MEMS motion sensors

A complete portfolio of MEMS

accelerometers and gyroscopes

October 2009

www.st.com/mems

The one-stop MEMS supplier

STMicroelectronics innovative, reliable and cost-effective MEMS sensors have revolutionized the way we interact
with everyday technology, making it easier and more user friendly.
With more than half a billion accelerometers and gyroscopes in the field and excellent acceptance from the market
in terms of quality and reliability, ST is today recognized as undisputed MEMS leader for mobile phones and portable
devices.
Encompassing the entire supply chain, ST brings its customers a competitive advantage with complete, reliable and
cost-effective solutions, ensuring prompt time-to-volume and time-to-market to effectively address high-volume
applications in consumer and industrial segments.
STMicroelectronics offers a wide portfolio of 2- and 3-axis linear accelerometers as well as single- and multi-axis
gyroscopes.

Linear accelerometers
STMicroelectronics state-of-the-art 2- and 3-axis analog and digital accelerometers feature up to 24g full scale, high
resolution, smart embedded functionalities and advanced power-saving features.

Applications
Industrial
(motion tracking and vibration monitoring)

Mobile, gaming and

pointing for smart interfaces

Industrial
(inclinometers)

Free-fall detection
and HDD protection

Automotive

Sport and fitness

Step count
Speed
Distance
Calories

Analog accelerometers - key features

QQ
QQ
QQ
QQ
QQ

Analog output with additional multiplexer output

Selectable full scale: 2g/6g
< 0.5 mA current consumption in normal mode
< 1 A current consumption in power-down mode
Bandwidth up to 2 kHz

QQ
QQ
QQ
QQ
QQ

Resolution better than 0.5 mg @ 100 Hz

Ultra-high stability over temperature: typ 0.2 mg/C
Operating temperature range: -40 to + 85 C
Embedded self test
High shock survivability: 10,000g for 0.1 ms

Analog accelerometers diagram

S1x
S/H

Charge
amplifier

S2x
S1y
R

Mux

Demux

S/H

S2y
S1z
S/H

Rout x
Vout x

Rout y
Vout y

Rout z
Vout z

S2z

Digital accelerometers - key features

QQ
QQ
QQ
QQ
QQ
QQ
QQ
QQ
QQ
QQ

Smart embedded features

Digital SPI, I2C interfaces - user selectable

Selectable full scale: from 2g up to 24g
< 0.25 mA current consumption in normal mode
< 10 A current consumption in low-power mode
< 1 A current consumption in power-down mode
Resolution better than 1 mg
Ultra high stability over temperature: typ 0.1 mg/C
Operating temperature range: -40 to + 85 C
Embedded self test
High shock survivability: 10,000g for 0.1 ms

QQ
QQ
QQ
QQ
QQ
QQ

Two independent fully programmable interrupt signals

Embedded free-fall and wake-up functions
Click and double click recognition
Direction detection
Sleep to wake function
Embedded high-pass filter

Digital accelerometers diagram

S1x
Charge
amplifier

S2x
S1y
R

Mux
S2y
S1z
S2z

Demux

Reconstruction
filter

Reconstruction Register
filter
array

Reconstruction
filter

IC/SPI
interface

Control logic
and interrupt
generator

CS
SCL/SPC
SDO
SDA/SDIO

RDY/INT1
INT2

Linear accelerometers portfolio

Lower noise/higher performances Higher resolution/performances

3 x 3 x 0.9

LIS331DL
8-bit
2/8g

3 x 3 x 0.9

3 x 3 x 0.9

LIS331DLF/ M
6/8-bit
2/4/8g

LIS331DLH
12-bit
2/4/8g

3 x 3 x 0.9

3 x 3 x 0.9

LIS331HH
12-bit
6/12/24g
3 x 3 x 0.9

High
performance

3 x 3 x 0.9

LIS33DE
8-bit
2/8g

High
performance

LIS331AL
300 g/Hz
2g

High runner

LIS332AX/ AR
100 g/Hz
2g

Cost sensitive

High
performance

3 x 5 x 0.9

LIS302DL
8-bit
2/8g

3 x 5 x 0.9

3 x 5 x 0.9

LIS302DLH
12-bit
2/4/8g
3 x 5 x 0.8

High
performance

3 x 5 x 0.9

LIS35DE
8-bit
2/8g

High runner

LIS302SG
200 g/Hz
2g

Cost sensitive

3-axis
2-axis

4 x 4 x 1.5

LIS344AL
275 g/Hz
3.5g

LIS3LV02DL
12-bit
2/6g

High runner

High runner

LIS344ALH
50 g/Hz
2/6g

Cost sensitive

+
Smaller size

LIS352AX/ AR
100 g/Hz
2g

New
High
performance

Smaller size

New

4 x 4 x 1.5

4.4 x 7.5 x 0.9

LIS244ALH
50 g/Hz
2/6g

LIS244AL
220 g/Hz
2g

LIS202DL
8-bit
2/8g

4 x 4 x 1.5

4 x 4 x 1.5

3 x 5 x 0.9

Analog I/F

Digital I/F (I2C/SPI)

Analog interface accelerometers

Part number
LIS244AL
LIS244ALH
LIS332AR
LIS332AX
LIS331AL
LIS352AR
LIS352AX
LIS302SG
LIS344AL
LIS344ALH

LGA package
(mm - leads)

Supply voltage
Sensing axes
Output response
Full scale
Noise density
(x,y,z)
(absolute, ratiometric) (typ) (g) (min) (V) (typ) (V) (max) (V)
(g/Hz)

4 x 4x 1.5 16L

x,y

3 x 3 x 0.9 16L

x,y,z

3 x 5 x 0.9 14L

x,y,z

4 x 4 x 1.5 16L

x,y,z

Ratiometric
Ratiometric
Ratiometric
Absolute
Ratiometric
Ratiometric
Absolute
Ratiometric
Ratiometric
Ratiometric

2
2/6
2
2
2
2
2
2
3.5
2/6

2.4
2.4
2.16
2.16
3
2.16
2.16
3
2.7
2.4

3
3.3
3
3
3.3
3.3
3.3
3.3
3
3.3

3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.3
3.6

220
50
100
100
300
100
100
200
275
50

Current
consumption
(typ) (mA)
0.65
0.68
0.3
0.3
0.65
0.3
0.3
0.65
0.69
0.68

Power
down (A)
1
1
1
1
1
1
1
1

Digital interface accelerometers

Part number
LIS202DL
LIS331DL
LIS33DE
LIS331DLF
LIS331DLM
LIS331DLH
LIS331HH 1
LIS302DLH 1
LIS302DL
LIS35DE
LIS3LV02DL
1. New

LGA package
(mm - leads)

Sensing axes
(x,y,z)

Full scale
(typ) (g)

3 x 5 x 0.9 14L

x,y

3 x 3 x 0.9 16L

x,y,z

3 x 5 x 0.8 14L

x,y,z

3 x 5 x 0.9 14L

x,y,z

4.4 x 7.5 x1 16L

x,y,z

2/8
2/8
2/8
2/4/8
2/4/8
2/4/8
6/12/24
2/4/8
2/8
2/8
2/6

Supply voltage
(min) (V)
2.16
2.16
2.16
2.16
2.16
2.16
2.16
2.16
2.16
2.16
2.16

(typ) (V)
2.5
2.5
2.5
2.5
2.5
2.5
2.5
2.5
2.5
2.5
3.3

(max) (V)
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6

Number
of bits

Current consumption
(typ) (mA)

Low power
(A)

8
8
8
6
8
12
12
12
8
8
12

0.3
0.3
0.3
0.25
0.25
0.25
0.25
0.25
0.3
0.3
0.6

10
10
10
10
10
-

Gyroscopes
ST offers a complete portfolio of single, dual and tri-axis gyroscopes with wide full-scale range (from 30 up to 6000/s),
excellent performance in terms of accuracy, and stability over time and temperature for consumer and industrial
markets.
By incorporating an accelerometer and actuator in a single micromachined structure, STs gyroscope family leverages
on robust and mature manufacturing processes already successfully used for the high-volume production of more than
half a billion linear accelerometers.
For further details and deeper understanding of STs gyroscope sensors operating principle, key parameters and
applications, an e-presentation is available on www.st.com/mems.

Applications
Pointing devices

Gaming

Full scale 300-500/s

Full scale 500-1500+/s

Dead reckoning/
personal navigation

Image stabilization

Full scale 100-300/s

Full scale 30-100/s

Key features
QQ
QQ
QQ
QQ
QQ
QQ
QQ

Analog output
Single and dual axis: yaw, pitch and yaw, pitch and roll
Tri-axis: yaw, pitch and roll in a single package
Extended power supply range: 2.7 to 3.6 V
Wide range of full scales available: 30 to 6000/s
< 5 A current consumption in power-down mode
High resolution: up to 0.014/s/Hz at 30/s full scale

QQ

QQ
QQ
QQ
QQ
QQ

Ultra high stability over temperature:

typ - up to 0.08/s/C
Operating temperature range: -40 to + 85 C
Embedded self test
Embedded power down
Sleep mode
High shock survivability

Gyroscopes portfolio
Yaw

Pitch and roll

Yaw, pitch
and roll

Pitch and yaw

LY3200ALH
2000/s
LY5150ALH
1500/s

New
LY3100ALH
1000/s

LPR4150AL
1500/s

LPR5150AL
1500/s

LPY4150AL
1500/s

New

LYPR540AH 2
1600/s

LPY5150AL
1500/s

New

Gaming

New

New
LY550ALH
500/s

LPR450AL
500/s

LPR550AL
500/s

LPY450AL
500/s

New

Increasing full scale

LY330ALH
300/s

LY530ALH
300/s

LPR430AL
300/s

LY510ALH
100/s

LPR410AL
100/s

New

LPR530AL
300/s

LPY430AL
300/s

LPR510AL
100/s

LPY410AL
100/s

5 x 5 x 1.5

4x5x1

Single axis

New

Car navigation
LPY510AL
100/s

New
LPR503AL
30/s

LPY403AL
30/s

New

3x5x1

LPY530AL
300/s

Pointing devices

New

New
LPR403AL
30/s

LYPR540AH 2
400/s

New

New

LY503ALH
30/s

LPY550AL
500/s

Image
stabilization

LPY503AL
30/s

New

5 x 5 x 1.5

4x5x1

5 x 5 x 1.5

4.4 x 7.5 x 1

Dual axis

Tri-axis

2. Single part number with dual full scale: 400/1600/s

Single and multi-axis gyroscopes

Part number
LY330ALH
LY3100ALH
LY3200ALH
LPY403AL
LPY410AL
LPY430AL
LPY450AL
LPY4150AL
LPR403AL
LPR410AL
LPR430AL
LPR450AL
LPR4150AL
LY503ALH
LY510ALH
LY530ALH
LY550ALH
LY5150ALH
LPY503AL
LPY510AL
LPY530AL
LPY550AL
LPY5150AL
LPR503AL
LPR510AL
LPR530AL
LPR550AL
LPR5150AL
LYPR540AH

LGA package
(mm - leads)

Sensing axes
(Y,P,R)

3x5x1

4x5x1

PY

4x5x1

PR

5 x 5 x 1.5

5 x 5 x 1.5

PY

5 x 5 x 1.5

PR

4.4 x 7.5 x 1

YPR

Full scale
(typ) (/s)
300
1000
2000
30/120
100/400
300/1200
500/2000
1500/6000
30/120
100/400
300/1200
500/2000
1500/6000
30/120
100/400
300/1200
500/2000
1500/6000
30/120
100/400
300/1200
500/2000
1500/6000
30/120
100/400
300/1200
500/2000
1500/6000
400/1600

Supply voltage
(min) (V)
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7
2.7

(typ) (V)
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3

(max) (V)
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6
3.6

Noise density
(/s/Hz)

Current consumption
(typ) (mA)

0.018
0.018
0.078
0.015
0.018
0.022
0.031
0.088
0.015
0.018
0.022
0.031
0.088
0.014
0.017
0.035
0.059
0.175
0.014
0.017
0.035
0.059
0.175
0.014
0.017
0.035
0.059
0.175
0.059

4.2
4.2
4.2
6.8
6.8
6.8
6.8
6.8
6.8
6.8
6.8
6.8
6.8
5.0
5.0
5.0
5.0
5.0
6.8
6.8
6.8
6.8
6.8
6.8
6.8
6.8
6.8
6.8
10.8

Analog 3-axis gyroscope diagram

Gain

Rotor driving

X axis
sensing

AMP

MIX

Optional HP/LP
filtering

LPF
Gain

Y axis
sensing

AMP

MIX

Optional HP/LP
filtering

LPF
Gain

Z axis
sensing

AMP

MIX

Optional HP/LP
filtering

LPF

Driving circuitry
Drive mass
movem. reading

Drive mass
reading chain

Drive mass
movem. actuation
VGA

PLL

Phase
generator

Accelerometer and gyroscope packages

LGA-28
(4.4 x 7.5 x 1 mm)

LGA-16
(5 x 5 x 1.5 mm)

LGA-28
(4 x 5 x 1 mm)

LGA-16
(4 x 4 x 1.5 mm)

LGA-14
(3 x 5 x 0.8 mm)

LGA-10
(3 x 5 x 1 mm)

LGA-16
(3 x 3 x 0.9 mm)

ST pioneered the successful use of LGA packages for MEMS sensors. ST now has the widest manufacturing capability
and greatest expertise for the production of sensor-in-plastic LGA packages.

 STMicroelectronics - October 2009 - Printed in Italy - All rights reserved

The STMicroelectronics corporate logo is a registered trademark of the STMicroelectronics group of companies.
All other names are the property of their respective owners.

Order code: BRMEMS1009

For more information on ST products and solutions,

visit www.st.com