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Cliff Schuring
Quantum Focus Instruments
Vista, California, USA
cliff@quantumfocus.com, Phone:760 599 1122
Abstract packaging materials so that the marking laser can not reach
the die surface, such as removing the glass spheres. However,
Damage to encapsulated integrated circuits has recently been any change to the existing packaging methodology would
reported due to Laser marking of the package. A method to have a significant impact on the technology. New material
assess the risk of such damage is presented. The method is an and process development as well as requalification of any
analytical technique using Thermally Induced Voltage changes represent a major effort.
Alteration (XIVA) and Optical Beam Induced Current (OBIC)
imaging. Details of the Damage Mechanism
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Figure 6: Light transmission image of the layer of mold
compound over the die observed in a microscope in the back
lighted mode. The bottom of the package and die were
removed by parallel polishing. The bright band at the bottom
is a region where larger glass spheres collected due to the
filtering action of the closely spaced bond wires. (10 X
Figure 5: XIVA image of the same sample as in figures 3 and magnification.)
4 after all of the mold compound above the die was removed.
This indicates all possible XIVA sites. (5X objective lens.) This examination method can be an alternate to the OBIC and
XIVA methods, but it requires more sample preparation time
It was initially assumed that the locations of the optical paths and is destructive. However, because it does not require a
through the mold compound would be randomly distributed. laser scanning microscope it can be useful for a laboratory that
And that the probability of the vertical alignment of several is equipped with standard metallurgical equipment.
large glass spheres would be determined by random statistics.
The distribution of particle sizes was examined over the area Discussion
of the die in the X-Y plane and at several vertical planes The conditions can sometimes exist where a thin layer of
above the die surface. This revealed a non random epoxy is present between the glass spheres that will obscure
distribution. Then a sample of the total thickness of mold the OBIC laser. Even the XIVA laser power may be
compound covering the die was prepared by removing the die inadequate to ablate this layer, yet the marking laser may
by parallel polishing from the backside of the package. This ablate it and allow an optical path to the die. This can result
layer of isolated mold compound was examined for optical in a false negative result for the OBIC/XIVA examination.
transmission by observing it in a microscope in the back However, since this is a statistically random phenomenon the
lighted mode. This produced an image showing total light false negative events can be mitigated with an adequate
transmission and distribution over the area of the die. This sample size.
revealed greater optical transmission near the wires where
larger glass spheres collected. Refer to figure 6. For many products the last step in the manufacturing process
is laser marking of the package. This means that final test is
Studies of size distribution of the glass spheres revealed that usually conducted before laser marking, so there is no monitor
the physical structures in the I.C. package act as filters to the for laser marking damage. Also, new integrated circuit
various sizes and large glass spheres can selectively collect at processes can be more sensitive to the laser marking energy.
specific locations. For example, the loops in the wires that Another case not addressed in this paper is the scenario where
extend above the die surface will allow particles smaller than the laser marking is performed directly on the back of the
the wire pitch to pass between them, whereas the larger silicon die.
particles are impeded from passing between them. Therefore,
large particles tend to collect near one side of the wires It was mentioned earlier in this paper that package was
depending on the direction of the flow of the mold compound prepared for laser injection by polishing the top of the
during injection into the mold. This results in a much higher package down to the depth of the normal laser marking
probability of vertically aligned large glass spheres in these ablation. This polishing produces a flat surface on many of
locations. Vertical alignment would not be expected at certain the glass spheres which does not represent the conditions
locations if they were randomly distributed. produced during laser marking where the glass particles
remain spherical. So the polished samples afford a more
favorable optical coupling interface than a full thickness
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package and thus can be considered to be a more conservative
model. The laser acceptance angle of the spherical surface
with respect to a path that will reach the die surface is much
less.
Conclusions
It has been shown that the techniques of XIVA and OBIC can
effectively detect the existence and location of optical paths
through the mold compound above the die surface for plastic
encapsulated packages. These techniques are not 100%
effective because not all locations on a given die produce a
response to those stimuli. But if a reasonable sample size is
used and these techniques show no evidence of light
transmission to the die the confidence level can be considered
very high.
References
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