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Vibrating structure gyroscope

A vibrating structure gyroscope, defined by the IEEE as a Coriolis vibratory gyroscope (CVG),[1] is a
gyroscope that uses a vibrating structure to determine the rate of rotation. A vibrating structure gyroscope
functions much like the halteres of flies (insects in the order Diptera).

The underlying physical principle is that a vibrating object tends to continue vibrating in the same plane even
if its support rotates. The Coriolis effect causes the object to exert a force on its support, and by measuring
this force the rate of rotation can be determined.

Vibrating structure gyroscopes are simpler and cheaper than conventional rotating gyroscopes of similar
accuracy. Inexpensive vibrating structure gyroscopes manufactured with MEMS technology are widely used
in smartphones, gaming devices, cameras and many other applications.

Contents
Theory of operation
Implementations
Cylindrical resonator gyroscope (CRG)
Piezoelectric gyroscopes
Tuning fork gyroscope
Wine-glass resonator
Vibrating wheel gyroscope
MEMS gyroscopes
Applications of CVG gyroscopes
Automotive
Entertainment
Hobbies
Industrial robotics
Photography
Spacecraft orientation
Other
References
External links

Theory of operation
Consider two proof masses vibrating in plane (as in the MEMS gyro) at frequency . The Coriolis effect
induces an acceleration on the proof masses equal to , where is a velocity and is an angular
rate of rotation. The in-plane velocity of the proof masses is given by , if the in-plane position
is given by . The out-of-plane motion , induced by rotation, is given by:

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where

is a mass of the proof mass,

is a spring constant in the out of plane direction,
is a magnitude of a rotation vector in the plane of and perpendicular to the driven
proof mass motion.

By measuring , we can thus determine the rate of rotation .

Implementations

Cylindrical resonator gyroscope (CRG)

This type of gyroscope was developed by GEC Marconi and Ferranti in the 1980s using metal alloys with
attached piezoelectric elements and a single-piece piezoceramic design. Subsequently, in the 90s, CRGs with
magneto-electric excitation and readout were produced by American-based Inertial Engineering, Inc. in
California, and piezo-ceramic variants by Watson Industries. A recently patented variant by Innalabs uses a
cylindrical design resonator made from Elinvar-type alloy with piezoceramic elements for excitation and
pickoff at its bottom.

This breakthrough technology gave a substantially increased product life (MTBF > 500,000 hours); with its
shock resistance (>300G), it should qualify for "tactical" (mid-accuracy) applications.

The resonator is operated in its second-order resonant mode. The Q-factor is usually about 20,000; that pre-
determines its noise and angular random walks. Standing waves are elliptically-shaped oscillations with four
antinodes and four nodes located circumferentially along the rim.

The angle between two adjacent antinode – nodes is 45 degrees. One of the elliptical resonant modes is
excited to a prescribed amplitude. When the device rotates about its sensitive axis (along its inner stem), the
resulting Coriolis forces acting on the resonator’s vibrating mass elements excite the second resonant mode.
The angle between major axes of the two modes is also 45 degrees.

A closed loop drives the second resonant mode to zero, and the force required to null this mode is
proportional to the input rotation rate. This control loop is designated the force-rebalanced mode.

Piezo-electric elements on the resonator produce forces and sense induced motions. This electromechanical
system provides the low output noise and large dynamic range that demanding applications require, but
suffers from intense acoustic noises and high overloads.

Piezoelectric gyroscopes
A piezoelectric material can be induced to vibrate, and lateral motion due to Coriolis force can be measured to
produce a signal related to the rate of rotation.[2]

Tuning fork gyroscope

This type of gyroscope uses a pair of test masses driven to resonance. Their displacement from the plane of
oscillation is measured to produce a signal related to the system's rate of rotation.

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F.   W. Meredith registered a patent for such a device in 1942 while working at the Royal Aircraft
Establishment. Further development was carried out at the RAE in 1958 by G.H. Hunt and A.E.W. Hobbs,
who demonstrated drift of less than 1°/h or (2.78 × 10−4)°/s.[3]

Modern variants of tactical gyros use doubled tuning forks such as those produced by American manufacturer
Systron Donner in California and French manufacturer Safran Electronics & Defense / Safran Group.[4]

Wine-glass resonator
Also called a hemispherical resonator gyroscope or HRG, a wine-glass resonator uses a thin solid-state
hemisphere anchored by a thick stem. The hemisphere with its stem is driven to flexural resonance and the
nodal points are measured to detect rotation. There are two basic variants of such a system: one based on a
rate regime of operation ("force-to-rebalance mode") and another variant based on an integrating regime of
operation ("whole-angle mode"). Usually, the latter one is used in combination with a controlled parametric
excitation. It is possible to use both regimes with the same hardware, which is a feature unique to these
gyroscopes.

For a single-piece design (i.e., the hemispherical cup and stem(s) form a monolithic part) made from high-
purity quartz glass, it is possible to reach a Q-factor greater than 30-50 million in vacuum, so the
corresponding random walks are extremely low. The Q is limited by the coating, an extremely thin film of
gold or platinum, and by fixture losses.[5] Such resonators have to be fine-tuned by ion-beam micro-erosion of
the glass or by laser ablation. Engineers and researchers in several countries have been working on further
improvements of these sophisticated state-of-art technologies.[6]

Safran and Northrop Grumman are the major manufacturers of HRG.[7][8]

Vibrating wheel gyroscope

A wheel is driven to rotate a fraction of a full turn about its axis. The tilt of the wheel is measured to produce a
signal related to the rate of rotation.[9]

MEMS gyroscopes
Inexpensive vibrating structure microelectromechanical systems (MEMS) gyroscopes have become widely
available. These are packaged similarly to other integrated circuits and may provide either analog or digital
outputs. In many cases, a single part includes gyroscopic sensors for multiple axes. Some parts incorporate
multiple gyroscopes and accelerometers (or multiple-axis gyroscopes and accelerometers), to achieve output
that has six full degrees of freedom. These units are called inertial measurement units, or IMUs. Panasonic,
Robert Bosch GmbH, InvenSense, Seiko Epson, Sensonor, STMicroelectronics, Freescale Semiconductor, and
Analog Devices are major manufacturers.

Internally, MEMS gyroscopes use lithographically constructed versions of one or more of the mechanisms
outlined above (tuning forks, vibrating wheels, or resonant solids of various designs, i.e., similar to TFG,
CRG, or HRG mentioned above).[10]

MEMS gyroscopes are used in automotive roll-over prevention and airbag systems, image stabilization, and
have many other potential applications.[11]

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Applications of CVG gyroscopes

Automotive
Automotive yaw sensors can be built around vibrating structure gyroscopes. These are used to detect error
states in yaw compared to a predicted response when connected as an input to electronic stability control
systems in conjunction with a steering wheel sensor.[12] Advanced systems could conceivably offer rollover
detection based on a second VSG but it is cheaper to add longitudinal and vertical accelerometers to the
existing lateral one to this end.

Entertainment
The Nintendo Game Boy Advance game WarioWare: Twisted! uses a piezoelectric gyroscope to detect
rotational movement. The Sony SIXAXIS PS3 controller uses a single MEMS gyroscope to measure the sixth
axis (yaw). The Nintendo Wii MotionPlus accessory uses multi-axis MEMS gyroscopes provided by
InvenSense to augment the motion sensing capabilities of the Wii Remote.[13] Most modern smartphones and
gaming devices also feature MEMS gyroscopes.

Hobbies
Vibrating structure gyroscopes are commonly used in radio-controlled helicopters to help control the
helicopter's tail rotor and in radio-controlled airplanes to help keep the attitude steady during flight. They are
also used in multirotor flight controllers, since multirotors are inherently aerodynamically unstable and
cannot stay airborne without electronic stabilization.

Industrial robotics
Epson Robots uses a quartz MEMS gyroscope, called QMEMS, to detect and control vibrations on their
robots. This helps the robots position the robot end effector with high precision in high speed and fast-
deceleration motion.[14]

Photography
Many image stabilization systems on video and still cameras employ vibrating structure gyroscopes.

Spacecraft orientation
The oscillation can also be induced and controlled in the vibrating structure gyroscope for the positioning of
spacecraft such as Cassini-Huygens (https://web.archive.org/web/20050822220313/http:
//www2.jpl.nasa.gov/basics/bsf11-2.html).[15] These small Hemispherical resonator gyroscopes made of
quartz glass operate in vacuum. There are also prototypes of elastically decoupled cylindrical resonator
gyroscopes (http://www.stcu.int/documents/reports/distribution/tpf/MATERIALS
/Sapphire_Gyro_Sarapuloff_ATSU.pdf)(CRG)[16][17] made from high-purity single-crystalline sapphire. The
high-purity leuko-sapphire have Q-factor an order of value higher than quartz glass used for HRG, but this
material is hard and has anisotropy. They provide accurate 3 axis positioning of the spacecraft and are highly
reliable over the years as they have no moving parts.

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Other
The Segway Human Transporter uses a vibrating structure gyroscope made by Silicon Sensing Systems to
stabilize the operator platform.[18]

References
1. IEEE Std 1431–2004 Coriolis Vibratory Gyroscopes.
2. "NEC TOKIN's ceramic piezo gyros" (http://www.nec-tokin.com/english/product/piezodevice2
/ceramicgyro.html). Retrieved May 28, 2009.
3. Collinson, R.P.G. Introduction to Avionics, Second edition, Kluwer Academic Publishers: Netherlands,
2003, p.235
4. "Sagem Défense Sécurité : MARCHÉS / PRODUITS - Systèmes Avioniques & Navigation - Navigation"
(https://web.archive.org/web/20071016120420/http://www.sagem-ds.com/fra/site.php?spage=02010306).
archive.org. October 16, 2007. Archived from the original (http://www.sagem-ds.com
/fra/site.php?spage=02010306) on October 16, 2007. Retrieved September 27, 2016.
5. Sarapuloff S.A., Rhee H.-N., and Park S.-J. Avoidance of Internal Resonances in Hemispherical
Resonator Assembly from Fused Quartz Connected by Indium Solder //Proceedings of the 23rd KSNVE
(Korean Society for Noise & Vibration Engineering) Annual Spring Conference. Yeosu-city, April 24–26,
2013. – P.835-841.
6. Sarapuloff S.A. 15 Years of Solid-State Gyrodynamics Development in the USSR and Ukraine: Results
and Perspectives of Applied Theory //Proc. of the National Technical Meeting of Institute of Navigation
(Santa Monica, Calif., USA. January 14–16, 1997). – P.151-164.
7. "Chanakya Aerospace Defence & Maritime Review" (http://www.chanakyaaerospacedefence.com
/newsdetails.aspx?Nid=6415). www.chanakyaaerospacedefence.com.
8. http://www.northropgrumman.com/Capabilities/HRG/Documents/hrg.pdf
9. "Inertial Sensors – Angular Rate Sensors" (http://www.hsg-imit.de/index.php?id=41&L=1). Retrieved
May 28, 2009.
10. Bernstein, Jonathan. "An Overview of MEMS Inertial Sensing Technology" (http://www.sensorsmag.com
/sensors/acceleration-vibration/an-overview-mems-inertial-sensing-technology-970), Sensors Weekly,
February 1, 2003.
11. Cenk Acar, Andrei Shkel. "MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness"
(https://books.google.com/books?id=WgFPvZyApd0C). 2008. p. 8 section "1.5 Applications of MEMS
Gyroscopes".
12. "The Falling Box (Video)" (https://web.archive.org/web/20110723155042/http://dl3.interlake.net/shared
/wm/M225693_20071211_153047/ESPerience/uk/the_falling_box.wmv). Archived from the original
(http://dl3.interlake.net/shared/wm/M225693_20071211_153047/ESPerience/uk/the_falling_box.wmv) on
July 23, 2011. Retrieved July 1, 2010.
13. "InvenSense IDG-600 Motion Sensing Solution Showcased In Nintendo's New Wii MotionPlus
Accessory" (https://web.archive.org/web/20090417021633/http://invensense.com/news/071508.html)
(Press release). InvenSense. July 15, 2008. Archived from the original (http://www.invensense.com
/news/071508.html) on April 17, 2009. Retrieved May 28, 2009.
14. "Epson Quartz Crystal Device – About QMEMS" (http://www5.epsondevice.com/en/quartz/aboutus
/qmems/index.html). Retrieved March 12, 2013.
15. Jet Propulsion Laboratory, "Cassini Spacecraft and Huygens Probe," pg. 2, https://saturn.jpl.nasa.gov
/legacy/files/space_probe_fact.pdf

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16. Sarapuloff S.A. High-Q Sapphire Resonator of Solid-State Gyroscope CRG-1 – In book: 100 Selected
Technologies of Academy of Technological Sciences of Ukraine (ATS of Ukraine). Catalogue. –
Published by STCU (Science & Technological Council for Ukraine). Kyiv. http://www.stcu.int/documents
/reports/distribution/tpf/MATERIALS/Sapphire_Gyro_Sarapuloff_ATSU.pdf
17. Sarapuloff S. A., Lytvynov L.A., et al. Particularities of Designs and Fabrication Technology of High-Q
Sapphire Resonators of CRG-1 Type Solid-State Gyroscopes //XIVth International Conference on
Integrated Navigation Systems (May 28–30, 2007. St.-Petersburg, RF.). – St.-Petersburg. The State
Research Center of Russia – Central Scientific & Research Institute "ElektroPribor". RF. 2007. – P.47-48.
18. Steven Nasiri. "A Critical Review of MEMS Gyroscopes Technology and Commercialization Status"
(https://web.archive.org/web/20101206122853/http://invensense.com/mems/gyro/documents
/whitepapers/MEMSGyroComp.pdf) (PDF). Archived from the original (http://www.invensense.com
/mems/gyro/documents/whitepapers/MEMSGyroComp.pdf) (PDF) on December 6, 2010. Retrieved
July 1, 2010.

External links
Proceedings of Anniversary Workshop on Solid-State Gyroscopy (May 19–21, 2008. Yalta, Ukraine). -
Kyiv-Kharkiv. ATS of Ukraine. 2009. - ISBN 978-976-0-25248-5. See also the next meetings at:
International Workshops on Solid-State Gyroscopy [1] (https://www.facebook.com/pages/International-
Workshops-on-Solid-State-Gyroscopy/135430619833718).
Silicon Sensing – Case Study: Segway HT (http://www.siliconsensing.com/index.jsp?articleid=40)
Apostolyuk V. Theory and Design of Micromechanical Vibratory Gyroscopes (http://www.apostolyuk.com
/index.php/publications/journals/16-springer2006)
Prandi L., Antonello R., Oboe R., and Biganzoli F. Automatic Mode-Matching in MEMS Vibrating
Gyroscopes Using Extremum Seeking Control //IEEE Transactions on Industrial Electronics. 2009.
Vol.56. - P.3880-3891.. [2] (http://automatica.dei.unipd.it/publications.html?autore=autore&
condizione=228&testo=UHVibGljYXRpb25zIG9mIGF1dGhvciBSb2JlcnRvIE9ib2U=)
Prandi L., Antonello R., Oboe R., Caminada C., and Biganzoli F. Open-Loop Compensation of the
Quadrature Error in MEMS Vibrating Gyroscopes //Proceedings of 35th Annual Conference of the IEEE
Industrial Electronics Society – IECON-2009. 2009. [3] (http://automatica.dei.unipd.it
/publications.html?autore=autore&condizione=228&
testo=UHVibGljYXRpb25zIG9mIGF1dGhvciBSb2JlcnRvIE9ib2U=)

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