Professional Documents
Culture Documents
Vertical-structured GaN-based light-emitting diodes (V-LEDs) were successfully fabricated using auto-split laser lift-off (LLO)
technique. Compared to regular sapphire-substrate LED, the forward voltage of the V-LED at 20 mA is about 5% lower, while the
light output power is about 43% higher. For V-LED, the saturation behavior of the light output power (Lop) is not observed when
the injection current is increased to 480 mA, while the Lop of regular LED starts to decrease at around 110 mA. These improved
results can be attributed to the total effect of less current crowding, surface roughening on n-GaN layer, highly reflective Ag mirror
and good thermal conductivity of the electroplated Ni. Finally, mechanisms of the auto-split LLO technique are discussed based on
one-dimensional heat equation. It is shown that the auto-split LLO process is determined by the vapor pressure of N2 gas, which is
strongly dependent on the density of the laser energy.
2012 The Electrochemical Society. [DOI: 10.1149/2.011202ssl] All rights reserved.
Manuscript submitted April 11, 2012; revised manuscript received May 21, 2012. Published July 20, 2012.
metal layers were deposited on the p-GaN top layer and annealed at
500 C for 5 min in an O2 ambient.10 The metal layers were used as
not only the high reflective mirror, but also the ohmic contact with
p-GaN. Cr/Au layer was then deposited as adhesive layer. After that,
thick photoresist was used to define the size of the area of the electroplated Ni (300 300 m2 ). The thickness of the nickel layer is
about 45 m. Then, the devices were bonded onto a silicon permanent
substrate by means of Sn fusion bonding technique at temperature of
250 C and pressure of 0.5 MPa in vacuum for 10 min.11 Subsequently,
the auto-split LLO process was conducted at a laser energy density
of 650 mJ/cm2 using high power KrF(248 nm) excimer laser with a
pulse width of 25 ns. The devices were then heated to about 40 C for
2 min to remove the sapphire substrate, and followed by HCl solution to remove residual Ga. The undoped GaN was etched away by
ICP to expose the n-GaN Layer. For better light extraction and the
contact characteristics, a 6-mol KOH solution was used to roughen
the exposed n-GaN surface. Finally, a metal contact pad comprised of
Cr/Au was deposited as n-type contact electrodes (shown in Fig. 1b).
Experimental
Figure 1 shows the schematic diagrams of the layer structures and
key fabrication process of the ASV-LEDs. The LED epilayers were
grown on a 0001-oriented sapphire substrate by metal organic chemical vapor deposition. Prior to the ASV-LED chip process, Ni/Ag/Ti/Au
z
E-mail: bzhang@xmu.edu.cn
Figure 1. Schematic device structure of ASV-LEDs using the proposed autosplit technology at some specific processing stages. (a) Samples at the auto-split
LLO processing stage. (b) Samples at the n-GaN ohmic contact processing
stage. (c) Schematic cross section of a regular GaN-based LED. Note that
device structures shown in the present figure were not in scale.
Downloaded on 2014-06-16 to IP 14.139.59.35 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).
Q27
Figure 2. (a) SEM top-view image of the electroplated Ni. (b) SEM tiltedview image of the electroplated Ni. (c) OM top-view image of the device after
the auto-split LLO process at 650 mJ/cm2 .
Tmax I () 2
[1]
Downloaded on 2014-06-16 to IP 14.139.59.35 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).
Q28
Figure 5. The vapor pressure vs. laser energy density. The inset shows the
surface morphology of the device after LLO process at 550 mJ/cm2 .
where I is the density of the laser energy and is the pulse width.
When is fixed, the maximum temperature Tmax is proportional
to I . Using data of the PN2 Tmax relationship from Karpinski and
Porowski, the vapor pressure PN2 as a function of I is obtained from
Eq. 1 and shown in Fig. 5. It is seen that, the vapor pressure is strongly
dependent on the laser energy density. In other words, the realization
of the auto-split LLO process depends on the laser energy density.
The inset shows the surface morphology of the device after LLO process at 550 mJ/cm2 , which is lower than the energy used in Fig. 2c.
Although the sapphire substrate can be removed at 550 mJ/cm2 , the
vapor pressure is about 0.31 Mpa and the device membrane is not
separated well. Such experimental phenomenon again demonstrates
that the laser energy density is the key factor of the auto-split LLO
technique.
Conclusions
In summary, an auto-split LLO method combined with selective
nickel electroplating and wafer bonding technique for the fabrication
of V-LEDs was presented. As compared to regular LEDs, the proposed
ASV-LEDs exhibited a significant improvement in both electrical and
Downloaded on 2014-06-16 to IP 14.139.59.35 address. Redistribution subject to ECS terms of use (see ecsdl.org/site/terms_use) unless CC License in place (see abstract).