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Yusaku FUJII
Gunma University
Dynamic Calibration
Static Calibration
Reference Force = Gravitational Force M Mg
Dynamic Calibration
[A] Impact Force: Fujii (Gunma Univ.), Kobusch, Bruns (PTB)
Force: F
Rigid object Optical
(Mass: M) Interferometer
F=Ma
Small friction
Gravity:
Mg
Cut-away view of the bearing
Moving part
(partially cut away)
Air supply tube
Air
supply
Air inlet
Air outlet
Guideway Air passage channel
(partially cut away) (grooved on the moving part)
Solid figure of the mechanical part
Ba Damper
se
Ad
dit
Gu ion
ide al
wa m as CC
y s
Force transducer M
under test ov
ing
pa
rt
Photograph of the mechanical parts
Force Transducer
(SYOWA DB-200N)
Damper
Additional
mass
Moving
Guideway part
Setup for Impact Force Calibration
fbeat frest
Reference
beam CC
Amplifier PD
Signal Glan
beam -Thompson
prism
Moving
part He-Ne laser
Base PBS
Damper Guideway
Force Transducer
under test
Data Processing Procedure
4.0
Fbeat /GHz
3.0 Frequency
2.0
1.0
0.000
-0.020
-0.100 0.000 0.020 0.040 0.060 0.080
-0.200
-0.300 Velocity
-0.400
30.000
= d v /dt
25.000 Acceleration
20.000
/ms-2
15.000
10.000
5.000
0.000
-0.020
-5.000 0.000 0.020 0.040 0.060 0.080
T /s Finertial = M
120.0
100.0
Inertial force
Finertial /N
80.0
60.0
40.0
20.0
0.0
-0.020
-20.0 0.000 0.020 0.040 0.060 0.080
T /s
Response against Impact force
Setup for Oscillation Force Calibration
fbeat frest
CC
PD
Amplifier Guideway
Ref. beam Glan
-Thompson
prism
Sig. beam
He-Ne laser
Moving PBS
part
Base
Spring
Hammer
Force Transducer with damper
under test
Response against Oscillation force
Setup for Step Force Calibration
Ma = -Mg + Fmass
Fmass = Ma + Mg
Response against Step force
Uncertainty Evaluation
Major uncertainty sources:
(1) Acceleration measurement using optical interferometer
The uncertainty in acceleration measurement when the sampling interval is
approximately 0.2 ms is estimated to be approximately 1 N in the described 3 types of
measurements.
(2) Mass measurement of the moving part
The relative uncertainty in measuring the mass using a commercial electric balance is
usually better than 0.01 %. This is negligible.
(3) Effect of the external force
For the external force acting on the moving part, the frictional force acting inside the
pneumatic linear bearing is dominant under the condition that the air film of
approximately 8 m thickness inside the bearing is not broken. This is estimated to be
negligible under the usual conditions.
The above estimates imply that the uncertainty in determining the instantaneous
value of the force in the described 3 types of measurements is estimated to be
approximately 1 N. This corresponds to be approximately 1 % of the maximum
value of the typical applied force of approximately 100 N.
Future Prospects
Means for integrating the various calibration methods
and appropriate sets of parameters for describing the
dynamic characteristics of general transducers will be
strongly required.