Professional Documents
Culture Documents
Helium
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Fluoride
Hydrogen Iodide
Hydrogen Selenide
Methyl Fluoride
Methyltrichlorosilane
Nitrogen
Nitrogen Trifluoride
Nitrous Oxide
Octafluorocyclobutane
Oxygen
Perfluoropropane
Phosphine
Phosphorus Pentafluoride
Silane
Silicon Tetrachloride
Silicon Tetrafluoride
Sulfur Hexafluoride
Sulfur Tetrafluoride
Tetrafluoromethane
Trichlorosilane
Trimethylsilane
Tungsten Hexafluoride
Xenon
Arsenic
Boron Tribromide
Bis(tertiarybutylamino)silane
Trimethylvinylsilyl)hexafluoroacetylacetonato
Diethoxymethylsilane
Hafnium Tetrachloride
Antimony Trioxide
Octamethylcyclotetrasiloxane
Phosphorus Tribromide
Hydrofluoric Acid
Pentakis(dimethylamide)tantalum
Phosphorus Oxychloride
Red Phosphorus
1,1,1-Trichloroethane
Triethylborate
Tetrakis(diethylamino)titanium
Triethylarsenate
Triethyl Phosphate
Tetraethyl Orthosilicate
Titanium Tetrachloride
Trimethylborate
Trimethylphosphite
Trimethylphosphate
Tetramethylsilane
1,3,5,7-tetramethylcyclotetrasiloxane Dimethyldimethoxysilane
tris-t-pentoxysilanol
trans-1,2-dichloroethylene
Isopropanol
Hydrogen Peroxide
Ethanol
Methanol
Hydrochloric Acid
Sulfuric Acid
Nitric Acid
Gas ER, Aug 2005 E. Ngai
Pressure
Extreme Cold
Health
Toxicity
Corrosivity
Flammability
Reactivity
Oxidizing
Water Reactive
Asphyxiant
Pyrophoric
Explosive
Self Reacting
210 AC
Y Container
16 Liter
Size C
38 Liter
3 Liter
Size D1
8 Liter
Size D
7X
Liquid Containers
Bulk Supply
Trichlorosilane
Nitrogen Trifluoride
Ammonia
Silane
Hydrogen Chloride
Gas ER, Aug 2005 E. Ngai
Manufacturing
& Fill
Disposal
Customer Use
ER Is Considered
At Each Stage
Transportation
Ventilator
Non
Met
Sprinkler System
High Hazard
4
3 2
W
4
4 2
Analysis
Fire Separation
Wall, Concrete Block
Trichlorosilane Containers
210 AC & 38 Liter
MST Hydride
Gas Sensor
PHOSPHINE, MOCVD
PHOSPHI NE , MOCVD
PHOSPHI NE , MOCVD
EIT Acid
Gas Sensor
PHOSPHINE, MOCVD
PHOSPHINE, MOCVD
Cylinder Preparation
Gas ER, Aug 2005 E. Ngai
Storage
Emergency Response
Best Practices
Air Products has an extensive ER Program in place for
ESM products
Challenges
Operates 24/7
Also responsible for Global
Security
Crisis management
Goal is to connect caller and a
ER Coordinator within 5
minutes of the call
Call documentation
MSDS Source
3 Teams In
Taiwan
ERCVs Worldwide
5501 ERCV
5502 ERCV
Cold Coil
5503 ERCV
Ion Implant
Cascade System
Carriers
Leaking Cylinder
Cap
Gas ER, Aug 2005 E. Ngai
ER Bubbler
Portable ER
Scrubber
Other ER Equipment
1/4" Polypropylene
Tubing
Leaking Cylinder
Purge Gas
Cylinder
3/8" Copper
Tubing
1/4" Copper
Spare
Vacuum Line
Break
Check
Valve
3/8" Copper
Tubing
Check
Valve
Dilution Air
3/8" Copper
Tubing
Cold Coil
1/4" Copper
Gas
Portable
Detector Scrubber
Bubbler
Receiving
Cylinder
Hometown, PA
Shiwha, Korea
Shanghai, China
Osaka, Japan
Tuas, Singapore
Ulsan, Korea
Kulim, Malaysia
ER Trailers
Tualatin, OR & Santa Clara, CAa
ER Equipment Storage
All of the PPE and ER Equipment will
not fit on the ER Vehicle. A dedicated
storage area is used
Easy to maintain and inventory
Secure
Equipment is stored in climate
controlled conditions
Easy to grab and run
Shiwha, Korea
Shenzen, China
Shanghai, China
Gas ER, Aug 2005 E. Ngai