation of E
x
-field
excitation
-|E
max
|

0

+|E
max
|

Group velocity
Phase velocity
16 m

0
=117 m
CRLH waveguide animation
negative index (backward wave)
Propagation const.
F
r
e
q
u
e
n
c
y

www.ee.ucla.edu
Fabrication of active CRLH THz QC-laser waveguide
52
~200nm
14 m
8 m
Cu ground plane
Cr/Au top metal
Close-up of series gap capacitor
Cr/Au
Cr/Au
GaAs
Electron beam lithography is used to fabricate series capacitors in top metal
GaAs/AlGaAs QCL active material
A. Tavallaee et al. APL 102:021103 (2013))
www.ee.ucla.edu
CRLH active antenna demonstration backwards wave
53
Directional beam observed at u=-65
- Evidence of left-handed propagation
CRLH waveguide
with nanoscale
capacitors
Far-field intensity
LH
A. Tavallaee et al. APL 102:021103 (2013))
www.ee.ucla.edu
Power vs current: Amplification from antenna
54
CRLH antenna is active and provides amplification
Superlinear Power vs Current relation for -65 degree beam
A. Tavallaee et al. APL 102:021103 (2013))
www.ee.ucla.edu
Effect of symmetry on CRLH antenna polarization
55
Asymmetric mixed polarization
Symmetric polarized transverse
Simulation of beam
with asymmetric
holes and gaps.
Breaking symmetry
results in radiation
from capacitive gaps
no longer a dark
mode

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