Nguyn l v ng dng mt s loi Sensor

Nguyn Thu Phng

Trng i hc Khoa hc T nhin
Lun vn Thc s ngnh: Vt l v tuyn v in t; M s: 60 44 03
Ngi hng dn: PGS.TS. Phm Quc Triu
Nm bo v: 2012

Abstract: Tng quan v sensor, phn loi theo chc nng, mc ch s dng,nghin
cu v cc c trng trong ch tnh v ch hot ng ca sensor. Nghin cu
tng quan hin tng chuyn i tn hiu vt l ni chung, chuyn i tn hiu khng
in sang in ni ring, c bit l chuyn i tn hiu t sang in. Nghin cu ng
dng ca sensor nhit dng chuyn tip P-N, sensor dch chuyn nh dng cm
bin vi sai, sensor t trng dng hiu ng Hall, sensor t trng Fluxgate vo thit b
o. S dng h o t ng kho st s ph thuc nhit ca chuyn tip bn dn p-
n, kho st s tng quan tn hiu gia u d t ch v Tesla Meter. Cc kt qu thc
nghim thu c ph hp vi tnh ton l thuyt. H o c xy dng vn hnh
tin cy v n nh, m bo nhy, phn gii cn thit ng dng vo thc tin
trong mt s lnh vc nh quan trc mi trng, theo di a t ca tri t, d bo
thi tit,v.v

Keywords: Tn hiu vt l; Sensor; in t hc

Content
M U
t lu cc sensor c s dng nh nhng b phn cm nhn v pht hin,
nhng ch t vi ba chc nm tr li y chng mi th hin vai tr quan trng trong k thut
v cng nghip, c bit l trong lnh vc o lng, kim tra v iu khin t ng. Nh cc
tin b ca khoa hc v cng ngh trong lnh vc vt liu, thit b in t v tin hc, cc
sensor c gim thiu v kch thc, ci thin v tnh nng v ngy cng m rng phm
vi ng dng. Gi y khng c mt lnh vc no t dn s n qun s m khng s
dng sensor. Chng c mt trong cc h thng t ng phc tp, ngi my, kim tra cht
lng sn phm, tit kim nng lng, chng nhim mi trng, pht hin an ninhv c
bit gn y l trong cc h thng nh thng minh (smart home). Sensor cng c ng dng
rng ri trong lnh vc giao thng vn ti, sn xut hng tiu dng, bo qun thc phm, sn
xut t
2
Ngy nay, vi s pht trin mnh m trong cc lnh vc nghin cu khoa hc v ng dng
trong k thut o lng, iu khin, s lng v chng loi cc sensor tng nhanh v a dng
c v tnh nng v cng ngh ch to. Bi vy vic kho st, chuyn giao cng ngh, nghin
cu Nguyn l v ng dng mt s loi sensor c tc gi la chn lm lun vn ca
mnh vi ni dung c chia lm 4 chng nh sau:
Chng 1. Mt s c trng c bn ca sensor.
Chng 2. Chuyn i tn hiu vt l.
Chng 3. ng dng mt s loi sensor vo thit b o.
Chng 4. Kt qu thc nghim.
Cui cng l phn kt lun v phn tch u im, nhc im v hng pht trin tip
theo ca lun vn.
Mt s c trng c bn ca sensor
nh ngha v cc khi nim c bn [8,11]
Sensor l thit b dng cm nhn bin i cc i lng vt l v cc i lng
khng c tnh cht in cn o thnh cc i lng in c th o v x l c.
Phng trnh c m t di dng mt hm s (1.1)
y=f(x)
(1.1)
Quan h trong (1.1) thng rt phc tp do nhiu yu t nh hng ti quan h gia
u ra v u vo ca sensor
c trng c bn [8,11,12]
ng cong chun ca cm bin
ng cong chun cm bin l ng cong biu din s ph thuc ca i lng in
(Y) u ra ca cm bin vo gi tr ca i lng o (X) u vo. ng cong chun c
th biu din bng biu thc i s di dng: Y = F(X) hoc bng th nh hnh 1.4a.





Yi
Y
Y
3


a) b)
Hnh 1.1 ng cong chun cm bin
a) Dng ng cong chun b) ng cong chun ca cm bin tuyn tnh
Hm truyn
Hm Truyn l biu thc m t quan h gia p ng v kch thch ca cm bin c th
cho di dng bng gi tr, th hoc biu th ton hc
Hm phi tuyn, s dng cc hm gn ng hay phng php tuyn tnh ha tng on.
Y = F(X) (1.2)
nhy
i vi cm bin tuyn tnh, gia bin thin u ra dY v bin thin u vo dx c s
lin h tuyn tnh:
S =
dY
dX
=
dF(x)
X
(1.3)
i lng S c xc nh bi biu thc S =
Y
X
c gi l nhy ca cm bin.
tuyn tnh
Mt cm bin c gi l tuyn tnh trong mt di o xc nh nu trong di ch ,
nhy S khng ph thuc vo i lng o x.
ng thng c xy dng trn c s cc s liu thc nghim sao cho sai s l b
nht, biu din s tuyn tnh ca cm bin c gi l ng thng tt nht. Phng trnh
biu din ng thng tt nht c lp bng phng php bnh phng b nht. Gi s khi
chun cm bin ta tin hnh vi N im o, phng trnh c dng:

Y = aX + b
(1.4)
Sai s v chnh xc
Cc b cm bin cng nh cc dng c o lng khc, ngoi i lng cn o (cm
nhn) cn chu tc ng ca nhiu i lng vt l khc gy nn sai s gia gi tr o c v
gi tr thc ca i lng cn o. Gi dx l lch tuyt i gia gi tr o v gi tr thc x
Xi X
0
0
X
4
(sai s tuyt i), sai s tng i ca b cm bin c tnh bng:
=
x
x
.100 [%] 1.5
Nhiu
Nhiu xut hin li ra ca cm bin, bao gm nhiu ca cm bin sinh ra v nhiu do
s dao ng ca tn hiu kch thch. Nhiu lm gii hn kh nng hot ng ca cm bin v
c phn b qua ph tn s.
chng nhiu ngi ta thng dng k thut vi sai phi hp cm bin i, trong
tn hiu ra l hiu ca hai tn hiu ra ca tng b cm bin.
Qu trnh chuyn i tn hiu vt l
Mt s hiu ng chuyn i c - in
Hiu ng p in [9]
Hiu ng p in l kh nng sn sinh ra in th ca cc tinh th khng i xng tm
khi chu tc dng ca lc c hc, v ngc li. Hiu ng ny c tm ra vo nm 1880.

Hnh 2.1 (a) vt liu p in, (b) mt in th tng ng c th o c l kt qu ca
s nn hay ko, (c) mt in th t vo c th lm nn hay gin vt liu p in.
Hiu ng t gio
Hin tng t gio hay cn gi l hiu ng c-t l s thay i kch thc ca vt khi
n c t trong mt t trng, hay thuc tnh t thay i di nh hng ca s nn hay
gin. Hiu ng ny c tm ra bi James Joule vo nm 1842 khi ng kim tra mt mu kn.
5

Hnh 2.2 Hiu ng t gio: H=0 vng t tnh sp xp ngu nhin, 0 H = c sp
xp li lm tng kch thc di tc dng ca t trng.
Mt s hiu ng chuyn i nhit-in
Hiu ng nhit in [14]
Gradient nhit sinh ra mt hiu in th mi ni ca hai vt dn hoc bn dn khc
loi. Hin tng ny c quan st u tin trong kim loi vo nm 1821 bi Thomas Johann
Seebeck v c mang tn ng.

Hnh 2.3 Vt liu A v B gn cht hai u c gi nhit
1
T v
2
T .
Hnh 2.3 m t hai vt liu khc loi A v B, hiu in th V sinh ra khi hai u ni
c gi cc nhit khc nhau t l vi s chnh lch nhit
2 1
T T T A = , v tun theo
phng trnh:
( )
A B
V S S T = A (2.1)
Vi
A
S v
B
S l h s Seebeck ca vt liu A v vt liu B
y l hiu ng vt l c bn s dng trong dng c nhit, cp nhit hay dng c mu
cho o lng nhit .
6
Hiu ng nhit in tr [15]
Nhit in tr lin quan n thay i in tr ca vt liu theo nhit v c s
dng rng ri trong cc cm bin nhit. y l hiu ng c bn ca thit b cm bin nhit nh
nhit k in tr v nhit in tr. in tr R c tnh theo cng thc:

2
ef 1 2
(1 ... )
n
r n
R R T T T o o o = + A + A + + A
(2.2)
Trong
ef r
R
l in tr nhit tham chiu,
1
...
n
o o l cc h s nhit in tr
ca vt liu,
ef
( )
r
T T T A = l chnh lch nhit gia nhit T v nhit tham chiu
e r f
T
. Phng trnh cho thy in tr tng theo nhit . iu ny khng ng vi mi vt
liu, vt liu c h s nhit dng (PTC-positive temperature coefficient) th in tr tng theo
nhit , ngc li h s nhit m (NTC-negative temperature coefficient ) th in tr s gim
theo nhit .
Mt s hiu ng chuyn i quang in
Hiu ng quang in [9, 10]
Khi vt liu b chiu x bi photon in t c th b bt ra khi vt liu. in t b bt
ra gi l quang electron, ng nng
K
E ca quang electron bng nng lng ca photon ti
(h) tr i nng lng ngng
|
l nng lng ti thiu quang electron c th bt khi b
mt vt liu:

K
E hv | =
(2.3)
h hng s Planck, tn s ca photon.

Hnh 2.4 Hiu ng quang in.
7
Hiu ng Faraday xoay
Hiu ng Faraday xoay c tm ra bi M. Faraday vo nm 1845. N l mt hiu ng
t - quang trong mt phng phn cc ca mt sng in t pht ra dc mt vt liu s b
xoay khi t vo mt t trng song song vi hng pht sng.

Hnh 2.5 Mt phng phn cc b quay do t trng ngoi.
Hiu ng t-quang Kerr (MOKE: Magneto-Optic Kerr Effect)
Nm 1877 John Kerr nhn thy mt phng phn cc ca tia ti trn b mt t tnh
quay mt gc nh sau khi phn x ra khi b mt. Gc quay ph thuc vo t ha M. iu
ny l do in trng ca tia ti E tc ng mt lc F ln cc in t b mt ca vt liu lm
cho chng dao ng trong mt phng phn cc ca sng ti. C hiu ng t-quang Kerr v
hiu ng Faraday xoay xut hin do s t ha vt liu lm sn sinh s thay i tensor in
mi ca chnh vt liu .

8
Hnh 2.6 S quay ca mt phng phn cc trn b mt t tnh l kt qu ca hiu ng
t-quang Kerr.
Hiu ng in-quang Kerrand Pockels [9, 10]
Pht hin bi John Kerr vo nm 1875, l hiu ng in-quang trong vt liu thay
i h s khc x khi t trong in trng. Khi mt in trng tc ng ti cht lng hay
kh, cc phn t ca n (phn t c lng cc in) c th b nh hng mt phn theo
trng. iu ny gy ra hin tng d thng v l nguyn nhn ca hiu ng khc x kp i
vi nh sng truyn qua vt liu. Tuy nhin, ch nh sng i t mi trng gp ng sc
in trng mi c hiu ng khc x kp ny.

Hnh 2.7 Hiu ng Kerrand Pockels.
Gi tr khc x kp n A gy ra bi hiu ng Kerr c th tnh bi cng thc:
2
0 0 e
n n n KE A = =
Mt s hiu ng chuyn i t - in
Hiu ng Hall [6, 9]
Pht hin vo nm 1880 bi Edwin Hall, khi t mt t trng vung gc vi hng
ca dng in trong kim loi hay cht bn dn th xut hin mt in trng vung gc vi c
hng ca dng in v hng ca t trng. y l mt trong nhng hiu ng c s dng
rng ri trong cng ngh sensor.
9

Hnh 2.8 Hiu ng Hall.
Hiu ng Spin Hall
Hiu ng Spin Hall (SHE-Spin Hall Effect) lin quan n s pht sinh dng spin ngang
vi in trng t vo vt liu, dn n s gia tng cc spin khng cn bng trong h. Hiu
ng ny xut hin trong cc vt liu thun t l h qu ca tng tc spin-qu o. l l
thuyt c d on vo nm 1971 bi Yakonov v Perel. S pht sinh, li ko v pht hin
in t spin- phn cc trong cu trc nano l mt trong nhng thch thc ca thuyt spin in
t.


Hnh 2.9 Hiu ng spin Hall.
nh lut Faraday-Henry [1, 9]
nh lut Faraday-Henry l nh lut c bn ca in t v pht biu rng mt in
trng c to ra khi thay i mt t trng (hnh 2.11). Michael Faraday v Joseph Henry
Dong in
Dong Spin
10
c lp tm ra hin tng in t. Cc sensor v thit b m thanh thi k u (nh micro-
phones), ng h o dng in v in th tng t, v rle li g s dng hiu ng ny.

Hnh 2.10 Hiu ng Faraday-Henry
Hiu ng Dopper
Khi ngun tn hiu v bn thu chuyn ng tng i vi nhau, tn s tn hiu thu
khng ging bn pha pht. Khi chng di chuyn cng chiu th tn s nhn c ln hn tn
s tn hiu pht, v ngc li khi chng di chuyn ra xa th tn s tn hiu thu c gim
xung. y l hiu ng Doppler.
S dch tn s Doppler pha thu tun theo phng trnh sau:
( )
observed source
source
v
f f
v v
=
+
(2.4)
Vi v l tc sng trong mi trng,
source
v l tc ca ngun i vi mi
trng, v
source
f l tn s ca ngun sng. Nu ngun sng tin gn u thu
source
v dng
v ngc li khi n li xa ngun thu th
source
v m.
ng dng mt s loi sensor vo thit b o
Sensor nhit dng hiu ng chuyn tip PN [1,9,11]
c trng V- A ca lp chuyn tip p-n
Ta c biu thc dng in:
Nam chm di ch chuy n
Dng in cm ng
T

thng
11

)
`

|
.
|

\
|
= 1 exp
kT
eU
J J
S


ng c trng V-A c biu din trn hnh 3.1







Hnh 3.1 c trng V-A ca lp chuyn tip p-n
Ta c phng trnh ph thuc tuyn tnh vo nhit ca hiu in th:

B AT U =
(3.1)
Nguyn tc hot ng ca thit b
Vi s thay i nh ca nhit ta cng phi o mt gi tr tng i ln ca hiu
in th. iu ny i hi dng c o phi c thang o ln, d dn ti sai s ln lm php o
thiu chnh xc. Thit b ca chng ta c ch to theo s nguyn tc hnh 3.4. s
ny, dng in c gi tr I khng i. Li dng tnh cht c bit ca mch cu in tr, ti
mt gi tr bit trc ca nhit , ta iu chnh bin tr R sao cho mch cu l cn bng, khi
hiu in th U
MN
=0. Ch cn mt s thay i nh ca nhit trn bn dn, mch cu s
khng cn cn bng lm xut hin hiu in th gia M v N, ch th s s cho ta gi tr tng
ng. Nh vy, dng c o khng cn phi c thang o ln, sai s s nh.









I
U

K K
ch th
N
M
I
12

Hnh 3.2 S khi thit b o nhit dng chuyn i nhit- in
Trong lun vn s dng ICL7107 v IC ny c nhy cao v t tn nng lng.
Senor dch chuyn nh dng cm bin vi sai [7,8,11]
Cu to thit b pht hin dch chuyn nh dng cm bin vi sai
Di y l m hnh cu to ca mt thit b pht hin dch chuyn nh dng cm
bin vi sai. (hnh 3.6)








Sensor t trng dng hiu ng Hall [8,9,12]
Nguyn l
C th ni ngun gc ca hiu ng Hall l s tc ng ca lc in t Lorentz ln cc
ht tch in chuyn ng trong t trng. y l mt trong nhng hin tng ng lc hc
quan trng trong vt l hc.
tm hiu bn cht ca hiu ng Hall, chng ta hy xem xt cc qu trnh vt l
trong mu bn dn c dng in chy qua v t trong t trng vung gc (hnh 3.10)

Bin th vi sai

B x l tn hiu
B dao ng
in t
B khuch i
& Ch th
B tip nhn cc
tc ng dch chuyn
Cc tc ng
dch chuyn ngoi
Hnh 3.3 M hnh cu to mt my cm bin
13

Hnh 3.4 S mu.
Thit b o t trng dng cm bin Hall

Hnh 3.11 Thit b o t trng dng cm bin Hall
Sensor t trng Fluxgate [17, 18]
Nguyn l lm vic
Nguyn l lm vic da vo tnh cht li bo ha ngha l cc vt liu c t thm
cao c s dng khuch i tn hiu t trng c chn trong mt vng nh (vi cm
hoc t hn) ca anten, ging h thng anten vng li c m t trn. S khc nhau gia
hai h thng khng ch l kch thc ca vng m c tnh cht (bo ha) tr t c s dng
trong cc trng dao ng mnh. Trng ny l ty chn, theo cc hng i xng (+) v (-),
do trng t nhin hin ti. Cng trng a t tc ng ln u d, gy ra s mo hi,
c o trn cc vng th cp.
14









Hnh 3.5 Phng php li bo ha
Thit b pht hin t trng nh
Thit b pht hin t trng nh da trn nguyn l Fluxgate c chng ti xy dng
theo s khi nh trn hnh 3.14 Thit b pht hin t trng nh










Hnh 3.6 S khi ca thit b pht hin t trng nh
Kt qu thc nghim
Kho st sensor nhit dng hiu ng chuyn tip PN
S thay i c trng V-A ca chuyn tip PN theo nhit
- c trng Vn-Ampe ca chuyn tip bn dn p-n ph thuc nhit
S dng thit b o tm su trong bn dn DL8000 v ng c trng Vn-Ampe
ca chuyn tip bn dn p-n. Kt qu o c biu din trn th hnh 4.1.
Khi pht
xung
Chia tn
Khi to
sng sine
Khuch i
cng sut
Khuch i X l
Ch th
SENSO
R
(u d)
ADC PC
15


Hnh 4.1. c trng V-A ca chuyn tip bn dn p-n ti mt s gi tr nhit khc nhau
Kho st qu trnh ngui dng chuyn tip PN
Kt qu o

Hnh 4.2 Qu trnh ngui dng chuyn tip PN
Nhn xt:
T th thc nghim ta c th rt ra kt lun rng: Qu trnh ngui dng chuyn tip
PN tun theo ng quy lut ngui ca Newton
DT = r*(T-Tf)
U U
I
U
T1>T2
16
Kho st sensor t trng dng hiu ng Hall
Thit b o t ch to ti Vit Nam
- S nguyn l:
- Kho st hiu ng:
Chng ti tin hnh o t tng B trn b mt cc mu nam chm vnh cu t mu
1 n mu 5. Cc kt qu thc nghim thu c nh sau:

Mu1


Mu 2


Mu 3



Mu 4

17

Mu 5



Hnh 4.3 th phn b t trng trn b mt cc mu
Nhn xt:
Qua kho st c th thy phn b t trng trn b mt cc mu nam chm thay i
kh ln theo ta .
o t trng b mt dng GaussMeter (USA)
Thit b o t trng Tesla Meter









nh 4.1 - Tesla Meter vi u o Hall
- Kt qu thc nghim
Mu 1 Mu 2
18

Mu 3

Mu 4

Mu 5



Hnh 4.4 th phn b t trng trn b mt nam chm theo my chun USA
Nhn xt:
Qua kho st c th thy phn b t trng trn b mt cc mu nam chm thay i
kh ln theo ta .
- nh gi tng quan gia hai thit b o t trng
19

Hnh 4.5 th nh gi tng quan gia hai thit b o t trng
Nhn xt:
ng thng trn th biu din s tng quan tuyn tnh gia hai s liu o c
bng thc nghim
th tng quan ny nh hng cho vic chun thit b t lp ghp. Khi cc gi tr
o trng khp, dc ca ng thng tng quan = 45.
4.3 Kho st t trng dng thit b Fluxgate Sensor
- Thit b o t trng nh dng nguyn l Fluxgate

nh 4.2 My o t trng nh dng nguyn l Fluxgate sensor
- Kt qu thc nghim:
+ Khong cch 30cm
20
0
200
400
600
800
1000
1200
1400
1600
0 200 400 600 800 1000 1200
S2
S
3

Hnh 4.6 Tng quan tn hiu o gia thit b o t trng dng nguyn l Fluxgate vi thit
b o Tesla Meter (30cm)
+ Khong cch 32cm
0
200
400
600
800
1000
1200
1400
0 200 400 600 800 1000 1200
S2
S
3

Hnh 4.7 Tng quan tn hiu o gia thit b o t trng dng nguyn l Fluxgate vi thit
b o Tesla Meter (32cm)
Nhn xt
ng thng trn th biu din s tng quan tuyn tnh gia hai s liu o c
bng thc nghim
Tuy nhin u d t trng dng nguyn l Fluxgate rt nhy vi cc tn hiu nh, b
nh hng nhiu bi cc tc ng t trng bn ngoi h o v vy m sai s c phn ln hn
so vi php o trc.
21
Ta c th kt lun rng:
+ My o t trng dng nguyn l Fluxgate rt nhy vi cc tn hiu nh.
+ My o t trng dng hiu ng Hall km nhy hn khng pht hin c cc tn
hiu nh.
4.4 Kho st sensor o dch chuyn nh
4.4.1 Kho st s ngui i ca thanh nhm bng sensor dch chuyn ngang
- Th nghim
- S liu o trn c biu th bng cc th sau
Ln 1

0
20
40
60
80
100
120
140
160
180
0 50 100 150
thoi gian

i

Hnh 4.7 Qu trnh ngui ca thanh nhm o bng sensor dch chuyn nh (Ln 1)
Ln 2
0
20
40
60
80
100
120
140
160
180
200
0 50 100 150 200 250
thoi gian

i

Hnh 4.8 Qu trnh ngui ca thanh nhm o bng sensor dch chuyn nh (Ln 2)
22
Kt lun:
- Sensor o dch chuyn ngang rt nhy vi cc tn hiu nh iu ny c th gip ch
cho vic kim sot s gin n v nhit ca cc cy cu, ng st hoc trong cc vt
liu xy dng
4.4.2 Kho st dch chuyn ca vt nng cc v tr khc nhau bng sensor dch chuyn
dc
- Th nghim
t mt vt nng khi lng M ln sensor o dch chuyn dc, dng thc
chia u khong cch trn thanh dch chuyn. Dch chuyn vt nng M ln lt t
trong ra ngoi, sensor dch chuyn dc s pht hin c s dch chuyn nh khi thay
i khong cch vt nng bng s thay i chiu cao ca sensor.
Ta c th ghi c cc gi tr thay i ca sensor thng qua my o dch
chuyn nh.
- Cc s liu trn c biu din bng cc th tng ng sau:
Ln 1
0
100
200
300
400
500
600
700
800
900
0 2 4 6 8 10 12 14 16

Hnh 4.9 S ph thuc ca tn hiu o vo khong cch (Ln 1)
Ln 2
23
0
100
200
300
400
500
600
700
800
900
1000
0 5 10 15 20

Hnh 4.10 S ph thuc ca tn hiu o vo khong cch (Ln 2)
Nhn xt:
- Nhn vo cc th trn ta c th thy s thay i chiu cao ca sensor tng tuyn tnh
theo khong cch. Vi h s tng quan rt cao.
- T kt qu ny ta c th thy rng sensor dch chuyn nh rt nhy vi s thay i
khong cch nh, iu ny c th ng dng vo vic o s dch chuyn ca cc cy
cu b nn gin theo phng dc.
4.5 Kho st tn hiu ca sensor quang
- Th nghim
+ Mu 1: Sensor quang c lm t PbS vi vng nhy ph l = 0,3 4 m
+ Mu 2: Sensor quang c lm t Ge pha Cu vi vng nhy ph l = 2 20 m
- Kt qu s liu o






24
Hnh 4.11 Tn hiu thu c ca sensor quang 5s chiu sng v 5s che ti(Mu 1)

Hnh 4.12 Tn hiu thu c ca sensor quang 10s chiu sng v 10s che ti(Mu1)

Hnh 4.13 Tn hiu thu c ca sensor quang 5s chiu sng v 5s che ti (Mu2)

Hnh 4.14 Tn hiu thu c ca sensor quang 10s chiu sng v 10s che ti(Mu2)
- Nhn xt
Khi thay i cc ngun sng khc nhau chiu vo sensor quang, my tnh ghi nhn c s
thay i v cng ngun sng v thi gian tc ng ca ngun sng.
in tr ca cc mu sensor thay i khi thay i cng chiu sang vo sensor quang

25
KT LUN
Sau qu trnh lm lun vn, di s hng dn, ch bo tn tnh ca cc thy c gio,
em tp trung nghin cu v thc hin ni dung khoa hc ra cho lun vn v thu c
mt s kt qu chnh nh sau:
1. Nghin cu tng quan v sensor, phn loi theo chc nng, mc ch s
dng,nghin cu v cc c trng trong ch tnh v ch hot ng ca sensor.
2. Nghin cu tng quan hin tng chuyn i tn hiu vt l ni chung, chuyn i tn
hiu khng in sang in ni ring, c bit l chuyn i tn hiu t sang in.
3. Nghin cu ng dng ca sensor nhit dng chuyn tip PN, sensor dch chuyn
nh dng cm bin vi sai, sensor t trng dng hiu ng Hall, sensor t trng
Fluxgate vo thit b o.
4. S dng h o t ng kho st s ph thuc nhit ca chuyn tip bn dn pn,
kho st s tng quan tn hiu gia u d t ch v Tesla Meter. Kho st t trng
dng sensor Fluxgate, sensor o dch chuyn nh, sensor quang.Cc kt qu thc
nghim thu c ph hp vi tnh ton l thuyt. H o c xy dng vn hnh
tin cy v n nh, m bo nhy, phn gii cn thit ng dng vo thc tin
trong mt s lnh vc nh quan trc mi trng, theo di a t ca tri t, d bo
thi tit,v.v
Vi nhng kt qu ban u ny, h o c kh nng kt ni mng hnh thnh mng li
cc sensor tri rng trong phm vi thi gian v khng gian ln, cp nht lin tc cc thng s
v my ch ti trung tm x l t ng d liu o

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26
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