INTRO

HPV is a major cause of cervical

cancer.
HPV16 and HPV18 are the most
high risk HPV.
IDE use to optimize the sensitivity
of the device due to the cervical
cancer detection.
The device will be more efficient
using surface modification of TiO 2
nanoparticles with APTES.
DNA probe and HPV target will
produce more sensitivity and
speed of the device due to their
properties.
PROBLEM STATEMENT
HPV and cervical cancer is very
close relationship to woman.
It more than 90% of cases.
This cancer must be prevented.
It was rarely to detect the cervical
cancer at earlier stage nowadays.
HPV16 and HPV18 are concerned
as the strongest factor of sexual
behaviour
in
increasing
malignancy.
People who test positive are
subsequently investigated with
diagnostic test and those who are
confirmed disease are offered
appropriate treatment and must
be follow-up.
Research scope:
To
functionalize
TiO2
nanostructure
during
surface
modification.
To understand and explore the
structural
and
electrical
characteristics
of
TiO2
nanostructure
for
DNA
immobilization and hybridization
detection.
To fabricate and characterize
aluminium IDE on the deposited

TiO2 thin film using lithography

method.
To
characterized
the
complementary
target
DNA
detection on aluminium IDE
coated with TiO2.

SUMMARY
Nanostructures
and
nanomaterials can be used
together
to
improve
the
flexibility, selectivity, and the
sensitivity of the device due to
high surface reaction.
APTES
will
be
better
functionalization
of
the
absorption mechanism on TiO2
nanoparticles based IDE devices
This system to be helpful for
medical application for cervical
cancer detection.
ABSTRAK
3-Aminopropyltrietoxysilane (APTES)
used as surface functionalization. The
DNA nanochip based interdigitated
electrode (IDE) has been proposed to
optimized the sensitivity of the
devices due to the cervical cancer
detection. The IDE devices will be
more efficient by using surface
modification of TiO2 nanoparticles
with APTES. TiO2 nanoparticles will be
preparing using sol gel method due to
low cost and high quality of dielectric
semiconductor interface. Furthermore,
APTES will gain a better
functionalization of the mechanism
absorption on IDE. The different of
APTES concentration were tested to
differentiate the time and the
concentration of APTES that suitable
for better sensitivity. The surface
functionalized for immobilizing the

DNA which is the combination of the

DNA probe and the HPV targaet
produce high sensitivity and speed
detection of IDE devices. The IDE
device has been characterized using
current-voltage (IV) characteristic,
Scanning Electron Microscope (SEM),
X-ray Diffraction (XRD), Energy
Dispersive X-ray spectroscopy (EDX)
and Field Emmision Scanning Electron
Microscopy (FESEM). This
functionalization of the surface
modification will be applicable,
sensitive, selective and low cost for
cervical cancer detection.
A sol mean a dispersion of the solid
particles (~0.1-1um) in a liquid where
only the Brownian motion suspend the
particles [6]. A gel is a condition where
liquid and solid are respectively
dispersed in each other which present
a solid network containing liquid
component

APTES
Surface modification is widely used in
biomedical application. Nanoparticles
were functionalized with singlestranded DNA (ssDNA). Silica used
because it surfaces chemistry and it
easy to functionalize the silica surface
and compatible the nanoparticles to
many application. Surface modification
with organosilane is also very
biocompatible with many material
include the silicon wafer, silica gel and
glass slide. Amine reaction is an
reactive group that able to combine
with amine-containing molecules are
by far the most common functional

group present on crosslinking or

modification reagents.
3-aminopropyltriethoxysilane (APTES)
used as adsorption reaction to the
immobilized an organic biomolecules
on the inorganic surface. APTES also
can be used to prevent DNA probes
become a positive charge due to
crosslink. DNA can be cross-linked by
ultraviolet irradiation to form covalent
bonds between thymide remain in the
DNA and positively charged amino
group added on the functionalized
slides.
These modifications meet several
criteria. To eliminate unwanted steric
interference from the support, there
have linkage that chemically stable
and hydrophilic enough to be freely
soluble in aqueous solution also not
generate non-specific binding support.
When
these
modifications
start
activated the surface, the efficiency of
attaching the oligonucleotide depends
largely on the chemistry used. It also
depend on how the oligonucleotide
targets are modified. Surfaces that
have been chemically modified with
an overall positive charge provide for
electrostatic
interactions
of
the
negatively charged, ssDNA molecule
with the surface. Then surface
modified to provide terminal amines
result in electrostatic attractive forces
between the positively charged amine
and the negatively charged of the
nucleic acid.
WAFER FAB

i) Wafer Preparation
The silicon wafer p-type is prepared
for this project. The wafer will be
clean with buffer oxide etch (BOE)

and deionized (DI) water to remove

the native oxide and contamination
from surface of the wafer. Then rinse
the wafer with DI water, the wafer
are then spin dry using spinner at
3000 rpm for 15 second. The clean
and rinse process should not have
delay.
ii) Oxidation
Oxidation Process is to grow a field oxide on
the wafer. This process will be done thermally
in a tube furnace at 1000 C in 60 minutes.
After 60 minutes, measure the thickness of the
oxide thickness of the wafer. The resist
thickness of the measurement has five points.
iii) Aluminium Deposition
Aluminium (Al) was deposited by
using sputter-coater. Thin aluminium
deposited on the pad area.
iv) PR coating
The photoresist was spin-coated on
the growth SiO2 wafer using spincoater. Speed of the spin-coater is
2500rpm within 30seconds. Then do
soft bake to dry the wafer on the hot
plate within 1 minute.
v) Exposure
The UV light was exposed on the photoresist.
The pattern from glass mask was directly
transferred on the photoresist.
vi) Development
After exposure, the resist is developed in the
RD6 developer for about 45 seconds. This will
remove the resist which was exposed to the
UV light.
vii) Hard Bake
To ensure the photoresist will stick when
placed in the oxide etch, hard bake was done
where the wafer placed on the hot plate within
1 minute.

viii) Aluminium Etch

Aluminium etching done by using
wet etching type. Figure 3.6 show
the IDE after aluminium etch
process.
ix) Spin-On-Acetone
The acetone use to strip the
unwanted photoresist. Figure 3.7
show the completed fabrication on
IDE.
x) Covering Silver on IDE Connection Pad
This process will be done before TiO 2
coating. The completed fabricated
IDE will be covering on the pad
connection to avoid that part coated
with TiO2.
RESULT
APTES can be used to prevent DNA
probes become a positive charge
due to crosslink. The HPV probe
forms a covalent due to a covalent
bond interaction while HPV target
hybridized with HPV probe from
hydrogen bond. A covalent bond is
much stronger and stable than
hydrogen
bond.
When
the
modifications have activated the
surface,
the
efficiency
of
oligonucleotide is modified with a
functional group that allows covalent
attachment to a reactive group on
the surface. Surface have been
chemically modified with an overall
positive
charge
provide
for
electrostatic reactions of negatively
charged,
single-stranded
DNA
molecule with the surface.

DNA probe showed higher than HPV

target because of the single-strand
of DNA probe had a free negative
charge that may increase the current
flow. That means, the current flow
will decrease when the hybridization
happens because of the net charge
between
complementary
of
nucleotides.

Future work
1. First, do the detection with clinical
sample for infected sample. The
infected sample from the clinical
can be used by using this IDE
device for detection level.
2. Before this the extraction clinical
sample was done separately. For

future work, this IDE device can

be combining with microfluidic.
So, the extraction will combine
with detection in one device. The
blood sample will drop one the
device, then microfluidic for
extraction purpose and the target
will hybridize with probe.
3. Besides that, this device may
combine
with
microarray.
Therefore, various strain of HPV
can be detect in one device.
These future works may lead to
fast and quantitative detection.
Plus, it may reduce cost for detect
the HPV infection.