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Controlled crack arrest in brittle thin lms: The eect of embedded voids
Ling Liu, Xi Chen *
Department of Civil Engineering and Engineering Mechanics, Columbia University, 500 West 120th Street, New York, NY 10027-6699, USA
Received 3 April 2008; received in revised form 15 August 2008; accepted 17 August 2008
Available online 25 September 2008
Abstract
Controlled crack arrest is useful for controlling self-assembled crack paths in micro-fabrication, as well as limiting crack length in
toughening composites. Compliant inclusions and voids can eectively attract and arrest cracks, thereby controlling the crack pattern.
Analytical stress solution indicates that when the inclusion is about 10 times more compliant than its matrix, it may be eectively modeled as a void. The crack arrest capability is expressed in terms of the critical angle of the initial crack path, as the inclusion size, shape,
crack origin and lm properties are varied. Simple criteria are established to maximize the crack arrest ability and to determine the critical crack angle. The eectiveness of using dierent void patterns to arrest cracks is also explored. The results are useful for both controlling and restricting cracks in brittle thin lms, through the utilization of compliant or void-like inclusions as crack arrestors.
2008 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
Keywords: Thin lms; Fracture; Toughness; Kinetics self-organization & patterning; Simulation
1. Introduction
Thin lms are often subjected to residual stresses inherited from deposition and/or thermal expansion mismatch
with substrates. In many technologically important thin
lms, large equibiaxial tensile stress is developed as the system is cooled from an elevated deposition temperature or
as the lm is dried; when such tensile stress exceeds a critical value in brittle thin lms (e.g. NiAl lm on Si substrate
[1] or SiO2 lm on Si wafer [2]), fracture occurs and various
channel crack patterns have been observed [3], including
mud cracks [4], spiral cracks [5] and sinusoidal cracks [6].
Conventionally, cracks are regarded as a threat to system integrity and should be avoided if possible. However,
controlled fracture in thin lms may also be useful: in
recent years, mechanical self-assembly based on ordered
crack patterns has emerged as a competitive approach for
fabricating nanowires and nanochannels [2,710]. In
essence, various crack initiators and arrestors are embedded in a lm, whose shape and alignment are adjusted so
Corresponding author. Tel.: +1 212 854 3787; fax: +1 212 854 6267.
E-mail address: xichen@civil.columbia.edu (X. Chen).
1359-6454/$34.00 2008 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
doi:10.1016/j.actamat.2008.08.038
6215
6216
sa kua
E
1 veab vecc dab r0 dab
1 v2
where dab is the Kronecker delta. Assuming small deformation, the associated in-plane strain components are
ua;b ub;a
4
eab
2
Combining Eqs. (1)(4), the Navier equation for the elastic
problem can be written as
1
1
2
5
ua;bb
ub;ba ua
L
21 v
21 v
q
is introduced as a reference length that
where L Eh
k
could be used for normalization purposes, and it contains
important information of lm/substrate properties and
thus a critical variable governing the crack propagation.
According to Xia and Hutchinson [5], L is typically of
the same order as the lm thickness h.
The discretization of the eld equations using the
XFEM approach is similar to that described in Ref. [4],
except that an elastic substrate is considered in the present
paper instead of an elastic underlayer over a rigid substrate. The discretized governing equation takes the following form:
Ku f
Z
Z
k
T
B DBdX
BT BdX
K
h X
X
Z
f BT r0 dX
6
7
8
the crack extension path is determined following the maximum hoop stress law [18]
hp
2K II =K I
q
9
tan
2
2
1 1 8K II =K I
where hp denotes the angle between the last crack segment
and the new putative crack segment, KI and KII are the
mode I and mode II stress intensity factors at the crack
tip, respectively. Note that the crack propagation rule described in Eq. (9) is dimensionless and thus it does not
explicitly depend on the magnitude of the lm stress r0.
When results are expressed in dimensionless terms, as long
as we assume that r0 is suciently large or the lm is sufciently brittle, the magnitude of r0 would not aect the
crack path or the controlled crack arrest characteristics.
3. Fundamental stress solution for a circular compliant/void
inclusion
In essence, when an inclusion is embedded in a lm, the
stress eld near the inclusion is disturbed and such stress
concentration decays away from the inclusion. The local
stress eld exerts a large inuence on the path of a crack
passing nearby the inclusion and the crack tends to seek
a path that releases as much strain energy as possible. As
a rst step, it is important to understand the stress inuence
zone of an inclusion as well as its dependency on inclusion/
matrix materials and geometries. In order to take advantage of axisymmetry, we consider an isolated circular
inclusion of radius a embedded in an innite lm. The
shear lag model is used to describe the eect of substrate.
Youngs modulus is assumed to be E for the matrix and
Ei for the inclusion; the dierence in Poissons ratio is
neglected for simplicity. In addition, we assume the prestress in the lm layer is linearly related with the Youngs
modulus, i.e. the matrix and the inclusion are subjected
to equibiaxial stresses of r0 and r0Ei/E, respectively.
In a polar coordinate system where r is the radial coordinate, Eq. (5) becomes
ur;r
1
1
2 2 ur 0
10
ur;rr
r
r
L
for both inclusion and matrix, where u(r) denotes the radial
displacement. Correspondingly, the radial stress rR and the
hoop stress rH take the following forms, respectively:
i
e h
v
E
rR
ur;r ur e
11
r0
2
r
1v
e
ur
E
r0
vur
12
rH
;r e
1 v2 r
e and e
where E
r 0 equal to E and r0 outside the inclusion,
e and e
and E
r 0 equal to Ei and r0Ei/E inside the inclusion,
respectively.
We denote the displacement, radial stress, and hoop
stress within the inclusion (r 6 a) as ui, riR and riH, respectively, and the subscript i is dropped in the solution of eld
variables in the inclusion. The following boundary conditions are imposed: the displacement is zero at the center
of the inclusion, ui(0) = 0; both the radial stress and displacement should be continuous at the inclusionmatrix
interface, ui(a) = u(a) and riR(a) = rR(a); and the displacement remains zero at innity, u(1) = 0. By imposing these
constraints, the stress eld outside the inclusion is solved as
Ei 1
arI 1
aK 0
ar I 1
aK 1
ar vI 1
aK 1
ar
1
rQEi ;
a;r
Ei 1vI 1
aK 1
ar v
arI 1
aK 0
ar I 1
aK 1
ar
1
rH Ei ; a;r r0
rQEi ;
a;r
I 0
QEi ;a;r aI 1 aK 0 a I 1
aK 1
a vI 1
aK 1
a Ei a
aK 1
a
rR Ei ;a;r r0
Ei I 1 aK 1 a vEi I 1
aK 1
a
13
where
a a=L; r r=a; Ei Ei =E, and In(x) and Kn(x) denote the Bessel function of the rst kind and the Bessel
function of the second kind, respectively. It is readily seen
that both stress components are functions of the Youngs
modulus ratio Ei , the normalized inclusion radius a, and
the normalized radial coordinate r. As will be discussed later,
a a=L is also a critical factor controlling the crack arrest. In this section, we only focus on the inuence of the
stiness ratio between the two phases, so as to search for
a bound within which a compliant inclusion may be modeled as a void.
Fig. 2 plots the stress solutions for four Ei (0.5, 0.1, 0.01
and 0) and two representative a/L (1 and 10). Ei 0 is
intended to mimic a vacant inclusion (void). It is shown that
the normalized stress gets closer to 1 with larger Ei , indicating that a lower contrast between the two materials is closer
to the homogenous condition (since the lm stress should be
uniformly r0 if no mismatch presents between the inclusion
and the matrix). This limit can be derived from Eq. (13),
where both stress components equal to the far-eld stresses
1.5
6217
/ 0
1.0
Ei /E = 0.5 0.1
0.5
0.01
0
H, a/L=1
H, a/L=10
R, a/L=10
0.0
1.0
R, a/L=1
1.5
2.0
2.5
3.0
3.5
r/a
Fig. 2. The analytical stress eld outside a circular inclusion, when the
lm is subjected to equibiaxial tensile stress. Multiple material stiness
ratios Ei Ei =E are examined to explore the dependence of the stress eld
on the elastic mismatch ( Ei 0 represents a void inclusion). The results of
Ei 0:01 and Ei 0 almost overlap, indicating that with Ei < 0:01 a
compliant inclusion could be eectively modeled as a void.
6218
/ 0
1.0
0.5
R, a/L=1
R, a/L=10
H, a/L=1
H, a/L=10
R, a/L=3.16
R, a/L=1, numerical
H, a/L=3.16
H, a/L=1, numerical
0.0
1.0
1.5
2.0
2.5
3.0
3.5
r/a
Fig. 3. The analytical stress eld near a circular void embedded in a thin
lm. Numerical XFEM solutions for the case of a/L = 1 are shown in
squares. The arrows show the boundaries of the extended inuence zone
(ae/a) for crack arrest in various cases.
cr
d
d/a =
=
28
26
30
29
4
5
6
8
10
a/L =
0.1
1
3.16
10
100
O
Fig. 4. The crack paths in various conditions: (a). a/L = 1, d/a = 6 and h is varied to search for the critical angle hcr; (b). Critical cracks for a/L = 1 and
varying d/a show the inuence of crack origin; (c). Critical cracks for d/a =6 and varying a/L show the inuence of inclusion size.
d/a =
40
cr (degree)
4
5
6
8
10
50
cr
30
20
10
0
0.01
0.1
10
100
1000
a/L
Fig. 5. The variation of critical angle hcr as a function of a/L and d/a. A
sharp transition domain and two plateaus are found with respect to a/L.
6219
6220
ae
2.5
ae / a
ae
2.0
1.5
d
1.0
0.01
0.1
10
100
1000
a/L
Estimated cr
Origin of crack
Fig. 6. The extended inuence zone: (a). When the critical cracks in Fig. 4b (e.g. the green dash line shown here) are extended along their initial
orientations (e.g. the green solid line shown here), such extended lines are tangential to an extended inuence zone centered at the void center; (b). An
empirical method for determining hcr: from any crack origin, draw a line tangential to the extended inuence zone and another through the inclusion
center, and the angle between the two lines approximates the critical angle; (c). The variation of the size of the extended inuence zone (ae/a) with respect
to a/L.(For interpretation of color mentioned in this gure the reader is referred to the web version of the article.)
that other shapes of inclusions may result in better capabilities of crack arrest due to the stress singularity caused by
sharp structural features. Indeed, several other shapes of
inclusions were used in [2] although their advantages were
not explored experimentally.
In order to clarify this problem, for representative combinations of d/a and a/L, we compare the critical angle for a
circular void with those for square and heart-shaped inclusions. All inclusions have the same area, and d is measured
with respect to the geometrical center of inclusions. Results
of hcr are shown in Table 1. No prominent dierence is
observed among dierent shapes; the largest dierence in
an individual case is only about three degrees. For all cases
of d/a and a/L studied, it seems no particular shape could
be universally more eective than the other two. Moreover,
the conclusion holds even if the relative orientation of
Table 1
The dependence of the critical angle hcr on dierent shapes of inclusions
(a/L, d/a)
hcr
Inclusion shape
(10, 4)
(3.16, 4)
(1, 4)
(0.1, 4)
(1, 6)
(1, 8)
Circle
22
29
46
50
28
21
Square
21
31
45
51
29
22
Heart
23
30
44
53
29
21
Square
6221
Triangular
Random
Initial crack
orientation
Approximated
crack length
Fig. 7. The three patterns of inclusions and the evaluation of crack length
with the help of the extended inuence zone.
theless, such errors should be of the same order for all patterns under discussion, and thus the current approach
should still yield a qualitative ranking among the three
patterns.
In principle, the mean crack length varies with respect to
V and a/L. From the study on an individual void, a representative a/L = 1 is sucient for maximizing the crack
arrest probability and thus this value is xed. As V and
the void pattern are varied, Fig. 8 shows the results of
the mean and median crack length normalized by a.
Indeed, the two evaluation indexes not only give results
with dierent absolute values, but more importantly, also
rank the three patterns in distinct orders. According to
the index of mean crack length, the random pattern is superior in constraining crack length when V is lower than
about 5%; otherwise, regular patterns take over. When
the median index is adopted, however, the random pattern
turns out to be inferior to the other two patterns in all
ranges of V. These contrasting results, analyzed below, suggest that depending on the goal to be pursued for the crack
arresting system, dierent inclusion pattern may be chosen.
For example, for the sake of the system integrity, it may be
sometimes more desirable to limit the averaged length of all
possible cracks, or to control the possibility (e.g. 50%) of
letting the crack length to be below a certain threshold.
In order to more clearly reveal the mechanism, distribution maps of the normalized crack length are shown in
Fig. 9. Here, the x-axis represents various ranges of the
crack length, and the y-axis is their probability. Two cases
are investigated, one with lower V = 0.01 and the other
with higher V = 0.05. According to Fig. 8 and 9, the ranking of mean crack length among void patterns is distinct
when the volume fraction is changed. However, in terms
of the distribution of crack lengths, no signicant dierence
6222
due to the local non-uniformity of inclusions, the possibility of getting cracks of medium sizes increases for random
pattern, which could signicantly trade o its advantage
over regular patterns in long cracks. As shown in Fig. 8,
the random pattern yields longer median crack length
within the ranges of V studied in this paper. The median
of the regular patterns, on the other hand, is less sensitive
to a small number of very large values of crack lengths,
and thus the median may be employed a better reference
value than the average length (although the later is also
useful).
90
Mean, Triangular
Mean, Square
Mean, Random
60
30
0
Median, Triangular
Median, Square
Median, Random
40
20
6. Conclusion
0
0.00
0.02
0.04
0.06
0.08
0.10
High V, Random
High V, Triangular
High V, Square
Low V, Random
Low V, Triangular
Low V, Square
Distribution
0.9
0.8
0.2
0.1
0.0
0-20
0-80
20-40
40-60
60-80
8080-160
160-240
240-320
320-
Engineering
University.
and
6223
Engineering
Mechanics,
Columbia
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