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S a c h d e v
E&CE 437
Integrated VLSI Systems
MOS Transistor
M. Sachdev
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M . S a c h d e v
MOSFET: Introduction
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MOS Transistor
gate oxide
1111111
0000000 0000000000
1111111111
0000000000
1111111111 00000000
11111111
0000000
1111111
field oxide
0000000
1111111
000000000
111111111 0000000000
11111111110000000000000000000000000000000
1111111111111111111111111111111
poly-si gate
0000000000000000000000000000000
1111111111111111111111111111111 00000000
11111111
0000000
1111111
000000000
111111111
0000000
1111111
000000000
111111111
0000000
1111111 0000000000
1111111111 00000000
11111111
0000000
1111111
000000000
111111111
00000000
11111111
0000000
1111111
000000000
111111111
0000000
1111111
000000000
111111111 000000000
111111111
00000000
11111111
0000000
1111111
000000000
111111111
0000000
1111111
000000000
111111111
0000000
1111111 00000000
11111111
0000000
1111111
n+ drain111111111
000000000
00000000
11111111
000000000
111111111
0000000
1111111
n+ source
0000000
1111111
000000000
111111111
00000000
11111111
0000000
1111111
000000000
111111111
0000000
1111111
000000000
111111111 p- substrate
000000000
111111111
00000000
11111111
000000000
111111111
p+ field implant
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M . S a c h d e v
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M . S a c h d e v
VDD
VSS
n+ P+ P+ n+ n+ P+
n well
p substrate
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Static Behavior
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00000000000000000000000000000 000000000
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111111111 n+ 111111111
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n+
0000000
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0000000
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000000000
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0000000
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depletion region 0000000
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0000000
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n-channel111111111
000000000
0000000
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000000000
111111111
p+ field implant p- substrate 000000000
111111111
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M . S a c h d e v
Static Behavior
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■ Threshold Voltage
■
V T = V TO + γ [ – 2φ F + V SB – – 2φ F ]
❍
❍ Where
2qε si N A
γ = -------------------------------
C ox
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M . S a c h d e v
Current-Voltage Relationship
Vgs
Vds
S G
I
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D
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D
0000000
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111111111
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1111111 n+ V(x) 000000000
111111111
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111111111
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1111111 L 000000000
111111111
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x 1111111
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111111111
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1111111 000000000
111111111
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000000000
111111111
p+ field implant p- substrate 000000000
111111111
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❍ If the VGS -V(x) >VT for all x, the induced channel charge per
unit area at x
Q i ( x ) = – C ox [ V gs – V ( x ) – V T ]
❍ Current is given by
I D = – υ ( x ) Q i ( x )W
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M . S a c h d e v
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saturation
linear
Increasing
V GS
I
D I
D
V VGS
V T
DS
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M . S a c h d e v
Dynamic Behavior
■ MOS capacitances
ε ox
❍ Gate oxide capacitance: Cox = ------- per unit area,
t ox
❍ ε ox
for a transistor of width, W and length, L, the C g = WL -------
t ox
❍ From current equation it is apparent that C ox should
be high or gate oxide thickness should be small
❍ Gate capacitance consists of several components
❍ Source and drain diffusions extend below the thin oxide (lat-
eral diffusion) giving rise to overlap capacitance
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n+ n+
Source Drain
W
L
eff
x
d Gate Bulk
overlap
❍ Source and drain diffusions extend below the thin oxide (lat-
eral diffusion) giving rise to overlap capacitance
❍ xd is constant for a technology and this capacitance is linear
and has a fixed value CgsO = C gdO = C oxx dW = C oW
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M . S a c h d e v
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M . S a c h d e v
CGS CGD
S D
C GB
C
C DB
SB
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M . S a c h d e v
V T = V TO + γ [ – 2φ F + V SB – – 2φ F ]
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M . S a c h d e v
Source-Drain Resistance
L S, D
R S, D = -----------R φ + R C
W
❍ Technology and design objective is to reduce source-drain
resistance
❍ Often source drain regions are covered by titanium or tung-
sten (silicidation) to reduce the resistance
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M . S a c h d e v
Sub-threshold Conduction
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■ LOCOS isolation
❍ Depletion region is not limited to the area just under the thin
oxide,
❍ If W is large: part of the depletion region on the sides is small
fraction and may be neglected
❍ If W is small: gate also depletes the sides, hence larger VT
V
T
poly-si gate Field oxide
Depletion region
W
W
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M . S a c h d e v
poly-si gate V
T
Depletion region
Shallow trench
isolated oxide
W
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M . S a c h d e v
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M . S a c h d e v
Concluding Remarks
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