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Outline
What is Vibration? What is MEMS? $$$ History overview Current and future applications Micro accerolerometers, micro gyroscopes, micromechanial filters, micro resonant biosensors
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Vibration definition
Vibration : Any motion that repeats itself after an
interval of time is called vibration or oscillation.
The swinging of a pendulum and the motion of a plucked string are typical examples of vibration. The study of vibration deals with the study of oscillatory motions of bodies and the forces associated with them.
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History of Vibration
Harp with bull-headed soundbox 2600 BC (Fig. 1.1) Greek philosopher & mathematician Pythagora (582507BC): first to study musical sound on a scientific basis Chang Heng, astronomer in Han Dynasty invented an accurate seismograph in AD 132 - 1600 years before anyone in the West did. Galileo Galilei (1564-1642): study simple pendulum Issac Newton (1642-1727), Bernoulli (1700-1782) Euler (1707-1783), Lagrange (1736-1813): systematic method Charles Coulombs device for torsional vibration tests 1784 S. Timoshenko (1878-1972): Timoshenko beam theory R. D. Mindlin: Mindlin plate theory Poincare and Lyapunov: nonlinear vibration Duffing and van der Pol: nonlinear vibration in engineering Vibration in nanotech (Nano Electromechanical System, NEMS) Prof Michael Roukes, Caltech: http://nano.caltech.edu/
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Brief History of Vibration Greek philosopher & mathematician Pythagora (582-507BC): first to study musical sound on a scientific basis. He conducted experiments on a vibrating string by using a simple apparatus called a monochord. He further developed the concept of pitch.
pitch = property of sound that varies with variation in the frequency of vibration = frequency of a given tone
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CHANG Heng () (AD78-139), astronomer in Han Dynasty invented a accurate seismograph in AD 132 1600 years before anyone in the West did (British Professor John Milne, father of modern seismology, invented the horizontal pendulum seismograph in 1880)
1. http://neic.usgs.gov/neis/seismology/part03.html 2. http://en.wikipedia.org/wiki/Seismograph
3. Needham, J. (1959). () Science and Civilization in China, 3, Cambridge, 624-635 (HKUST Library: DS721 .N39)
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Sir Isaac Newton (1642-1727) - published his monumental work, Philosophiae Naturalis Principia Mathematica, in 1686, discovering three laws of motion
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Brief History of Vibration Recent contributions: 1902 Frahm investigated the importance of torsional vibration study in the design of propeller shafts of steamships Aurel Stodola (1859 1943) - contributed to the study of vibration of beams, plates, and membranes. - developed a method for analyzing vibrating beams which is applicable to turbine blades Carl Gustaf Patrick de Laval (1845 1913) - presented a practical solution to the problem of vibration of an unbalanced rotating disk (The de Laval turbine)
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1950s developed finite element method enabled engineers to conduct numerically detailed vibration analysis of complex mechanical, vehicular, and structural systems displaying thousands of degrees of freedom with the aid of computers Turner, Clough, Martin and Topp presented the finite element method as known today
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Basic Concepts of Vibration Vibration = any motion that repeats itself after an interval of time Vibratory System consists of: 1) spring or elasticity 2) mass or inertia 3) damper Involves transfer of potential energy to kinetic energy and vice versa
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Basic Concepts of Vibration Degree of Freedom (d.o.f.) = mininum number of independent coordinates required to determine completely the positions of all parts of a system at any instant of time Examples of single degree-of-freedom systems:
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1. Infinite number of degrees of freedom system are termed continuous or distributed systems 2. Finite number of degrees of freedom are termed discrete or lumped parameter systems 3. More accurate results obtained by increasing number of degrees of freedom
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Classification of Vibration
1. Free Vibration: A system is left to vibrate on its own after an initial disturbance and no external force acts on the system. E.g. simple pendulum 2. Forced Vibration: A system that is subjected to a repeating external force. E.g. oscillation arises from diesel engines - Resonance occurs when the frequency of the external force coincides with one of the natural frequencies of the system
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Classification of Vibration
1. Undamped Vibration: When no energy is lost or dissipated in friction or other resistance during oscillations 2. Damped Vibration: When any energy is lost or dissipated in friction or other resistance during oscillations 3. Linear Vibration: When all basic components of a vibratory system, i.e. the spring, the mass and the damper behave linearly
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Classification of Vibration
1. Nonlinear Vibration: If any of the components behave nonlinearly 2. Deterministic Vibration: If the value or magnitude of the excitation (force or motion) acting on a vibratory system is known at any given time 3. Nondeterministic or random Vibration: When the value of the excitation at a given time cannot be predicted
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Step 1: Mathematical Modeling Step 2: Derivation of Governing Equations Step 3: Solution of the Governing Equations Step 4: Interpretation of the Results
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Anvil
Anvil: heavy block of iron or steel with a smooth, flat top on which metals are shaped by hammering
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http://www.unitedspacealliance.com/press/photo.htm
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Most common tuning fork used by musicians sounds the note of A (440 Hz, international "concert pitch"), which has long been used as a standard tuning note by orchestras. A tiny tuning fork (quartz) is used in digital watch, freq = 215 = 32,768 Hz
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http://www.onlinetuningfork.com
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Technical Manufacturing Corp. MA 01960, USA www.techmfg.com Canon stepper using STACIS2000
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The Active Rack Isolation System (ARIS) For Intl Space Station (ISS)
Accelerometer
ISS
http://www.spaceref.com/iss/payloads/aris.html
ARIS
Actuators
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Whats MEMS?
MicroSystem Technology (MST) popular in Europe Micro-Electro-Mechanical Systems (MEMS) widely used in United States Microengineering sometimes used in UK Micromachines used in Japan in Chinese
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MEMS definition
MEMS is a study of making machines in micro scale with the fabrication technique in Integrated circuit (IC) industry. The size ranges from micrometer to milimeter (10-6 ~ 10-3 m) MEMS are the systems that integrate sensing actuation computation control communication power
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Science
Traditional Engineering
MEMS
Nanotechnology
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107 106 105 104 103 102 101 100 10-1 10-2 10-3 10-4 10-5 10-6 10-7 10-8 10-9
Biomedical
Unit : Meter
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1947 1958 1961 1967 1970 1977 1979 1980 1982 1982 1984 1988 1989 1990 1991 1992 1992 1993 1996 2001
invention of the transistor (made from germanium) silicon strain gauges commercialized; first integrated circuit (TI: Jack Kilby) first silicon pressure sensor demonstrated (Kulite) Invention of surface micromachining (Nathanson, Resonant Gate Transistor) first silicon accelerometer demonstrated (Kulite) first capacitive pressure sensor (Stanford) Prof James Angell first thermal inkjet printer (HP lab) Petersen, K.E., "Silicon Torsional Scanning Mirror" disposable blood pressure transducer (Foxboro/ICT, Honeywell, $40) active on-chip signal conditioning First polysilicon MEMS device (Howe, Muller ); HP ThinkJet Rotary electrostatic side drive motors (Fan, Tai, Muller) Lateral comb drive (Tang, Nguyen, Howe) BIACORE microfluidic chip polysilicon hinge (Pister, Judy, Burgett, Fearing) Grating light modulator (Solgaard, Sandejas, Bloom), DARPA USD$80M/yr MCNC starts MUMPS First surface micromachined accelerometer sold (Analog Devices, ADXL50) Digital micro-mirrors array commercialized, DMD (Texas Instrument) Micro optical switch for internet backbone commercialized
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J. Bardeen, W.H. Brattain, The first transistor, a semiconductor triode, Phys. Rev. 74, p.230,1948
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Micro accelerometer
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1993
~1996
~1997
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Anchor point
30 sensing cells per axis 1.2m gaps, 1m feature size 2m thick polysilicon structure suspended 1.6m above substrate 10kHz resonant frequency
Deflection due to 2g acceleration = 5nm = 25010-18F Minimum resolvable deflection = 0.04A = 9010-21F
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Part Number: AD9430BSV-170 2-um MEMS structures Device Type: Gyroscope Sensor LOCOS isolation Die Size: 11.3mm2 Multiple well design BiCMOS/MEMS integration
The Analog Devices ADXRS150 Gyroscope Sensor is a complete Z-axis rate-sensing device also known as a yaw-rate sensing device. The ADXRS150 Gyroscope Sensor is manufactured using a process that integrates a BiCMOS and mechanical MEMS (Microelectromechanical Systems) process on the same substrate.
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Mech 101, 202 Solid mechanics (mechanics of material, strength of material) Mech 221 (521) Fluid Mechanics
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Summary
Whats Vibration and MEMS
Vibration and MEMS history What are the applications of MEMS How MEMS devices works MEMS : Small machines, big opportunity
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References
Nobel laureate Richard Feynmans talk http://www.zyvex.com/nanotech/feynman.html Forbes magazine special issues on micromachine, Apri 2 2001 http://www.forbes.com/asap/2001/0402/ US Sandia National Laboratories: MEMS research http://mems.sandia.gov/scripts/index.asp NEXUSs MEMS market analysis http://www.sgt-sensor.de/NEXUS.html Introduction to MEMS in Chinese http://nscmems.iam.ntu.edu.tw/research/article/college/ Special Issues in MEMS: Proceedings of the IEEE, Vol.86, No.8, 1998 HKUST online library: IEEE Xplore
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http://celt.ust.hk/ideas/prs/intro.htm
If you didnt get the PRS handset, please get it in the AV counter (Rm 1030, Lift 1) by this week.
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strut
Example 1.1 Solution We start with the simplest model and refine it gradually. When the equivalent values of the mass, stiffness, and damping of the system are used, we obtain a singledegree of freedom model (1 DOF) of the motorcycle with a rider as indicated in Fig. 1.18(b). In this model, the equivalent stiffness (keq) includes the stiffness of the tires, struts, and rider. The equivalent damping constant (ceq) includes the damping of the struts and the rider. The equivalent mass includes the mass of the wheels, vehicle body and the rider.
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keq = fun(tire,strut, rider) ceq = fun(strut, rider) meq = fun (wheel, vehicle body, rider)
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Example 1.1 Solution This model can be refined by representing the masses of wheels, elasticity of tires, and elasticity and damping of the struts separately, as shown in Fig. 1.18(c). In this model, the mass of the vehicle body (mv) and the mass of the rider (mr) are shown as a single mass, mv + mr. When the elasticity (as spring constant kr) and damping (as damping constant cr) of the rider are considered, the refined model shown in Fig. 1.18(d) can be obtained.
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Note that the models shown in Figs. 1.18(b) to (d) are not unique. For example, by combining the spring constants of both tires, the masses of both wheels, and the spring and damping constants of both struts as single quantities, the model shown in Fig. 1.18(e) can be obtained instead of Fig. 1.18(c).
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l1 = 12.3055 m
x l1, k1,x1 l2=10m, k2, x2
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cos = 0.8184,
= 35.0736
(E.1)
A1E1 (100 10 6 )(207 109 ) = = 1.6822 106 N/m k1 = l1 12.0355 A2 E2 ( 2500 10 6 )(207 109 ) 7 = = 5.1750 10 N/m k2 = l2 10
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Potential Energy of the equivalent spring is: 1 2 (E.2 ) U eq = keq x 2 By setting U = Ueq, hence:
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Harmonic Motion Periodic Motion: motion repeated after equal intervals of time Harmonic Motion: simplest type of periodic motion Displacement (x): x = A sin = A sin t Velocity: Acceleration:
dx = A cos t dt
d 2x dt
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(1.30 )
(1.31)
(1.32 )
= 2 A sin t = 2 x
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Harmonic Motion
Scotch yoke mechanism: The similarity between cyclic (harmonic) and sinusoidal motion.
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Harmonic Motion
Complex number representation of harmonic motion: r (1.35) X = a + ib where i = (1) and a and b denote the real and imaginary x and y components of X, respectively. y (Imag)
x (Real)
Dr. Y.K. Lee
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Harmonic Motion Also, Eqn. (1.36) can be expressed as r (1.36) X = A cos + iA sin r (1.43) X = A(cos + i sin ) = Aei
Thus,
r X i = ai + ibi
1 b j
(1.47)
j = tan ; j = 1, 2 aj
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(1.48)
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(1.54)
(1.55)
Acceleration = Re[ 2 Aeit ] = 2 A cos t = 2 A cos(t + 180) where Re denotes the real part
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(1.56)
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r X
x(t)
r X2
r X r X1
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Find the sum of the two harmonic motions x (t ) = 10 cos t and x (t ) = 15 cos(t + 2).
1 2
Solution:
Method 1: By using trigonometric relations: Since the circular frequency is the same for both x1(t) and x2(t), we express the sum as
x(t ) = A cos(t + ) = x (t ) + x (t )
1 2
(E.1)
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(E.2)
cos t ( A cos ) sin t ( A sin ) = cos t (10 + 15 cos 2) sin t (15 sin 2)
(E.3)
By equating the corresponding coefficients of cost and sint on both sides, we obtain
A cos = 10 + 15 cos 2 A sin = 15 sin 2 A=
= 14.1477
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( E.4)
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x2(t) 14.147
(E.5)
2 (rad)= 114.6
74.5963 x1(t)
Method 2: By using vectors: For an arbitrary value of t, the harmonic motions x1(t) and x2(t) can be denoted graphically as shown in Fig. 1.43. By adding them vectorially, the resultant vector x(t) can be found to be x(t ) = 14.1477 cos(t + 74.5963) ( E.6)
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x (t ) = Re[ A e
1 1 2 2
i t
x (t ) = Re[ A e
i ( t + 2 )
] Re[10e ] ] Re[15e ]
it i ( t + 2 )
(E.7)
x(t ) = Re[ Ae
i ( t + )
(E.8)
where A and can be determined using Eqs. (1.47) and (1.48) as A = 14.1477 and = 74.5963
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Swinging of Pendumum
http://mw.concord.org/modeler1.3/mirror/mechanics/pendulum.html
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http://www.oberlin.edu/physics/catalog/demonstrations/waves/pluckanimation.html http://politicalhumor.about.com/library/images/blbushguitar.htm 76
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Anatomy of a guitar
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