Professional Documents
Culture Documents
Disadvantages
Diffusion is limited to solid solubility and it is a high-temperature process
Drive-in
1050C - 1200C
No dopant source
Push dopants deeper into substrate
How does increasing doping level affect carrier mobility?
It decreases mobility
What is the purpose of the exposure system in the lithography process?
To produce the sharpest aerial image possible
What is the purpose of the resist in the lithography process?
To capture or retain the aerial image and reproduce it as faithfully as possible
What is the purpose of the yellow lighting in the section of the clean room where lithography is
performed?
Prevents exposure after photoresist application
Aspect Ratio
Photoresist Thickness/Photoresist Width (T/W)
What are the primary photoresist components?
1) Inactive resin
2) Photoactive Compound (PAC)
3) Solvent
What happens during exposure for a positive resist?
1) PAC undergoes photodecomposition and creates keto-carbene
2) Keto-carbene decomposes to form a more stable ketene structure
3) Ketene reacts with water from the air to form a carboxylic acid
What can be said about a resist profile with high contrast?
It is very steep/sharp/vertical
Will a resist aerial image have a maximum or a minimum in the exposed areas of the resist?
Maximum
Define MTF
Modulation Transfer Function: (Imax - Imin)/(Imax + Imin) is a measure of how high the humps
of a aerial image are relative to total intensity.
Define CMTF
Critical Modulation Transfer Function: (Qf-Qo)/(Qf+Qo) where Qf=Exposure dose at which resist
has completed faded and Qo=Exposure dose at which resist starts to fade
If MTF<CMTF, can the resist resolve the image?
No, MTF must be greater than CMTF
An exposure system tries to maximize the resolution in order to do what?
Produce the sharpest aerial image
An exposure system tries to maximize the throughput to do what?
Cycle through the most wafer levels per hour
The primary effect limiting resolution in exposure systems is what?
Diffraction
What are the three basic methods of exposure?
1) Contact Aligner
2) Proximity Aligner
3) Projection Aligner/Stepper
What is the purpose of immersion lithography?
Immersion lithography improves depth of focus without decreasing the NA of the lens
What is the biggest problem with decreasing fabricated devices to sizes below 5nm?
Quantum Effects: e.g. electrons are hard to control at this size and tunneling can occur
What is a viable solution to the impending constraints on device size? In other words, how can
we fit more devices in a unit of area without further decreasing the size of the devices?
Chip Stacking
Do wet etch pattern transfer processes involve chemical or physical etching?
Chemical (acids and bases)
Lift-off Steps
1) Photoresist Layer Deposited and given retrograde profile
2) Deposition of metal performed
3) Photoresist with deposited metal on it "lifted off" with solvent soak leaving behind the metal
deposited on retrograde indentation.
Dry etching generally relies on some type of ____________ or beam of reactive species.
Plasma
Isotropic Etch
Horizontal Etch Rate = Vertical Etch Rate
Anisotropic Etch
Vertical Etch Rate > Horizontal Etch Rate
Totally Anisotropic Etch
Horizontal Etch Rate = 0
Etch Bias
Degree to which linewidth increases due to etching process
What is the difference between etch bias and anisotropy?
Anisotropy pertains the relationship between the horizontal/vertical etch RATES while etch bias
pertains to the relationship between the horizontal/vertical etch LINEWIDTHS
Why is it better to over-etch than under-etch?
Under-etching and leaving silicon glass/BSG on a wafer can cause devices to not work properly
or at all. Over-etching will typically not harm the devices and will ensure the device is fully
etched.
What is the purpose of RCA-1 vs. RCA-2
RCA-1 removes surface organic residue