Scribd Logo
Upload

Welcome to Scribd!

  • Design and Fabrication of Ceramic Mems Gas Sensor: Abstract

    Uploaded by

    VasanthLogarajL
    10 views1 page
    This document summarizes the design and fabrication of ceramic MEMS gas sensors. It discusses how using MEMS technology can miniaturize gas sensor size and reduce power consumption. Ceramic materials and additive technologies allow sensors to operate at high temperatures up to 600°C while maintaining chemical stability. This overcomes limitations of traditional silicon technologies at high temperatures. The document demonstrates how silver, gold, and platinum nanoparticle inks can be used in inkjet and aerosol jet printers to fabricate narrow conductive lines and microheaters for sensors as small as 35 micrometers. Combining jet printing on thin ceramic substrates with laser cutting enables fabrication of advanced pulsing heating mode sensors.

    Original Description:

    proj

    Original Title

    batch 28

    Copyright

    © © All Rights Reserved

    Available Formats

    DOCX, PDF, TXT or read online from Scribd

    Did you find this document useful?

    Is this content inappropriate?

    Report this Document
    This document summarizes the design and fabrication of ceramic MEMS gas sensors. It discusses how using MEMS technology can miniaturize gas sensor size and reduce power consumption. Ceramic materials and additive technologies allow sensors to operate at high temperatures up to 600°C while maintaining chemical stability. This overcomes limitations of traditional silicon technologies at high temperatures. The document demonstrates how silver, gold, and platinum nanoparticle inks can be used in inkjet and aerosol jet printers to fabricate narrow conductive lines and microheaters for sensors as small as 35 micrometers. Combining jet printing on thin ceramic substrates with laser cutting enables fabrication of advanced pulsing heating mode sensors.

    Copyright:

    © All Rights Reserved
    Download as DOCX, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    10 views1 page

    Design and Fabrication of Ceramic Mems Gas Sensor: Abstract

    Uploaded by

    VasanthLogarajL
    This document summarizes the design and fabrication of ceramic MEMS gas sensors. It discusses how using MEMS technology can miniaturize gas sensor size and reduce power consumption. Ceramic materials and additive technologies allow sensors to operate at high temperatures up to 600°C while maintaining chemical stability. This overcomes limitations of traditional silicon technologies at high temperatures. The document demonstrates how silver, gold, and platinum nanoparticle inks can be used in inkjet and aerosol jet printers to fabricate narrow conductive lines and microheaters for sensors as small as 35 micrometers. Combining jet printing on thin ceramic substrates with laser cutting enables fabrication of advanced pulsing heating mode sensors.

    Copyright:

    © All Rights Reserved
    Download as DOCX, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    of 1

    DESIGN AND FABRICATION OF CERAMIC MEMS GAS SENSOR

    J.Sofia Jency Jhanet1 G.Soundarya 2

    soffiyajency@gmail.com soundaryagovind12@gmail.com

    Guided by:K.Sathesh, M.E.(Ph.D)( Assistant professor ECE)

    Department of electronics and communication engineering

    Tejaa shakthi institute of technology for women, coimbatore

    ABSTRACT:
    The application of MEMS technology for fabrication of gas sensor

    reduces the size of sensor. It is important for gas sensors to have low power consumption. This

    can be achieved with the combined usage of ceramic materials and additive technology. By this

    the sensors can withstand high temperature (upto 6000C) and have chemical stability at high

    temperature. Thus the disadvantages in traditional silicon technologies like limitations at high

    temperature can be avoided. The conductive silver, gold and platinum nano particles(10-

    30nm)inks usable in ink and aerosol jet printers and demonstrated the possibility to fabricate

    narrow conductive lines of microheaters and electrodes of sensors (line with~35m). The

    combination of jet printing onto thin ceramic substrate with laser cutting enables the fabrication

    of advanced sensors operating in pulsing heating mode.

    You might also like