Professional Documents
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Introduction
Institute of
Microelectronic
Systems
Vdd
50
Vt
0.5
20
0.2
10
5
0.1
tOX
10
2005
2011
0.1 m
0.05 m
0.9-1.2 V
520 mm
0.5-0.6 V
2
750 mm
40 M
100 M
17.2 G
275 G
7-8
1
0.02
0.05 0.1
0.5 1
MOSFET channel length (m)
1: Introduction
Institute of
Microelectronic
Systems
1: Introduction
Institute of
Microelectronic
Systems
Interconnect
Passivation
Technology Requirements:
Inductive effects will become
increasingly important
Additional metal patterns or Global
ground planes for inductive
shielding
Thinner metallization
Lower line-to-line capacitance
Increasing pitch and
Intermediate
thickness at each
conductor level to alleviate
the impact of interconnect
delay
Local
Dielectric
Etch stop
layer
Dielectric
diffusion
barrier
Copper
conductor
with metal
barrier liner
Pre-metal
dielectric
Tungsten
contact
plug
Source: SIA Roadmap 1999
1: Introduction
Institute of
Microelectronic
Systems
1: Introduction
Institute of
Microelectronic
Systems
1: Introduction
Institute of
Microelectronic
Systems
Institute of
Microelectronic
Systems
1: Introduction
VHDL-Description
Gate-Level
Netlist
begin
delay_register:
process(reset,clk)
begin
if reset='1' then
x_q <= (others => '0');
elsif (clk'event and clk='1') then
x_q <= x_in;
end if;
end process;
RTL-Synthesis
(Synopsys)
Placement &
Routing
(Cadence/Mentor)
Production
ASIC
1: Introduction
Layout
Institute of
Microelectronic
Systems
Reuse, IP Cores
Design
Complexity
RTL
Synthesis
Gates
Polygons
1975
Design
Productivity
Masks
1980
1985
1990
1995
2000
1: Introduction
ASIC
(customer
specific)
Custom
Non-standard
IC
ASIP
(application
specific)
1: Introduction
Programmable
Institute of
Microelectronic
Systems
One or more
customised layers
All layers
customised
Integrated
Integratedcircuits
circuits
Analog
Analogand
and
Mixed
Mixedsignal
signal
Logic
Logic
Logic
Logic
Gate
Gatearrays
arrays
Cell
Cellbased
based
FPLDs
FPLDs
SoC
Other
Microcomponets
Microcomponents
Microprocessors
Microprocessors
Microcontrolers
Microcontrollers
Microperipherals
Microperipherals
Memory
Memory
DRAMs
DRAMs
SRAMs
SRAMs
Flash
Flash
Other
Other
1: Introduction
11
Services Broadband
Network
100Mb/sWLAN
RF
20Gop/s
WWW
Area Examples:
Multimedia
Mobile Communication
Automotive
...
1: Introduction
Java
Configurable
Multi-Standard
Info Plug...
<1 Watt
LAN
MPEG 4-7
100 Gop/s
5 Gtr/s
10 Watt
??
SoC
Institute of
Microelectronic
Systems
12
Conventional cellular
Phone Solution
1: Introduction
13
Oscillator
Filter
Mixer
Demodulator
Digital Baseband
AD/DA
Converter
Memory
Transmitter
Power
Amplifier
1: Introduction
CMOS
Logic
AD/DA
Converter
Oscillator
Filter
Institute of
Microelectronic
Systems
Mixer
Modulator
14