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Energy Harvesting
Aditya S Bhat, Zoltan Danilo, Ralph Langkemper, Sanketh Ramachandra
Energy Harvesting
Department of Microsystems Engineering - IMTEK
University of Freiburg, Germany
List of Contents
Piezoelectric Soft MEMS for tactile sensing and Energy
harvesting
Motivation
Experimental setup
Sputter Deposition
Tactile Sensor Fabrication
Cantilever Fabrication
Results
Tactile Sensor
Flexible Cantilever
Conclusion
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List of Contents
Energy harvesting from hearts, lungs and diaphragm
Motivation
Challenges for implantable energy harvesters
Energy harvester (Heart/Lung)
Structure
Laboratory test
In vivo test
Conclusion
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Inorganic materials are typically rigid and brittle, often damaged under
large deformations.
Soft piezoelectrics have been proposed for high sensitivity and
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Design
AIN layer is sandwiched between two Molybdenum (Mo) metal
flexible cantilevers for energy harvesting from vibrations and air flow.
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Sputter Deposition
Deposition by RF reactive
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characteristic.
No deviation from linearity
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31.xx.2010
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Conclusion
Flexible tactile sensors demonstrate a high sensitivity and a linear
energy applications.
31.xx.2010
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Motivation
Battery life of active implant: several days some years
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Manufacturable
Durable
Corrosion resistant
Optimal mean power: 20 W [2] (Pacemaker)
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Bovine
Ovine
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Heartrate:
Higher frequency
Higher voltage
Correlates with the laboratory tests
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Diaphragm:
~ 2 V peaks
Less effective position
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Multilayer approach
Several MEH layers stacked
1, 3 or 5 MEH layers
tests show an increasing power density for more layers
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References
[1]
Canan Dagdeviren, Byung Duk Yang, Yewang Su, Phat L. Tran, Pauline Joe, Eric Anderson, Jing
Xia, Vijay Doraiswamy, Behrooz Dehdashti, Xue Feng, Bingwei Lu, Robert Poston, Zain Khalpey,
Roozbeh Ghaffari, Yonggang Huang, Marvin J. Slepiand, and John A. Rogers. Conformal
piezoelectric energy harvesting and storage from motions of the heart, lung, and diaphragm in
PNAS Vol. 111 no. 5, 04.02.2014, 19271932, doi: 10.1073/pnas.1317233111
[2]
Mohd H. S. Alrashdan, Azrul Azlan Hamzah and BurhanuddinYeop Majlis. Design and
optimization of cantilever based piezoelectric micro power generator for cardiac pacemaker in
Microsystem Technologies, 07.10.2014, 16071617, DOI 10.1007/s00542-014-2334-1
[3]
Francesco Guido, Vincenzo Mariano Mastronardi, MariaTeresa Todaro, Simona Petroni and
Massimo De Vittorio, Piezoelectric soft MEMS for tactile sensing and energy harvesting, in IC
Design & Technology (ICICDT), 2014 IEEE International Conference on 28-30 May 2014
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