Professional Documents
Culture Documents
Acoustic
Microscopy
Training
This presentation and images are copyrighted by
Sonix, Inc. They may not be copied, reproduced,
modified, published, uploaded, posted, transmitted,
or distributed in any way, without prior written
permission from Sonix.
Ultrasound Inspection,
Using an Acoustic Microscope
What does this
thing do?
Ultrasound
Non-Destructive Testing
Example Images
Ultrasound
MEDICAL
SONAR
What
Whatare
areUltrasonic
UltrasonicWaves?
Waves?
Ultrasonic
Ultrasonicwaves
wavesrefer
referto
tosound
soundwaves
wavesabove
above20
20kHz
kHz
(not
(notaudible
audibleto
tothe
thehuman
humanear)
ear)
4
Non-Destructive Testing
NDT utilizes various non-invasive
measurement techniques, such as
ultrasonics and radiography to
determine the integrity of a
component, structure, or material
without destroying the usefulness
of the item.
Common Applications
Plastic
Plasticencapsulated
encapsulatedIC
ICpackages
packages
Flip
FlipChips
Chips
Bonded
BondedWafers
Wafers
Printed
PrintedCircuit
CircuitBoards
Boards
Capacitors
Capacitors
Ceramics
Ceramics
Metallic
Metallic
Power
PowerDevices/Hybrids
Devices/Hybrids
Medical
MedicalDevices
Devices
Material
MaterialCharacterization
Characterization
Examples
Lid seal voids
Delamination
Examples
Die Top
Delamination
Ultrasound Inspection
Theory
System Components
Transducers
10
Ultrasonic Waves
Characteristics
Characteristicsof
ofUltrasonic
UltrasonicWaves
Waves
Freely
Freelypropagate
propagatethrough
throughliquids
liquidsand
andsolids
solids
Reflect
Reflectatatboundaries
boundariesofofinternal
internalflaws
flawsand
and
change
changeofofmaterial
material
Capable
Capableofofbeing
beingfocused,
focused,straight
straight
transmission
transmission
Suitable
Suitablefor
forReal-Time
Real-Timeprocessing
processing
Harmless
Harmlessto
tothe
thehuman
humanbody
body
Non-destructive
Non-destructiveto
tomaterial
material
11
Ultrasonic Inspection
Ultrasound
Ultrasound
Inspection
InspectionModes
Modes
AAtransducer
transducerproduces
producesaahigh
high
frequency
sound
wave
which
frequency sound wave which
interacts
interactswith
withthe
thesample.
sample.
Pulse
PulseEcho
Echo
Through
ThroughTransmission
Transmission
High
Highfrequency
frequencysound
soundwaves
waves
can
cannot
notpropagate
propagatethrough
throughair.
air.
CouplantCouplant-AAmaterial
materialused
usedto
to
carry
the
high
frequency
sound
carry the high frequency sound
waves.
waves.
Transducer
H2O
Coupling
Water
Waterisisthe
themost
mostcommon
common
couplant
for
immersion
couplant for immersion
testing.
testing.
Receive
12
Scanner
The scanner consists of a three axis system, X, Y, and Z. The
motor controller directs the movement of these axes.
Ax
St
ep is
A
x
i
s
Y-
F
o
c
u
s
X-Axis
13
Transducers
Low Frequency
Long Focus
High Frequency
Short Focus
1.1. Higher
Higherresolution
resolution
2.2. Shorter
Shorterfocal
focallengths
lengths
1.1. Lower
Lowerresolution
resolution
2.2. Longer
Longerfocal
focallengths
lengths
3.3. Less
Lesspenetration
penetration
(Thinner
(Thinnerpackages)
packages)
3.3. Greater
Greaterpenetration
penetration
(Thicker
(Thickerpackages)
packages)
General
Generalrules:
rules:
Ultra
UltraHigh
HighFrequency
Frequency(200+
(200+MHz)
MHz)for
forflip
flipchips
chipsand
andwafers.
wafers.
High
Frequency
(50-75
MHz)
for
thin
plastic
packages.
High Frequency (50-75 MHz) for thin plastic packages.(110MHz-UHF)
(110MHz-UHF)for
for
flip
chips.
flip chips.
Low
LowFrequency
Frequency(15
(15MHz)
MHz)for
forthicker
thickerplastic
plasticpackages.
packages.
14
15
16
Transducer
T/X Receiver
Power Pak
BGA Top
Capacitors
TSOP
Bonded Wafer
Bonded Wafer
ABCs Of Acoustics
Acoustic Reflections
Acoustic Waveforms
Image Display
17
Acoustic Properties
Material
Density
LongitudinalWave
Acoustic Impedance
(g/cm )
Velocity (m/s)
(kg/m s) (x10 )
1.00
1483
1.48
0.79
1168
0.92
0.00
2.33
19.3
8.90
2.70
1.20
1.72
2.70
3.80
344
8600
3240
4700
6260
2600
3930
5570
10410
0.00
20.04
62.53
41.83
16.90
3.12
6.76
15.04
39.56
Water (20 C)
0
Alcohol (20 C)
0
Air (20 C)
Silicon
Gold
Copper
Aluminum
Epoxy Resin
Resin (for IC pkg)
Glass (Quartz)
Alumina (AL2O3)
18
Sound Reflection
19
Sound Reflection
Whenever a sudden change in
acoustic impedance is encountered,
like at a material boundary, a portion
of sound is reflected and the
remainder propagates through the
boundary.
20
Z=
Z= C
C
21
(Z
(Z
+
Reflected Energy
Plastic Z2
Transmitted Energy
Z1 = C where:
Z2 = C where:
=1.00 gram/cm3
=2.00 gram/cm3
C= 1.5 x 106
Z1 = 1.5 x 106
C= 2.00 x 106
Z2 = 4.00 x 106
)
Z
2 (1 . 5 )
( 4 .0 + 1 .5 )
( 3 .0 )
( 5 .5 )
= . 55
45% of the
sound entering
the boundary is
reflected.
(Z
(Z
2
2
Z
Z
1
1
)
)
( 4 .0 1 .5 )
( 4 .0 + 1 .5 )
( 2 .5 )
( 5 .5 )
= . 45
22
Amplitude Information
Polarity Information
Time Information
Copyright Sonix, Inc
ABCs of Acoustics
A-Scan- The raw ultrasonic data. It is the received RF signal
from a single point (x,y).
A-SCAN
Initial Pulse
Transducer
Front surface
Sample
Interface of
interest
Back surface
24
Ultrasonic Waveforms
The Black signal is commonly
referred to as the initial pulse or the
main bang. This signal occurs at
Zero microseconds.
A-SCAN
100%
Phase
Amplitude %FSH 0%
Phase
-100%
Time / Depth
C-SCAN
IP
Front surface
Back surface
Area of interest
The red box (data gate) indicates
the depth of information.
27
B-Scan
Front surface
Signal from
indication
Back surface
Front surface
28
Back surface
Signal from
indication
Copyright Sonix, Inc
Inspection Modes
Pulse Echo
Through Transmission
29
Inspection Modes
Pulse-Echo
Through Transmission
Transmit
Transmit
&
Receive
Receive
Pulse-Echo
Pulse-Echo- -One
OneTransducer
Transducer
Through
ThroughTransmission
Transmission- -Two
TwoTransducers
Transducers
Ultrasound
reflected
from
the
sample
is
used.
Ultrasound reflected from the sample is used.
Ultrasound
transmitted
through
Ultrasound transmitted throughthe
the
Can
determine
which
interface
is
delaminated.
Can determine which interface is delaminated.
sample
is
used.
sample is used.
Requires
Requiresscanning
scanningfrom
fromboth
bothsides
sidestotoinspect
inspect
One
OneScan
Scanreveals
revealsdelamination
delaminationatatall
all
all
interfaces.
all interfaces.
interfaces.
interfaces.
Provides
Providesimages
imageswith
withhigh
highdegree
degreeofofspatial
spatial
No
Noway
waytotodetermine
determinewhich
whichinterface
interfaceisis
detail.
detail.
delaminated.
delaminated.
Peak
Amplitude,
Time
of
Flight
(TOF)
and
Peak Amplitude, Time of Flight (TOF) and
Less
Lessspatial
spatialresolution
resolutionthan
thanpulse-echo.
pulse-echo.
Phase
Inversion
measurement
Phase Inversion measurement
Commonly
used
to
verify
pulse-echo
Commonly
used to verify pulse-echo
Copyright Sonix,
Inc
results.
30
results.
Inspection Modes
Pulse-Echo
Front Surface
Back surface
2
1
Transmit
&
Receive
Front Surface
Air Gap
2
31
Air Gap
Inspection Modes
Through Transmission
1
Transmit
Receive
32
Focusing Sound
33
Too Close
Too Far
Focused
Focused
Too Close
2
2
Too Far
3
Focusing an ultrasonic transducer is similar to focusing an
optical microscope.
34
28%
Water path
Correct focus
1. Note the
time in
microseconds
of the signal
at the different
focus
locations.
(Red arrow)
85%
2. Also note
the amplitude
of the signal.
(white box)
De-focused-- too far
33%
35
When the
signal is not
in focus the
amplitude is
lower
compared to
that of correct
focus.
Focusing Sound
De-Focused - Too Close
36
Focused on Die
Practical Application
Digital Oscilloscope
Front Surface Follower
Data Gates
37
Digital Oscilloscope
Initial pulse
1st Echo
2nd Echo
3rd Echo
Multiple Echoes
Copyright Sonix, Inc
Gates
Gates
Gatesare
areused
usedto
tocollect
collectinformation
informationat
at
desired
desiredinterfaces
interfaceswithin
withinthe
thesample.
sample.
The
Thegate
gateisisplaced
placedover
overthe
thesignal
signalor
or
signals
of
interest.
signals of interest.
Gate Threshold
The
Theabsolute
absolutevalue
valueof
ofthe
thehighest
highest
amplitude
amplitudesignal
signalwhich
whichbreaks
breaksthe
thegate
gate
threshold
within
the
gated
region
is
threshold within the gated region is
recorded.
recorded. (Figure
(Figure1)
1)
If
Ifno
nosignal
signalbreaks
breaksthe
thegate
gatethreshold
threshold
no
nodata
dataisisrecorded.
recorded. (Figure
(Figure2)
2)
Signal
Signalamplitude
amplitudecan
canbe
beincreased
increasedor
or
decreased
by
adjusting
gain.
decreased by adjusting gain.
39
No data recorded
Practical Application
Image Data
Peak Amplitude
Time of Flight (TOF)
Phase Inversion
40
Peak Amplitude
41
Peak Amplitude
Peak Amplitude
100
78
75
X1
50
25
Amplitude
78% Sonix, Inc
Copyright
Time Of Flight
43
Time Of Flight
1
X2
X1
Time of Flight
X2
X1
X2
X1
Phase Inversion
46
Phase Inversion
Normal
Phase Inverted
47
Phase Gate
X
Sonix
Sonixuses
usesaa
proprietary
proprietaryalgorithm
algorithm
to
todetect
detectphase
phase
inversion.
inversion. This
This
method
is
method is
independent
independentof
ofsignal
signal
amplitude
as
long
amplitude as longas
as
the
signal
is
not
the signal is not
saturated
saturated(100%
(100%
screen
height).
screen height).
RED
Yellow
48
Through Transmission
49