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Inkjet printing, known as digital writing technique, can directly deposit functional materials to form pattern onto substrate. This
paper provides an overview of inkjet printing technologies for flexible electronics. Firstly, we highlight materials challenges in
implementing flexible devices into practical application, especially for inkjet printing process. Then the micro/nano-patterning
technologies of inkjet printing are discussed, including conventional inkjet printing techniques and electrohydrodynamic printing
techniques. Thirdly, the related equipments on inkjet printing are shown. Finally, challenges for its future development are also
discussed. The main purpose of the work is to condense the basic knowledge and highlight the challenges associated with the
burgeoning and exciting field of inkjet printing for flexible electronics.
flexible electronics, nanomanufacturing, organic thin film transistor, micro/nano-patterning, inkjet printing, electrohydynamics, roll-to-roll
Citation:
Yin Z P, Huang Y A, Bu N B, et al. Inkjet printing for flexible electronics: Materials, processes and equipments. Chinese Sci Bull, 2010, 55: 33833407,
doi: 10.1007/s11434-010-3251-y
www.springerlink.com
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Photolithography
Extremely high
Extremely small
Low
High
Needed
Extremely high
Bad
Bad
Bad
Large
Clean rooms, vibration isolation
Multi-step
Noncontact
Shadow mask
Low
Large
High
Low
Needed
Low
Good
Bad
Medium
Medium
Low
Multi-step
Contact
Micro-contact printing
Medium
Medium
High
Medium
Needless
High
Bad
Bad
Good
Low
Medium
Multi-step
Contact
Inkjet printing
Low
Large
High
Low and High
Needless
High
Excellent
Good, digital lithography
Good
Low
Low
All in one
Noncontact
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Z=
( ) 2
N Re
( NWe )
1
2
(1)
The printable inorganic material includes metal and nonmetal, such as carbon nanotubes for transparent conductors,
transition metal oxide for semiconductors and dielectrics,
metal nanoparticles for electrodes, and so on. All the above
materials are able to build flexible electronics by inkjet
printing.
(i) Carbon nanotube. Single-wall/multi-wall carbon
nanotubes (SWCNTs/MWCNTs) hold many kinds of advantageous physical properties [38] such as excellent thermal conductivity, good mechanical strength, optional semiconducting/metallic nature, and advanced field-emission
behavior. Fan et al. [39] and Tong et al. [40] have printed
thin films based on MWCNT-based ink and a solution ink
of MWCNTs dissolved in water, respectively. The results
showed that: For the first printed layer, both inks cannot
form good conductive network. With the increase of printed
layers, continuous MWCNTs conductive network were
formed gradually, which exponentially decreased the electrical resistance. When the films are printed by three layers
of MWCNT-based ink and four layers of solution ink of
MWCNTs with sub-100 nm thick, the networks are comTable 2
Viscosity
(mP S)
Surface tension
(mN/m)
PiezoDOD
ThermalDOD
EEEHD
Spinning Spraying jetting
<40
1.28
7175
2.76
90
2070
Temperaturedepended
1564
45
50
Figure 4
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SEM images of carbon stripe on paper (a) one layer; (b) two layers; (c) three layers and (d) four layers [39].
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Figure 5
Optical microscope micrographs (printed one layer (a), two layers (b), three layers (c), four layers (d), respectively) [40].
Figure 6 TEM images with different magnifications of nanofibres with well-oriented MWNTs along the axis of nanofibre. (a) TEM image with a low
magnification, (b) and (c) TEM images of the composite nanofibres [43].
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Figure 8 Schematic diagram of the top-gate inkjet printed TFT configuration with an F8T2 semiconducting layer (S, source; D, drain; and G, gate)
[29].
excess of 1 cm2/V s.
PVP is a biocompatible polymer used as a blood plasma
expander for trauma victims. PVP is an amorphous polymer
possessing high Tg (86C) due to the presence of the rigid
pyrrolidone group, which is known to form various complexes with many inorganic salts [39,59]. Addition of salts
with a conducting species such as silver and potassium to
PVP has a marked influence on the conductivity of the
polymer [40,41]. And the dielectric behavior of PVP doped
with ammonium thiocyanate (NH4SCN) has been studied
using dielectric measurements. Choi et al. [60] have used
PVP as a dielectric layer instead of SiO2 gate dielectric in
fabricating the inorganic ZnO FETs, and PVP polymer dielectrics exhibits promising electrical properties which operates in the depletion mode with high mobility and high
on-current.
(ii) Conductive organic materials. There are several
successful conducting polymers, such as Polypyrrole and
Poly (3,4-ethylenedioxythiophene) (PEDOT). PEDOT has
be studied widely due to its excellent electrical conductivity,
such as highly conductive (400600 S/cm) and electrochemically stable, optoelectronic properties (highly transparent) and thermally stable property (up to 230C), however, it is insoluble in common solvents which has limited
practical applications in inkjet printing [58]. The solubility
could be improved by adopting a water-dispersible polyelectrolyte, such as poly-styrene-sulfonate (PSS), as a charge
balancing counter ion doping polymerization, which yields
poly(3,4-ethylene dioxythiophene)-poly(styrene sulfonate)
(PEDOT:PSS) shown in Figure 9 [61].
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The resultant PEDOT:PSS is dark blue, electrochemically stable in its p-doped form, moderately transparent with
high electrical conductivity (110 S/cm). Although PEDOT:
PSS has a higher sheet resistance compared to the transparent conductor indium tin oxide (ITO), it is possible to replace ITO. As colloidal dispersions, PEDOT:PSS is stable
in water and has excellent capabilities to form films by
many methods [62]. Ballarin et al. [63] have compared the
continuous film of PEDOT:PSS fabricated by inkjet printing technique with that deposed by spin-coating. No appreciable differences were observed in surface and electrochemical characteristics. These findings show that PEDOT:
PSS printed by inkjet printing may be an efficient and clean
choice. Eom et al. [64] have printed PEDOT:PSS layer by
the inkjet printing technique. Using the newly developed
ink formulation of PEDOT:PSS can increase the photovoltaic performance, which results from a reliable print
head with optimum wetting, spreading and drying with
glycerol and optimized EGBE surfactant. The surface profile images inkjet-printed PEDOT:PSS films without and
with additives in different amounts are shown in Figure 10.
The conductivity measurements for inkjet-printed PEDOT:
PSS films and the current-density versus voltage (J-V)
characteristics of solar cells with different inkjet-printed
PEDOT:PSS layers in the dark and under simulated AM1.5
illumination of 100 mW/cm2 are shown in Figures 11 and
12 separately. We can find that the conductivity of inkjet-printed PEDOT:PSS films are 0.782 S/cm, 152 S/cm,
164 S/cm and 1.28 S/cm from Figure 11.
Hohnholz et al. [65] showed that the effect of additional
Figure 10 Surface profile images of inkjet-printed PEDOT:PSS films (a) without additives (pure PEDOT:PSS); (b) with 6 wt.% glycerol; (c) with 6 wt.%
glycerol and 0.2 wt.% EGBE; (d) 6 wt.% glycerol and 0.4 wt.% EGBE [64].
Figure 12 The graph of current-density versus voltage (J-V) characteristics of solar cell (PEDOT:PSS with (1) without additives, with; (2) 6 wt.%
glycerol; (3) 6 wt.% glycerol and 0.2 wt.% EGBE; (4) 6 wt.% glycerol and
0.4 wt.% EGBE) [64].
Hybrid/nanocomposite materials
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3.1
is limited [30]. Thermal buckling means are also not practical for the same reason. Thermal bubble inkjet devices only
need a small thermal heater for actuation thanks to the free
expansion of the vapor bubble. They are compatible with
micro-fabrication, which makes a large inkjet array feasible
[30]. Wang et al. [73] developed a print head using a dense
array of thermal bubble inkjet devices. Experimental results
show that this print head is capable of generating water
droplets as small as 3 m in diameter.
(ii) Physical and chemical mechanism of drop formation.
The applications in printable electronics require higher print
rates, better resolution and higher reliability while printing
more complex, non-Newtonian and heavily solids-loaded
liquids, which makes the understanding of the physics involved in the precise manipulation of liquid jets and drops
ever more important. The main stages of DOD drop formation, including ejection and stretching of liquid, pinch-off of
liquid thread from the nozzle, contraction of liquid thread,
breakup of liquid thread into primary drop and satellites,
and recombination of primary drop and satellites, are being
analyzed based on the theoretical and experimental results
[74]. The proper understanding and control of jet formation
and subsequent motion of the jetted materials requires
physical studies into material properties at very high shear
rates, instabilities of jets, drop formation and motion,
stretching of fluid ligaments and the aerodynamic and electrostatic interaction of jets and drops in flight [75]. Numerical
simulations have been carried out based on one-dimensional
models and two-dimensional axisymmetric Navier-Stokes
equations. Experimental observations of the dynamics at the
micron scale have compared with the simulated flows [74].
The transient liquid velocity distribution causes liquid
surface deformation at the nozzle forming a thin neck, then
droplet detaches if the liquid neck is sufficiently small. The
dominant forces which control the behavior of liquid jets
and drops arise from inertia, viscosity and surface tension.
As a droplet is expelled, energy goes into viscous flow, surface tension of the drop, and kinetic energy. In addition to
the main drop a smaller satellite drop is created slightly later
which recombines with the main drop in front of it after a
few periods. The formation of secondary satellite droplets
should be suppressed [37]. The linear analysis of Rayleigh
does not predict the formation of satellites at all [36]. For a
given ink, satellite formation is normally controlled pragmatically by changing the amplitude of the driving disturbance.
Usually, smaller nozzles allow smaller droplets and
higher resolution. However, as nozzle size decreases, surface tension and viscosity force will increase, and a higher
actuation pressure is necessary to accelerate the liquid. A
major concern in ink design is the first drop problem
which is the clogging of nozzles by partly dried ink [27], so
DOD system is the need for the ink to dry or solidify on the
printed surface but the nozzle. This can be addressed at the
printhead, by appropriate cleaning and capping for example,
and at the substrate by using low volatility inks and absorbing substrates, heaters, dryers or UV-curable inks [36]. The
chemical and physical compatibility of head, ink and substrate is still unclear.
(iii) Control of morphology, feature sizes and performance. Recent advances in the performance of OTFTs are
largely due to fine control of the morphology and the resolution in semiconductor thin films in addition to the development of active organic materials. The patterns range from
simple island areas to lines over large distances, even to
large area. Further, as drops are added to the printed liquid
line, instabilities, such as necks, may form due to the dynamics of the spreading and drying of the printed liquid line
[76]. It is a challenge to print lines over long distances, control of feature sizes and morphology.
Charge-carrier transport in TFTs is governed by their
morphologies. Fine morphology benefits to print pinhole-free layers to avoid opens or shorting of devices. The
morphology can be achieved by adjusting the deposition
conditions such as surface treatment of the substrate, modifying solvent properties, and adopting organic semiconductor materials with strong intermolecular p-p interactions
[77]. The fluid dynamics involved in drop formation, wetting and spreading play an important role in defining the
surface roughness and decreasing the feature size. These
low viscosity fluids are capable of flowing through the nozzle without clogging and forming consistent drops that solidify by liquid evaporation, however, dimensional control
of the feature can be a major problem. Therefore control of
ink spread on the substrate is crucial [78].
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The spreading of solution can be reduced by prepatterning the surface with different regions of differing wettability
[79] or surface topography [80] on the substrate, formed by
photolithographic or other means. Small gaps can be created
using a self-aligned printing method that relies on differences in wettability [81]. The use of extra patterning steps
are adopted in the process with extra processing equipment.
This strategy enables inkjet printing of all-polymer TFTs
with channel lengths in the micrometer range (Figure 14)
[29], where (a) is the schematic diagram of high-resolution
inkjet printing onto a prepatterned substrate, (b) is AFM
showing accurate alignment of inkjet-printed PEDOT:PSS
source and drain electrodes separated by a repelling polyimide line with 5 m, (c) shows F8T2 semiconducting layer
and PEDOT:PSS electrodes, and (d) is optical micrograph
of the device. Through appropriate control of the printing
process, Bao [82] demonstrate the transistors with channels
as short as 250 nm. Sele et al. [83] have demonstrated a
self-aligned printing technique with standard inkjet-printing
equipment, but is capable of achieving sub-100 nm resolution
without any lithographic step. A combination of inkjet and
laser ablation/sintering has been used to fabricate a variety of
passive and active components of and on polymers [84].
When the liquid drop is ejected from the printhead, it
takes a ballistic trajectory and lands on a certain position on
a substrate. Usually, the expected error in the ejected drop
placement is about 510 m [1]. However, what matters in
practice is the accuracy with which a droplet can be deposited on a surface. The drop placement accuracy does not
only depend on printhead positioning accuracy, but also on
Figure 14 Schematic diagram of a top-gate inkjet printed TFT (S, source; D, drain; and G, gate) [29]. (a) Schematic diagram of high-resolution IJP onto a
prepatterned substrate; (b) AFM showing accurate alignment of inkjet-printed PEDOT/PSS source and drain electrodes separated by a repelling polyimide
(PI) line with L= 5 m; (c) schematic diagram of the top-gate IJP TFT configuration; (d) optical micrograph of an IJP TFT (L = 5 m).
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In recent years, there are considerable interests in developing new printing technology for patterning materials in
nano-scale. EHD printing pulls the fluids rather than pushes
them like conventional inkjet printing. EHD printing, in
which electric fields are employed instead of thermal bubble,
piezoelectric and acoustic wave, uses a fine jet generated at
the apex of a liquid cone in the cone-jet mode to create
spray by electrospraying (Figure 19), fibre by electrospinning (Figure 21) or droplets by EHD jetting (Figure 24),
respectively [56]. There are some unique features for EHD
printing, such as allowing submicron resolution [85], and
particulate or polymer solutions can be easily emitting without clogging the nozzle. This also means that the resolution is
not limited by the nozzle diameter [78]. Using coarser nozzles prevents them from clogging, but at the same time, the
droplets can be of sub-micrometer size [86]. EHD printing
has great potential to offer complex and high-resolution
printing and is opening new routes to nanotechnology.
(i) Mechanism of EHD printing. Three types of EHD
printing hold the same mechanism of electrohydrodynamics
and the homologous experiment setups [78,87]. It is promising for all the three methods used in flexible electronics,
such as electrospray for thin film layer, electrospinning for
interconnection, and EHD inkjet for electrode. The charged
liquid is ejected from the nozzle when the electrical force
locally overcomes the liquid surface tension. The liquid at
the outlet of a nozzle is subjected to an electrical shear
stress by maintaining the nozzle at high electric potential.
This non-mechanical, electrostatic technique use an electric
field to draw out a liquid from a nozzle to form a Taylor
cone which then breaks up into a stream of very small
droplets [88]. Figure 15 shows schematics of this method
employed to produce drops. There are other various printing
modes with various jet structures and break-up mechanisms,
depending on the flow rates, the applied voltages, liquid
properties, and nozzle configurations [89].
Patterns using EHD printing have been fabricated by the
continuous cone-jet mode [56] and the pulsating jet mode
[90]. The continuous cone-jet only form continuous lines
and not a series of dots. The pulsating jet mode has been
reported to produce discontinuous lines or a series of dots in
a DOD fashion by use of the pulsed voltage [91] or lower
DC voltage than that for the continuous cone-jet mode.
However, as pulsed voltage frequency increases, drops may
not generate at every pulse although the meniscus oscillates
or it may break up into many droplets [87]. The liquid
flowing out of a capillary nozzle, which is maintained at
Figure 15
Figure 16
Fg Fst + Fe = 0.
(2)
Figure 17
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Figure 18
Mode
Voltage
Electrode distance
Solute
Pattern
E-jetting
Cone-jet, Microdripping
0.53 kV
0.11 mm
Polymer, nanoparticle
E-spinning
Cone-jet, Multi-jet
110 kV
1050 mm
Polmer, nanomaterials,
E-spraying
Cone-jet, Multi-jet
1530 kV
100250 mm
Almost materials
Thin film
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Figure 19 Schematic illustration of an electrospray printer [96]. (a) Simple nozzle; (b) nozzle-extractor system.
Figure 20 Schematic of direct writing: (a) One-step process using electrospray droplets and (b) two-step process: ion deposition with a sharp
needle followed by nanoelectrospray [86].
Figure 21
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the effects of polymer solution concentration, applied voltage, and electrode-to-collector distance.
MacDiarmid [104] presented a Nobel lecture: Synthetic
Metals: a novel role for organic polymers, gave an insight
into the application of flexible electronics, and made the
first conducting polymer fiber (diameter 950 nm to 2100
nm). Although the fibre is thick, the attempt is rousing.
Chronakis et al. [58] fabricated the conductive polypyrrole
nanofiber with diameters in the range of 70300 nm. Jeong
et al. [109] fabricated MWCNT/nylon composite nanofibers
and tested their I-V performance. Zhang et al. [43] also
spinned nanofibres with diameter with ~100 nm and aligned
across the gap between the parallel electrodes.
Sun et al. [105] developed a near-field electrospinning
(NFES) to deposit solid nanofibers in a direct, continuous,
and controllable manner. Figure 23(a) illustrates the schematic setup that merges several disparate concepts, including the electrode-to-collector distance h in the range of 500
m to 3 mm, the liquid polymer solution supplied in a
manner analogous to dip-pen, a solid tungsten spinneret of
25 m tip diameter as illustrated in Figure 23(b), the applied
electrostatic voltage reduced due to the short electrodeto-collector distance. Figure 23(c) shows that a droplet of 50
m in diameter is extracted from the polymer solution. A
Taylor cone is observed in Figure 23(d). As the process
proceeds, the polymer solution on the tungsten tip is consumed and its diameter shrinks, leading to a smaller Taylor
cone and thinner nanofibers as observed in Figure 23(e).
NFES combines dip-pen, inkjet, and electrospinning by
providing the feasibility of controllable electrospinning for
sub-100-nm nanofabrication.
(iv) Electrohydrodynamic jetting. EHD jetting is a
DOD control of a droplet in microdripping mode, which can
deliver highly uniform droplets and can pattern any geometry. It has been paid more attentions in the high resolution
patterns, since it can directly form micro/nano-scale patterns
with different materials, ranging from insulating and conducting polymers, from solution suspension to SWCNs.
Many experiments were carried out by varying the bias and
pulse voltages to implement the DOD operation of jetting
droplets and to investigate the optimal pulse conditions for
jetting [93]. However, there has been little in-depth study of
EHD jetting.
Figure 24 shows a schematic diagram of the EHD jetting
system [85], where Figure 24(a) is SEM images of a microcapillary nozzle, Figure 24(b) is nozzle and substrate configuration for printing, and Figure 24(c) is the whole printer
set-up. A jet is emitted through the tip of needle and controlled by the movement of the table. The droplets are deposited on the substrate placed on the second electrode. The
internal diameter of the needle or nozzle usually is about
0.11 mm. If the nozzle can be fabricated with smaller internal diameters, higher resolution can be patterned. EHD
jetting can produce droplets at least an order of magnitude
smaller than the nozzle size [85]. The droplets can be of
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Figure 23 Schematic representation of NFES processing [105]. (a) Schematic representation of NFES; (b) SEM photomicrograph showing the nozzel; (c)
an optical photo showing a 50 m diameter polymer solution droplet; (d) a polymer jet is ejected from the apex of a Taylor cone under applied electrical field
and observed under an optical microscope; (e) the size of the polymer droplet decreases as the polymer jet continues to electrospin.
Figure 24 Nozzle structures and schematic diagrams of a high-resolution e-jet printer [85]. (a) SEM images of a gold-coated glass microcapillary nozzle (2
m internal diameter); (b) nozzle and substrate configuration for printing; (c) printer set-up.
trode lines ~2 m width after etching and stripping. An array of source/drain electrode pairs is separated by ~1 m.
Another interesting work is that they used SWNTs as semiconductor connecting the printed electrode pair to construct
a TFT, whose performance is much better. If patterns of
continuous lines use the 2 m internal diameter nozzle and
a printing speed of 10 m/s, the line width are ~3 m. If an
1 m internal diameter nozzle is adopted, line widths are
about 700 nm.
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obtain a stable jet, the growth rate of the jet should be decreased by applying high axial electric fields. However, it can
not only increase the axial components of the electric fields
but also increase the radial components. Increasing the radial
components might amplify the growth rate of the jet. Lee et al.
[56] found that the pin-type ground electrode with a 400 nm
diameter effectively increased the axial electric fields but did
not greatly change the radial electric fields, so the jet breakup
was reduced. Additionally, the guide ring with an inner hole
reduced the chaotic motion of the jet and prevented the jet
from digressing from the centerline [96].
4.1
Apparatus
Epson Stylus Color 670
Cannon BJC 4550
Hewlett packard (HP 5550)
Table 5
Standard workspace
A4
A4
A4
Print rate
5 ppm
5 ppm
28 ppm
Working temperature
Room temperature
Room temperature
1527C
High resolution
7201440 dpi
720360 dpi
600600 dpi
Microfab Jetlab- II
Workspace (mmmm)
150150, 200200 Option:custom
Accuracy (m)
15 Option: 3 with maping
a)
Nozzles
Frequency (kHz)
20
Microfab Jetlab-4
160120, 210275 Option:custom
30, unidirectional
5500a)
4
20
110b)
FUJIFILM DMP-3000
300300
5
128c)
10/15c)
1225d)
LP50 inkjet printer
A4
5
128
25
*Microdrop,
20180
200200
5
1
20
MD-P-802+AD-K-401
a) Ph-46 drop on demand print head; b) DMP Cartridge-based printheads; c) SX3 head, SE3head; d) print head:PL128-H; *: Autodrop Professional Positioning System MD-P-802 and AD-K-401 combined a system.
will introduce some typical apparatus and critical technologies for bridging the gap between lab-scale and industrialscale.
(i) Experiment setup of EHD inkjet. Several platform
and prototype have been built at the laboratory scale. The
main challenge is related with the facts that only at particular
flow rates and high-voltage electric field a cone-jet configuration with uniform droplet size can be obtained. Rogers et al.
[85] developed a novel high-resolution jet printing system
and used this system to study the relationship between the
internal diameter of nozzle and the dot diameter and line
width. The experimental setup includes a syringe pump (flow
rates 30 pls1) or pneumatic pressure controller (applied
pressure 5 psi), a gold-coated nozzle, a power supply and
the substrate/electrode combination mounted on a five-axis (x,
y, z axes and two tilting axes in the x-y plane) stage, shown in
Figure 24. These components are connected by pipe and
other fixing accessories. They illustrated that high-resolution
metal interconnection, electrodes and probing pads for representative circuit patterns and functional transistors with critical dimensions are built as small as 1 m. Their future wok
focused in how to enable this system resolution into nanoscale and enhance the speeds for printing. They illustrated a
future EHD inkjet system consisting of xyz motion stage and
the nozzle fixed in z motion stage. The compact multi-nozzle
is connected to a syringe pump.
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Figure 25 Diagram of structure of multi-nozzle and EHD inkjet system [112]. (a) Fabricated multinozzle and; (b) fabrication flow chart of the multinozzle;
(c) schematic of the EHDP system.
Figure 26 Apparatus and devices used for the fabrication of OLED thin films using electrospray deposition. (a) Apparatus configuration; (b) layout of
substrate used for deposition [124].
3402
Figure 28
Table 6
Figure 27
gies.nl/).
display panels, circuit boards is a batch process using conventional vacuum deposition and lithography pattern technologies on silicon wafers or glass substrates. Flexible electronics, in principle, are amendable to a R2R manufacturing
process which represents a dramatic deviation from the current batch process. R2R processing offers a significant advantage compared with the conventional batch process, as it
increases throughput by allowing for greater levels of automation and by eliminating the overhead time and human
handling involved in loading/unloading panels and processing
the substrates [93]. If and when R2R processing technology is
adopted in flexible electronics manufacturing, it promises to
reduce capital equipment costs, significantly increase
throughput. R2R fabrication facility costs scale roughly as the
width of the web rather than as the area of the electronics [1].
For large-area devices, this advantage becomes increasingly
important.
How to bridge up EHD printing and R2R web system is a
big challenge. Figure 29 illustrates a R2R system used in
manufacturing a novel electrode of display pixels [127]. In
this system, bottom film experiences flexography, drying,
vacuum sputter, lift-off, gravure printing and top film ex-
Voltage
Collector
Substrate speed
Electrode rotation speed
(kV)
height (mm)
(m/min)
(r/min)
NS Lab
080
60210
0.101.56
116
a)
a)
100250
0.205
116
NS Pilot 080 060
a) Spinning heads positive(080 kV), Collecting electrode negative(060 kV).
Series
Productivity
(g/min)
1
3
Working
environment (C)
1830
1840
Figure 29
3403
periences vacuum sputter. Then, the two films were laminated together. In the process, the layer is 12 m by flexography, Al and SiO2 layers is less than 500 nm. Various
layers were printed in different processes and switched for
different sequence. Recently, several flexible electronics
manufacturing approach has combined with R2R successfully.
Hyun et al. [128] exploits the R2R nanoimprint lithography
system shown in Figure 30. The system consisted of three
units: coating processes, imprinting process and metal deposition process. Polymer patterns are about 70 nm feature size.
Jain et al. [129] developed R2R Lithography systems for
flexible displays (Figure 31), a conventional lithography embedded in R2R. These systems meet all of the requirements
of patterning on continuous, flexible substrates with highresolution. The resolution can attain 10 m. An alignment
system ensures a layer-to-layer overlay accuracy of 2.5 m.
Another system named Anvik HexScanTM 1010 SDE micro-
Figure 30
The future and challenge for industry application. (a) Schematic of the R2RNIL; (b) imprint unit; (c) coating unit [128].
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Figure 31
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