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Nor Hayati Saad, PhD Thesis.

MODELLING AND PERFORMANCE EVALUATION OF


COUPLED MICRO RESONATOR ARRAY FOR ARTIFICIAL NOSE, 2010, Online The
University of Birmingham, United Kingdom Library.

ABSTRACT
This research presents a new sensor structure, the coupled micro resonator array (CMRA) as an
approach to reduce the complexity of large artificial nose sensing system. The aim is to exploit
multiple resonant sensors with a simplified readout.
The CMRA working principle is based on mass loading frequency response effect; the frequency
response of the coupled resonators is a signature for the multiple sensors.
The key research outputs are balanced effective mass of the coupled resonators for measurable
response and broke the structure symmetry for unique frequency response pattern and stable
structure eigenvectors to enhance the system odour discrimination.
To develop the CMRA, the structure is modelled and analysed using finite element and lumped
mass analysis. Using silicon-on-insulator material, the CMRA is fabricated in order to evaluate the
performance. The effect of mass loading is tested by platinum mass deposition using focused ion
beam technology (FIB). The inverse eigenvalue analysis was used to estimate the mass change
pattern of the CMRA structure. The research also investigates effect of the manufacturing
variations on the CMRA structure performance.
With the finger print of the coupled frequency response, the output signal of N multiple resonant
sensors is monitored by a single processor; hence, reducing the complexity of readout and signal
processing system.

NOTE
Abstract:
In general, Abstract of dissertation is similar as the Executive Summary of Research Proposal;
except that the abstract reports the completed dissertation. While the Executive Summary of
Research Proposal summarizes the overall target, plans and expected research output of the
projects.
Executive Summary of Research Proposal should contain:
Elements in Executive Summary:
1) Background of project
2) Problems statement and Objectives
3) Literature Review
4) Methodology
5) Expected outcomes from the proposed project

Comparison of Abstract and Executive Summary of Research Proposal are highlighted below:

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Abstract (Dissertation)

Executive Summary (Research Proposal)

Background of completed project in


supporting the problem statement

Background of project (planned to conduct)

Problems statement and Objectives

Problems statement and Objectives

(emphasize more on the problem statement


with the solutions and of course main
objective of the research)

(emphasize the problem statement and


main objective of the research)

*Review your completed projects. The


emphasize should be given on filling the
gap or bridging; your research solutions in
supporting the previous research or the
problem statement

Literature Review

Methodology

Methodology

(Highlight approaches or methods those (expected approaches in solving or finding


used in solving or finding solutions for the solutions for the problem)
problem)
Overall outcomes of the completed projects.
You may add on the significance of the
research output

Expected outcomes from the proposed


project

Example of Executive Summary of Research Proposal [NHS, ERGS Grant 2011]:


The effect of process variations on the MEMS fabricated devices is inevitable. Many research
studies were focused on reducing the effect of the process variation in order to improve the MEMS
performance.
This research mainly aims to explore a new micro machining process algorithm in order to produce
3D- precision MEMS structure.
The research will involve 2 stages of investigation; (1) Investigation of the effect of parameters of
lapping processes in order to mitigate the effect of thickness variation at the wafer production level
(Z-direction); (2) Determination of the effect of different process parameter of bulk micromachining
(lithography, development and reactive ion ething process and wet etching process) in reducing the
geometrical variation of the MEMS product (X-Y-Z direction).
The statistical data analysis will be generated from the output of both investigation above, in order
to establish significant impact of the MEMS manufacturing process variation based on the
established controlled parameter.
In addition, the research will also produce and evaluate the most significant parameters of micro
machining processes (process algorithm formulation) in production of precision MEMS structure
using Monte Carlo Simulation or Genetic Algorithm approach.
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Example of Executive Summary of Research Proposal [NHS, FRGS Grant 2011]:


Multiple or many sensors are required for a system such as an electronic nose to flexibiliy smell
different type of odours. Increase in number of sensors will complicate the sensing system, signal
processing system, readout and Pattern Recognition Engine System (PRC).
The research mainly aims to investigate a new staggered structure of coupled micro resonant
sensors to present a large sensing system (many sensors) with a simplified PRC. An integrated
drive -readout of electrostatic- capacitive approach will be used as an alternative to establish the
structure model.
The structure model of the staggered coupled structure will be established using computer
simulation model and numerical analysis (model 1) in order to ensure each of the coupled sensors
structure produces a unique frequency response pattern for an individual sensor fingerprint.
A simple of an Inverse Eigenvalue analysis approach (IEA) which is based on the frequency
response of the designed structure model may be used to characterize the response output of the
structure; providing that the structure model is insensitive to the effect of process variation.
An optimization model (model 2) using genetic algorithm approach will be developed to
incorporate the effect of process variation. The uniqueness of frequency-response pattern of the
sensor structure will be further compared and validated (between model 1 and 2). In order to
confirm the level of process variation and the feasibility of the new developed sensor structure, The
mocked structure will be fabricated using an industrial based processes and the geometrical
dimensions of the structure will be physically measured using Scanning Electron Microscope.
With a successful research, it is expected that the new resonant sensor structure will be produced
with a single drive and readout system and simplified pattern recognition system to represent a large
sensing system. Therefore, overall cost of the sensor is expected to reduce.

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