Safety and Energy Saving System on High Flow Hydrogen Abatement

Presenter : Seung Gon Kim

Copyrights 2011 CSK TAIWAN Inc. all right reserved

CONTENTS
1. Company profile 2. Introduction 3. Review of present Abatement systems 4. Future abatement system with energy saving 5. Discussion & Direction of future abatement system

Copyrights 2011 CSK TAIWAN Inc. all right reserved

1. Company profile

Human Nature Happiness

Copyrights 2011 CSK TAIWAN Inc. all right reserved

Products
Scrubber
Burn & Wet Plasma & Wet Thermal & Wet Wet

PDS

Copyrights 2011 CSK TAIWAN Inc. all right reserved

2. Introduction Why Hydrogen is used in the process?

The Effect of Carrier Gas and H on MOCVD Cu Films Using Cu(1,5-COD) as a Precursor . 1028 Lee, Ko, Journal of ELECTRONIC MATERIALS, Vol. 30, No. 8, 2001 Copyrights 2011 CSK TAIWAN Inc. all right reserved

2. Introduction Which process is needed Hydrogen Carrier?

Process Reasons
1. Using hydrogen carrier gas led to a higher MOCVD Cu deposition rate and a lower film resistivity compared to an argon carrier gas system. 2. Improvements in surface roughness of the MOCVD films. 1. The hydrogen is used the processing gas as follow. SiCl4(g) + 2H2(g) Si(s) + 4HCl(g)
EPI

Remark

MOCVD

EPI
MOCVD

Copyrights 2011 CSK TAIWAN Inc. all right reserved

2. Introduction What is the H2(Hydrogen)??

Hydrogen is the Lightest gas ever found. Hydrogen has No color, No smell and No Taste. Hydrogen is the simple element known to exist. An atom of hydrogen has one proton and one electro.
H2 MATERIAL SAFETY DATA SHEET
Characteristics Boiling point Freezing point Vapor pressure Vapor density(air=1) Water solubility Viscosity auto Ignition temperature Value -423F(-253C) -434F(-259C) 760mmHg@-253C 0.07 0.08987 g/L @ 0C 1.82% @ 20C 790F(520C)
Copyrights 2011 CSK TAIWAN Inc. all right reserved

3. Review of present abatement methods Dilution with air for LEL(lower explosion limit)
Hydrogen was not considered as abatement gas due to it is not pollutant Usually wet scrubbing solution was used for abatement soluble gases(NH3, Cl2, HCl etc) and dust.

Difficult to control LEL with dilution (Control mistake=high potential of explosion)

Combustion with oxidizer

High temperature of H2 combustion (High temperature of exhaust gas) Thermal management High burning velocity and flash back (explosion) Safety management

Copyrights 2011 CSK TAIWAN Inc. all right reserved

4. Characteristics of Hydrogen Combustion H2 + O2 +E(ignition) H2O+E(generation) Flammability Limit (LFL & UFL)
A premixed fuel-air mixture will only burn as long as the fuel concentration is between the upper and lower flammability limits, i.e. UFL and LFL. The flammability limits are experimentally determined data. The flammability limits in air depend on initial temperature and pressure. Standard test conditions are 25C and 1 atm.

Auto ignition temperature of H2 is around 520 at 1atm

Copyrights 2011 CSK TAIWAN Inc. all right reserved

4. Characteristics of Hydrogen Combustion Adiabatic flame temperature

Adiabatic flame temperature is 2380K (at f=1.1)at maximum and almost 600K (at f=1.9) is higher than that of methane case

Copyrights 2011 CSK TAIWAN Inc. all right reserved

4. Characteristics of Hydrogen Combustion Laminar burning velocity

Hydrogen S (m/s) 28.0 Ethylene 6.5 Propane 4.0 Methane 3.5

Laminar flame speed for Stoichiometric composition (Harris, 1983).

The higher the laminar flame speed, the more reactive is the mixture This means that the flame can propagate fast through a cloud and thereby cause flame acceleration and pressure build-up
Copyrights 2011 CSK TAIWAN Inc. all right reserved

4. Characteristics of Hydrogen Combustion Pressure Build up potential

Comparison of explosion pressure for various Stoichiometric fuel-air mixtures in a 10 m wedge-shaped vessel (Bjrkhaug 1988b).

Explosion pressure for H2-Air mixture is more than 100 times higher than that of methan-air mixture More dangerous and need more careful treatment!!
Copyrights 2011 CSK TAIWAN Inc. all right reserved

5. Safety consideration for H2 combustion Control the flame speed 1. Active control
H2 + other hydrocarbon Fuel lean combustion
0 Su

b = S1 u

2. Passive control (externally control the flame temperature) Using external heat sink source(e.g. cooling lid) Flame quencher (high heat capacity, ceramic) Qgen << Qloss
Copyrights 2011 CSK TAIWAN Inc. all right reserved

5. Safety consideration for H2 combustion Continuous ignition source When flame blow out then H2 premixture exist inside reactor. It makes high potential of pressure build up and Finally ignition occur inside reactor, then explosion occur.

Anti-explosion design It is final solution and can endure over 10 bar at minimum

Copyrights 2011 CSK TAIWAN Inc. all right reserved

6. Thermal Treatment(energy saving) High temperature of reactor Thermal insulation or cooling system of reactor body High temperature of flue gas Over 1,000K should be decreased by cooling water

Those are absolutely energy loss for thermal treatment!!

Copyrights 2011 CSK TAIWAN Inc. all right reserved

7. Optimization of H2 treatment issues

Energy saving

Thermal regeneration -External recirculation -Internal recirculation

High DRE of H2 -Perfect combustion

Thermal insulation -Safety of worker -Defense energy loss

Thermal Treatment

Safety

Control of burning velocity -Fuel lean combustion -Anti flash back (Flame quencher) -Continuous ignition source

All the issues should be solved together Need new technology for H2 abatement system
Copyrights 2011 CSK TAIWAN Inc. all right reserved

8. New concept of H2 abatement system Schematics of Heat regenerative system

Outlet

Reverser

Regenerator 1

Regenerator 2

Insulation Heat-upHeater Supplementary Heater

Reactor

Heat regeneration is accomplished by "Thermal Swing" Method meaning periodically reversing the flow direction The energy is contained within the System
Copyrights 2011 CSK TAIWAN Inc. all right reserved

9. Summary of new H2 abatement system

Items Energy saving Thermal treatment

Detailed issues Internal heat recirculation Safety of worker Defense energy loss Fuel lean combustion Anti flash back Continuous ignition source

application Thermal insulation Regenerator Thermal insulation Exhaust temperature f=0.6 Id 2.5mm of honeycomb Regeneration

Safety

Copyrights 2011 CSK TAIWAN Inc. all right reserved

9. Summary of new H2 abatement system Advantages and Highlights: Thermal Swing Reactor is proven technology (thousands of RTO-units worldwide) very stable operations (no controller issues) robust design truly isothermal treatment (no cold channel) Energy saving up to 90% (Tmax=800) Easy to scale up !!!

Copyrights 2011 CSK TAIWAN Inc. all right reserved

Clean Solution! Clean Service! Clean Standing!

#1309 CSKTaiwan

Copyrights 2011 CSK TAIWAN Inc. all right reserved