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G. R. Henry
Citation: Journal of Applied Physics 43, 2996 (1972); doi: 10.1063/1.1661647
View online: http://dx.doi.org/10.1063/1.1661647
View Table of Contents: http://scitation.aip.org/content/aip/journal/jap/43/7?ver=pdfcov
Published by the AIP Publishing
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J.
APPPENDIX
(A1)
go fo'" QO_i(U+Ui)e-U(u+u;)du
For a cold plasma (Te:S 104 OK, the principal contribution to the two integrals of Eq. (A1) is due to small
energies tmw 2 in the region where the two functions
(u+ut)Q1-l(u+ut) and (u+ul)Qo_l(u+ud verify l
(U+Uf'jQl_I(U+Un (u+U;)QO_I(U+U;) ,
yielding RI1 R lo .
tmw~ and tm (w t)2 are, respectively, the ionization
energy for levels 0 and 1.
RI1
RIO
= nl fwt WQl
National de la Recherche
Scientifique.
IN. Peyraud, J. Phys. (Paris) 30, 773 (1969).
2L. A. Shelepin, and L. I. Gudzenko, Soviet Phys. Doklady
sumed to be constant.
Numerical calculations are presented for the impedance per square of metallic films. We
consider in detail the case in which the mean free path of the conduction electrons is comparable to or greater than the film thickness (thin films at low temperatures), with particular attention to the transition between the dc limit and the anomalous skin-effect limit.
I. INTRODUCTION
Electrical impedance has been studied in many materials under various conditions. Here we discuss theoretically some aspects of impedance relevant to thin metallic films at low temperatures. The surface impedance
per square 1 is considered as a function of electrical
frequency, film thickness, and mean free path of the
conduction electrons. The primary purpose of this paper is to examine in detail the behavior of the impedance of a film where the skin depth is about equal to
the film thickness, a region where asymptotic formulas
do not apply. Thus, a bridge is established between,
for example, the anomalous skin-effect and the sizelimited dc regions. The most important restrictions in
this treatment are that the conductor be metallic (i. e. ,
that the Fermi surface be spherical or nearly spherical), and that the frequency be low enough to make the
displacement-current and electron-relaxation effects
negligible. All of these conditions are usually met by
conductors in integrated circuits; the considerations of
this paper are relevant to the possible use of integrated
circuits at cryogenic temperatures, where the mean
free path may be equal to or greater than the classical
skin depth2 and/or the conductor thickness.
Z=l/at;
(1)
(2)
size-limited dc, 7
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where a denotes the conductivity of the metal. This expreSSion is exact, and applies for all values of tlo.
ANOMALOUS
SKIN EFFECT
SIZE-EFFECT LIMITED
D.C. RESISTANCE
4(1 )
(ljt)2
Z=:3 al In(llt);
(3)
(1)4/3
Z - -1(12)1/6(1)
- (1 + Y3i) - 4 7r2
al
o'
(4)
zl =1.46
(6a)
or
In the latter two expressions, as in the rest of this paper, we have assumed that any electron striking the
face of the film is scattered in a completely diffuse
(nonspecular) manner, as is suggested by direct measurement. Remarkably enough, the anomalous skineffect impedance is hardly changed in making the opposite assumption8 (of complete specularity), although
there is no longer any size effect for dc, 7 with the impedance given by (at)-1 irrespective of I. By convention,
an inductive reactance is a positive imaginary impedance.
aol zl
(6b)
The latter expression indicates that the impedance minimum is lower by a factor of 1.14 than the skin-effect
D.C. LIMIT
The classical limit applies to situations where the electron mean free path may be neglected. In this case
Ohm's law, J = aE, applies point by point throughout the
conductor.
Neglecting the displacement current, an analytic expression for the impedance per square is easily derived
in this limit:
z=
(5)
O. I L---'--'-'-.L.LLJ..J.l_-L-L--'-.JLLLJ...LL_---"------"---..L.L-'--LJuJ
0.01
0.1
10
8/t
FIG. 2. Magnitude of impedance per square in the classical
(small mean free path) limit. With the boundary conditions
chosen, current flows on both sides of the film in the skineffect limit, so that the impedance is half as large as that
associated with the surface of a semi-infinite conductor.
J. Appl. Phys., Vol. 43, No.7, July 1972
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2998
G.R. HENRY
50r----------,-----------.----------~
III
~ 40
II:
(!)
~ 30
N
\J..
20
(!)
'4rrl
<t
W
III
10
a.
0.1
10
SIt
The only essential complication introduced by consideration of nonzero mean free paths is that Ohm's law becomes effectively nonlocal. The current density at a
[E(r)])e-~/I dV
r
(7)
~ZI)E(Z')dZ"
(8)
with
K(u)
(9)
(11)
Equation (11) is a particularly simple type of integrodifferential equation; the method used for numerical
solution is indicated in the Appendix. Once the E field
has been determined, the impedance is easily computed;
it is simply
Z=E(O) [j/J(Z)dz}-l
(12)
Z= +[E (dE)-l]
,
Ii a
dz
(13)
.0=0
2999
1000
ANOMALOUS SKIN
EFFECT ASYMPTOTE
100
\
\~
'..:~-----II.I.=1/4
10
IV. CONCLUSIONS
.~
>''''''__-1=.1.
0.1
0.01
10
8/.1.
(a)
ANOMALOUS SKIN
EFFECT ASYMPTOTE
~,--_ _ _
I/.I.=2-IO
' ......
2rrj=w ~/l,
"\
."\.
(14)
l<o
2rrj=w ~/(lo)1/2,
(15a)
l>o.
(15b)
11.1.=2- 6
1~0~-6~~~~10~-5~~~~IOL-4~~~~IOL--3~~~10-2
8/.1.
(b)
(a)
~80,---~~----,-----,------,
ffiw 60r--.L.---------'~-----\,__
-.40
u.
~
~
if
20
?0-6
10-4
8/.1.
(b)
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3000
G.R. HENRY
(16)
= - 2'3
d 2g
lx2 =
PIt
1)2
[2
(til
2' 1)2 10
II
(17)
d 2f
lx2
(18)
(A2)
APPENDIX
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3001
Studies of the propagation of pulsed relativistic electron beams through initially un-ionized
background gases are reported. At very low pressures, pronounced beam front erosion occurs owing to the slow buildup of radial force neutralization of the beam electrons. Numerical simulation and an approximate analytical model are used to describe this beam-loss process. The results of experiments with two different electron accelerators (p/y ~ O. 05 and 1)
are shown to be in good quantitative agreement with the mathematical descriptions over the
pressure range of ~ 1 1.1 to ~ 1 Torr in a large variety of gases. Propagation characteristics
are found to scale in pressure from gas to gas inversely with the high-energy ionization
cross sections of the gases. The study shows that direct ionization alone is sufficient to explain the experimental results. The theoretical calculations indicate that the low-pressure
propagation characteristics of the lower JJ/Y beam are sensitive indicators of the beam's
transverse energy. The calculations also indicate that this is not the case for the higher
JJ/y beam.
I. INTRODUCfION
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