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Article history: A numerical simulation study has been carried out to investigate the inuence of steady crucible rotation
Received 27 March 2015 on the LPD growth of SixGe1 x. Results reveal the effectiveness of suppressing natural convection driven
Received in revised form ows with the application of ampoule rotation. Improvement in the uniformity of radial composition of
19 August 2015
the growing crystal is predicted after two hours of growth for the remaining simulated growth period.
Accepted 24 August 2015
Further, a marginal reduction in the growth interface curvature due to crucible rotation is also observed
Dr. J.J. Derby
Available online 2 September 2015 in the results. Numerical computation shows the potential of crucible rotation as a viable alternative to
static magnetic eld in inhibiting buoyancy induced ows in the LPD growth of SixGe1 x.
Keywords: & 2015 Elsevier B.V. All rights reserved.
A2. Liquid phase diffusion
A1. Computer simulation
B1. Germanium silicon alloys
A2. Steady crucible rotation
1. Introduction growth, silicon is preferentially consumed from the melt into the
crystal because the solid state solubility of silicon in germanium is
SixGe1 x is an alloy semiconductor that is becoming increas- higher than its liquid state value and is replenished by a con-
ingly important for various applications primarily due to the tinuous supply of silicon from the source at the top. As growth
complete solid and liquid state miscibility exhibited by this system proceeds in the upward direction, the growth interface tempera-
[1]. However, an inherent difculty with this alloy system is the ture increases and results in an axially graded composition crystal
wide gap between solidus and liquidus lines in its phase diagram (details of the experimental process can found in [3]).
which makes the use of established melt growth techniques dif- It was numerically predicted in [4] that convection is quite
cult for growing uniform composition single crystals. Liquid strong in the early hours of growth after which the transport
phase diffusion (originally developed as a variant of multi-com- process becomes diffusion dominated. In the numerical work [5] it
ponent zone melting in [2]) is a solution growth technique that was shown that a static magnetic eld was effective in suppressing
has been successfully used to grow single crystals of this material the natural convection. This was followed by the experimental
[3]. The LPD experimental set up is comprised of a single crystal investigation [6] of the effect of a static magnetic eld on this
germanium seed, polycrystalline germanium solvent, and poly- growth system in which it was found that the growth rate gets
crystalline silicon source placed in a quartz crucible subjected to signicantly reduced in the presence of a static magnetic eld
which in turn was attributed to the change in the thermal eld.
an axial temperature gradient as shown in Fig. 1. Due to the
A numerical study was carried out in [7] to investigate the
imposed temperature gradient, the solvent material melts com-
effect of ampoule rotation on melt ow and dopant segregation in
pletely, forming the growth solution, the seed melts partially and
the vertical Bridgman growth of gallium-doped germanium. It was
the silicon source remains in the solid state due to its higher
found that ampoule rotation had a similar effect as that of an axial
melting point. The partially melted seed and molten solvent form
magnetic eld on this growth system and when the convection
the initial growth interface while the molten solvent and solid
was not very strong in the system it could be completely sup-
silicon form the dissolution interface. As more and more silicon
pressed [7]. On the downside, it was noted that it could lead to
dissolves into the solution, eventually the solution near the growth
larger radial dopant segregation in the case when convection was
interface saturates and growth commences in the upward direc- not fully suppressed [7]. In another numerical work [8] in this
tion because of the applied axial temperature gradient. During direction, it was concluded that steady ampoule rotation worsened
the radial segregation with a marginal improvement in the axial
n
Corresponding author. segregation in the vertical Bridgman growth of cadmium zinc
E-mail address: mssekhon@uvic.ca (M. Sekhon). telluride. The impact of crucible rotation incorporating the effects
http://dx.doi.org/10.1016/j.jcrysgro.2015.08.022
0022-0248/& 2015 Elsevier B.V. All rights reserved.
64 M. Sekhon, S. Dost / Journal of Crystal Growth 430 (2015) 6370
Fig. 1. Schematic description of the LPD system used. The growth interface (the Ge seedGe melt interface) is initially at the melting temperature of Ge. The computational
domain consists of the Si source, SiGe melt (initially Ge), Ge seed, and the vertical wall of the quartz ampoule.
of centrifugal force using a rotating frame of reference was carried constraints on time step size if these errors are to be made neg-
out in [9]. It was found that the ow damping effect of ampoule ligible. However, in the present simulation, the problem of arti-
rotation can become more effective by the inclusion of centrifugal cial mass source does not arise as Ansys Fluent makes use of the
force into the numerical analysis [9]. The contribution of ampoule space conservation law for computing grid ux rather than com-
rotation becomes increasingly important as rotational speed puting it directly from grid velocity [14].
increases and radial segregation can be reversed after the ow The location of the initial growth interface was identied with
transition [9]. The use of steady crucible rotation was found to be the help of an isotherm corresponding to the melting point of
effective in suppressing natural convection and attening the germanium. The mesh is made up of 4674, 1518, 656, 1002 quad-
growth interface in liquid encapsulated vertical gradient freeze rilateral elements in the melt, seed, source, and quartz regions
growth of InP [10]. In [11], the uniformity in radial composition respectively. To handle the pressure velocity coupling the PISO
was found to improve due to steady crucible rotation in the tra- algorithm [15] was utilized. A time step of 0.1 s was employed to
veling heater method growth of silicon germanium. The effect of carry out the simulation.
constant ampoule rotation in vertical Bridgman growth of multi- The numerical solution domain, as shown in Fig. 1, is comprised
crystalline silicon was studied numerically in [12] and radial seg- of the silicon source at the top, the SiGe melt in the middle, the
regation was found to deteriorate with crucible rotation. Ge-seed below, and the vertical wall of the quartz ampoule. It
In this work, we have carried out numerical simulations of the should be noted that some of the results presented in this work
liquid phase diffusion growth subjected to steady crucible rotation which were not directly accessible through the GUI of Ansys Fluent
at 15, 20, and 25 rpm with the objective of studying its effect on were obtained by creating appropriate user dened functions.
the natural convection driven ow and radial composition varia-
tion in the growing crystal. The results show the effectiveness of 2.1. Assumptions
ampoule rotation in suppressing buoyant ow, which is otherwise
strong during early hours of growth. Compositional uniformity in For carrying out the numerical simulations a number of sim-
the radial direction is found to improve after the rst two hours of plifying assumptions were made and are summarized as follows:
growth for the remaining simulated growth period with the
application of crucible rotation. Furthermore, interface curvature is Local thermodynamic equilibrium is assumed to exist at the
reduced by the usage of ampoule rotation. growth interface.
The SiGe melt is assumed to be a Newtonian and incompres-
sible uid.
2. Numerical simulation The melt density change is assumed to be small, and is
approximated in the momentum equation by using the well-
LPD like most crystal growth techniques involves a moving known Boussinesq approximation in terms of the thermal and
boundary which can be handled computationally using a xed solutal expansion coefcients.
grid or a moving grid approach. In this work, we have utilized the Dissolution interface is assumed to be xed because of the
dynamic grid approach implemented in Ansys Fluent by devel- extremely small silicon dissolution rate observed in the
oping various user-dened functions to move the mesh nodes. experiments (around 0.3 mm/day) [4]. Silicon concentration is
Details pertaining to the implementation of moving mesh simu- approximated using equilibrium composition at this assumed
lation in Ansys Fluent are explained in Section 2.3. xed dissolution interface instead of using the more accurate
The eld equations in this approach involve additional terms ux boundary condition. However, the authors believe that this
which account for grid motion and are in turn computed from the assumption should not signicantly affect the key ndings of
space conservation law [13]. It has been shown in the literature this comparative numerical simulation study.
[13] that if the space conservation law is not satised then it can Latent heat of solidication is neglected because of small
lead to creation of articial mass sources which can put additional growth rate.
M. Sekhon, S. Dost / Journal of Crystal Growth 430 (2015) 6370 65
The enthalpy of dissolution and the volume change associated Mass transport
with the dissolution process are neglected as silicon and ger-
d
manium form a nearly ideal mixture [16]. CdV + C n( u ug ) dS = D (nC ) dS
dt
Furnace heat transfer computation is not included in the V (t ) S (t ) S (t ) (4)
numerical model: instead, the temperature is prescribed along
the crucible wall. Although this represents an idealized
2.2.2. Solid phases
boundary condition the same boundary condition is used with
In the solid phases (namely, grown SiGe crystal, silicon source,
and without crucible rotation so it does not affect the key
and quartz ampoule wall) of the computational domain, the only
ndings of the present work.
eld equation is the energy balance. Mass transport in the grown
Soret and Dufour effects were not included in the numerical
crystal was not taken into account.
model.
In the grown crystal, the energy balance reads as follows:
Heat and mass uxes are given by the well-known Fourier's and
Fick's laws, respectively. d
TdV T nug dS = (nT ) dS
Variation of transport parameters with temperature during dt
V (t ) S (t ) S (t ) (5)
growth is neglected.
Mass diffusivity of silicon in the grown crystal is neglected in For the domains of the quartz wall and silicon solid source,
comparison to its value in the SiGe (initially Ge) melt. which do not have any moving boundaries, the energy balance
The growth system is considered axisymmetric, and so are the takes the following form:
eld equations of the liquid and solid phases.
d
Crucible rotation is initiated after partial melting of the seed is
dt
TdV = (nT ) dS
complete. V S (6)
2.2.1. Liquid phase In the discretized form the above equation reads [14]:
The liquid phase is the SiGe solution/melt (initially Ge melt). nf
V n+ 1 V n
The balance laws yield the following eld equations in the liquid = ug, j nj Sj
t j (8)
phase which are respectively known as Continuity, Momentum
Balance, Energy Balance and Mass Transport equations. These Thus the grid ux is computed as the volume swept by face
equations are written for a rotating frame of reference due to j over time step t [14].
which the centrifugal and Coriolis forces appear in the momentum In the above equations, is the density of the domain, n is the
balance. Moreover, the simulations with crucible rotation were exterior unit normal to the closed surface S enclosing volume V,
carried out using the model axisymmetric with swirl in Ansys u and ug represent the ow and grid velocities respectively, m is
Fluent, which essentially means that the tangential component of the dynamic viscosity, p is the pressure, T and C denote the
the velocity is non-zero although the gradients in the tangential thermal and solutal expansion coefcients respectively, g stands
for the gravity vector, is the angular velocity, r represents the
direction are zero [17]. Furthermore, the eld equations are pre-
radial position vector, T denotes temperature while C is the silicon
sented in the integral form for an arbitrary volume V(t) bounded
mass concentration in the melt, and Tref and Cref represent the
by a moving surface S(t) in the moving sub domains (crystal and
reference temperature (1211.87 K) and reference concentration,
melt) and an arbitrary volume V bounded by a surface S in the respectively. and D are the thermal and mass diffusivities of the
xed sub domains (source and quartz). melt, respectively. Superscript n and n 1 represent the current
and next time level, nf denotes the number of faces of a control
Continuity volume and t is the time step size.
decreases while that of the solid sub domain increases and this n
j i kij xmj
changing size of the liquid and solid sub domains is tackled by the x im + 1 = n
j i kij (13)
dynamic layering method [17] of Ansys Fluent as it can be used for
quadrilateral elements in a mesh. As per this method, the cell layer where superscript m indicates the mth iteration.
size in the solid sub domain is allowed to increase until the fol- From the known boundary node displacements the above
lowing condition is met [17]: iterative equation is solved for the interior mesh nodes until the
solution is converged, after which the node positions are updated
hmin > ( 1 + S ) hideal (9) as follows [17]:
where hmin is the minimum cell height in the cell layer adjacent to x in + 1 = x in + x iconverged (14)
the boundary, hideal is the ideal cell height and S is the split factor.
Once the above condition is satised, the cell layer is split using For the present simulation, a convergence tolerance of 10 5
either height based (cell layer is divided to create new cells of was used.
height hideal and h hideal) or ratio based option (cell layer is
divided in such a way that the ratio of the height of the new cells is 2.4. Boundary and initial conditions
S) [17]. Similarly, in the liquid sub domain the cell layer is com-
2.4.1. Concentration eld
pressed until condition given by Eq. (10) is met after which the cell
The wall of the quartz ampoule is considered impermeable, and
layer is merged with adjacent cell layer [17]. hence the mass balance yields the condition of zero-normal con-
hmin < C hideal (10) centration gradient on this boundary:
Table 1
Coefcients used to compute equilibrium compositions.
Coefcient aL bL cL dL eL
Value 5.72 10 2 1.49 10 4 7.48 10 7 1.84 10 9 2.21 10 12
Coefcient aS bS cS dS eS
Value 3.82 10 1 6.25 10 4 5.95 10 7 2.93 10 10 4.45 10 13
M. Sekhon, S. Dost / Journal of Crystal Growth 430 (2015) 6370 67
Along the outer wall of the quartz ampoule adjoining the seed and
melt region:
T = 1146.87 + 4000y (20)
(
kT = T 4 T 4amb ) (22)
T S T L
kS = kL
n n (24)
Table 2
Thermo-physical properties of the silicongermanium system.
and concentration gradients. However, in the beginning the sta- ampoule rotation starts improving the uniformity in the radial
bilizing effect due to the imposed concentration gradient is neg- composition which is due to the fact that the buoyancy induced
ligible as not enough silicon has dissolved into the melt and con- ow is strong only during the early growth hours and conse-
sequently natural convection is strong during early growth hours quently the ow inhibiting effect of crucible rotation is absent in
[4]. It is clear from Figs. 2b and 3b that with the application of later hours of growth. As the growth proceeds, the interface cur-
crucible rotation, the buoyancy induced ow is signicantly sup- vature increases (see Fig. 8a) and consequently an upward trend in
pressed near the growth interface. A sharp decrease in axial and the silicon composition in the radially outward direction is
radial components of the velocity with the application of crucible observed for the remaining simulated growth period. As growth
rotation can be readily observed in Fig. 4. The ow damping effect continues, ampoule rotation reduces the non-uniformity in the
of crucible rotation is also evident from Fig. 5 which shows that radial composition but is not able to achieve the desired outcome
the swirl velocity contours have straightened considerably for the of completely uniform radial composition. The reason for this can
examined range of rotational speeds. Furthermore, as expected be understood from Fig. 8bd which shows that the usage of
mass transport is slowed down with crucible rotation during early steady ampoule rotation does not completely eliminate the inter-
growth hours due to suppression of convection as can be observed face curvature. As a result, an upward trend in the radial compo-
from Fig. 6. sition is observed in Fig. 7be for all rotational speeds considered.
The radial composition of the simulated crystal growth for It can also be inferred from Fig. 7 that increasing the rotational
speed does not lead to any further signicant improvement in the
various crucible rotation rates at different growth times is depicted
in Fig. 7. As can be seen from Fig. 7a with the application of cru-
cible rotation, there is not much gain in terms of uniformity in
radial composition till two hours of growth, in fact there is a slight
increase in the non-uniformity during this period. This can be
attributed to the fact that the ampoule rotation suppresses the
natural convective ow which results in poor mixing in the radial
direction and in turn leads to slightly larger compositional non-
uniformity in the radial direction. After two hours of growth,
Fig. 6. Contours of concentration (% atm) after 1.5 hour of growth time (con-
Fig. 4. Maximum absolute axial and radial velocity components near growth centration contour interval (cmax -cmin)/20) at a) 0 rpm (cmax 5.47, cmin 0.037)
interface at various rotation rates. b) 20 rpm (cmax 5.47, cmin 0.002).
Fig. 5. Contours of swirl velocity (m/s) after 1 h of growth time (swirl velocity contour interval v,max/20) at (a) 15 rpm (v,max 1.96 10 2), (b) 20 rpm
(v,max 2.62 10 2) and (c) 25 rpm (v, max 3.27 10 2).
M. Sekhon, S. Dost / Journal of Crystal Growth 430 (2015) 6370 69
Fig. 7. Radial composition plots for various rotational rates at different growth times.
Fig. 8. Interface evolution plot from t 3 h to t 19 h with a time interval of four hours at (a) 0 rpm, (b) 15 rpm (c) 20 rpm and (d) 25 rpm.
70 M. Sekhon, S. Dost / Journal of Crystal Growth 430 (2015) 6370
4. Conclusion
Acknowledgment
Fig. 10. Axial silicon composition along the centreline for various rotational rates.
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