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Ernst Ruska and Max Knoll built the first electron microscope in 1931
(Nobel Prize to Ruska in 1986)
T4 Bacteriophage
Electron Microscopy bridges the 1 nm 1 m gap David Muller 2008 between x-ray diffraction and optical microscopy
AFM
MFM
Electronic Components
Logic Board Computer chip Optical Microscope
Tool
10-2
SEM
Size (m)
10-4
Mammalian cell
10-6
TEM
10-8
Gene Protein
Electron microscopes are operated in vacuum because the mean free path of electrons is air is short this mean biological samples should not degas they can either be dehydrated or frozen pathology, not in-vivo. Electron microscopes have higher resolution than optical microscopes atomic resolution is possible. Chemical imaging and spectroscopy mapping and bonds at 1nm resolution can be done. Radiation damage is severe and limits the image quality and resolution (not as bad as x-rays or neutrons though! see R. Henderson, Quarterly Reviews of Biophysics 28 (1995) 171-193.)
TEM
SEM or STEM
condenser aperture
Viewing chamber
David Muller 2008
An Electron Lens
An Electron Lens
Object plane
David Muller 2008
Lens at z=0
image plane
1 1
x x
Object plane
David Muller 2008
Lens at z=0
image plane
n = d sin
200 keV Electrons
10 keV x-rays
=1.54
David Muller 2008
=0.0251
In Si d220 = 1.92
De Broglie Wavelength:
h = p
Where h is Plancks constant And p=mv are the momentum, mass and velocity of the electron
1 2 mv = eV 2
So the momentum is
mv = 2meV
Electron wavelength
h2 1.23nm = 2meV V
(V in Volts)
h 2c 2 = eV ( 2m0c 2 + eV )
0.04 (Angstroms)
Accelerating Voltage 1V
()
12.264 1.2263 0.38763 0.12204 0.037013 0.025078 0.019687 0.0087189
0.03
100 V 1 keV
0.02
0.01
Cs=0
d min
For Cs>0, rays far from the axis are bent too strongly and come to a crossover before the gaussian image plane. For a lens with aperture angle , the minimum blur is
d min
1 = Cs 3 2
d0
0
Gaussian image plane The image of a point transferred through a lens with a circular aperture of semiangle 0 is an Airy Disk of diameter
(0.61 for incoherent imaging e.g. ADF-STEM, 1.22 for coherent or phase contrast,. E.g TEM)
For a rough estimate of the optimum aperture size, convolve blurring terms -If the point spreads were gaussian, we could add in quadrature:
2 tot
0.61 1 3 + Cs 0 d +d = 0 2
2 0 2 s
10
d 1 1
(mrad)
10
Optimal aperture:
opt
4 = C s
1/ 4
At 200 kV, =0.0257 , dmin = 1.53 and opt = 10 mrad At 1 kV, =0.38 , dmin = 12 and opt = 20 mrad
David Muller 2008
Image
Diffraction Pattern
220 400
=0.0251
David Muller 2008
In Si d220 = 1.92
d D0 = tan 0
projector: magnifies image/ forms diffraction pattern should not alter resolution. If misaligned, the image will be distorted, diffraction pattern may be blurry.
David Muller 2008
http://www.rodenburg.org/RODENBURG.pdf
Caustics in a Lens
On-axis
Tilted
http://www-optics.unine.ch/education/optics_tutorials/aspherical_surface.html
David Muller 2008
Caustics
(remove extreme rays and caustics by putting in an aperture)
From Natural Focusing and Fine Structure of Light: Caustics and Wave Dislocations by J. F. Nye
David Muller 2008
Common Aberrations
Astigmatism -x&y focus at different planes -fix by adjusting stigmators Bad Coma -beam is tilted off axis -fix by centering aperture Bad
-f
f=0
+f
Good Good
Lens Alignment
Correcting for a gun shift misalignment How do we align one lens, when all lenses are misaligned?
Step 1: Strongly excite C1 (small spot size) cross-over moves to lens & optic axis. Use beam shift D2 to bring spot to to axis below C2
Step 2: Weaken C1 (large spot size) cross-over moves away from optic axis Use gun shift D1 to bring spot to to axis below C2. Iterate until spot stops moving
http://www.rodenburg.org/RODENBURG.pdf
bright fringe
Minimum contrast
dark fringe
dark fringe
bright fringe
Applications
Topographic Imaging on wafers Accurate height measurements on flat surfaces (~ 0.5 nm vertical) Lateral Resolution 10-20 nm In-situ no vacuum required Imaging of complex structures at 120 nm resolution X-ray mapping at 100-500 nm In-vacuum Clark: High spatial resolution Snee/Bard: best x-ray mapping, OIM 1 nm (polymers) > atomic resolution of crystals in thin samples X-ray mapping at 1 nm EELS at < 1 nm Requires sample thinning (except for nanoparticles)
Location
Dr. Jonathan Shu D-22 Clark Hall Prof. Kit Umbach SB-60C Bard Hall CNF Clean Room Clark: Mick Thomas F3 Clark Hall Bard/Snee: John Hunt SB56 Bard/1149 Snee Duffield: John Grazul 150 Duffield (TEM+STEM) Clark: Mick Thomas F3 Clark (STEM+EDX)