Professional Documents
Culture Documents
An Electronic Nose is a system that uses the pattern of responses from an array of gas sensors to examine and identify a gaseous sample.
Motivation
11/18/2011
Organic Chemistry
Signal Processing
. . . . .
Computational Learning
Sensor Processor
Processed Electrical signal
Signal Processor
Denoised Electrical signal
Feature Extractor
Relevant features
Knowledge Base
Training & Testing
(a) Traditional chemosensor. (b) Receptors wired in series. Green is the emissive polymer, blue the quenched, and red is the analyte; h is the light at the excitation wavelength, h at the emission wavelength [20].
ADB
ADB
OC14H29
ADB + TNT
+ MNT
C14H29O
Pentiptycene Polymer
light emitted by the LED passes through a lens and a filter, allowing only a narrow-wavelength band of light centered at 430 nm to impinge on the polymer film, which is coated on two thin glass sheets.
A pump
pulls in air samples across the coated glass sheets. If the air sample contains explosive vapors, the photomultiplier detector will sense a decrease in light intensity and trigger an alarm.
MEMS
microelectromechanical systems
It is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate by microfabrication. It is based on microfabricated nanomechanical cantilever sensors.
The cantilevers are silicon beams, a few hundred micrometers long and 1 m thick.
Each cantilever sensor in an array is coated with a different sensor layer.
MEMS Contd
When the sensor is exposed to an analyte, the analyte molecules adsorb on the cantilevers surface, which leads to interfacial stress between the sensor and adsorbing layer that bends the cantilever. Each cantilever bends in a characteristic way typical for each analyte. From the magnitude of the cantilevers bending response function of time, a fingerprint pattern for each analyte can be obtained. It showed detection sensitivities in the parts-per-billion range
During the sampling, the molecules of explosive vapor adsorb on the cantilever surface, which is heated to a high temperature by a piezoresistive track implanted in the cantilever. As the cantilever is heated, the adsorbed explosive molecules undergo combustion, producing a large and sudden deflection of the cantilever.
Resonance curves of the cantilever before and after loading with TNT. With TNT loading, the resonance frequency shifted to a lower value due to the increased mass. After deflagration, the resonance frequency returned to the original value [7].
18
Fabrication of OFETs
RCA
RCA1(organic impurity removal)
DI H2O + NH4OH @ 348k for 5min Add H2O2 & wait for bubbles Place wafer in sol. & heat for 6-8 min
11/18/2011
19
11/18/2011
20
Oxidation
Temperature of chamber set to 1323k (1050C)
11/18/2011
Oxidized Si wafer
21
11/18/2011
22
Lithography
Dehydration at 393k for 10 min Rinse with N2(g) Spin PPR at 1500 rpm for 30 sec (2m) Bake at 343k for 15 min UV exposure for 90 sec Place in 0.01% NaOH sol. To remove developed PPR Dry with N2(g)
23
11/18/2011
PPR
n+ Si SiO2
UV Light
MASK PPR
n+ Si
PPR
n+ Si
VIT University 24
11/18/2011
11/18/2011
25
11/18/2011
26
RF Sputtering
60sec Ti deposition (5nm) 90sec Au deposition (80nm)
Ti/Au
PPR
n+ Si
11/18/2011
SiO2
11/18/2011
27
Liftoff
Sonicate wafer in acetone in order to remove unwanted Au and PPR
Ti/Au
n+ Si
SiO2
Ti/Au
n+ Si
n+ Si
11/18/2011 28
11/18/2011
29
Spinning of polymer
P type polymer N+ Si Au/Ti
N+ Si
11/18/2011
30
OFET device
11/18/2011
Selectivity
Sensitivity
11/18/2011
33
11/18/2011
34
11/18/2011
36
Water Vapor
11/18/2011
37
RDX Vapor
DNB Vapor
Water Vapor
11/18/2011
38
QUESTIONS??????