NanoElectroMechanicalSystem

PRESENTATION BY:-

NAWNIT KUMAR
M.TECH

NANOSCIENCE & TECHNOLOGY 1211NT07

OUTLINE
Introduction Cantilever Technique

Nanocalorimeter

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INTRODUCTION
Nano-Electro-Mechanical system (NEMS) is the integration of mechanical elements, sensors, actuators and electronics on

a common silicon substrate.

The Nano mechanical components are fabricated using compatible micromachining process. NEMS is the enabling technology allowing the development of smart products.

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Nanoelectromechanical systems K. L. Ekinci and M. L. Roukes

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 Transducer
a device that converts a primary form of energy into a corresponding signal with a different energy form
Primary Energy Forms: mechanical, thermal, electromagnetic, optical, chemical, etc.

take form of a sensor or an actuator

Sensor
a device that detects/measures a signal or stimulus acquires information from the real world

Actuator
a device that generates a signal or stimulus

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BENEFITS OF NANO MACHINES Nano-Mechanical devices promise to revolutionize

measurements of extremely small displacements and forces.

Can built with the masses approaching a few attograms(10-18 gm)

and with the cross section of 10nm.

A second important attribute Nano machines is that they dissipate less energy.

APPLICATION
NEMS have an important impact on
1 Medicine and Bioengineering DNA and genetic code analysis and synthesis, drug delivery, diagnostics and imaging.

2 Avionics and Aerospace

Nano- and microscale actuators and sensors, smart reconfigurable geometry wings and blades. Navigational gyroscopes 3 In Communication Domain Low insertion loss switches (High Frequency) Mass Storage Devices; Nano nozzles

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Principle of Microcantilevers The key elements in the detection of a mass are the vibrational frequency and the deflection of the cantilever

Deflection
Proportional to mass content

Resonance frequency
R =(k/m)1/2
K = spring constant m= mass
Appl. Phys. Lett., Vol. 85, No. 13, 27 September 2004

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Readout Method
There are several methods available to observe the deflection and resonance frequency of the microcantilever Optical method Piezoresistive method

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Optical
Optical method requires the use of a low power laser beam If microcantilever does not deflect, then no biomolecules have been absorbed Laser beam hits a specific position on the position sensitive detector (PSD) Major weakness-high cost
*Karolyn

M. Hansen, Hai-Feng Ji, Guanghua Wu, Ram Datar, Richard Cote, Arunava Majumdar, and Thomas Thundat (2001) Cantilever-Based Optical Deflection Assay for Discrimination of DNA Single-Nucleotide Mismatches. Analytical Chemistry 73 (7): 1567-1571

Piezoresistive
These sensors measure the strain induced resistance change When the biomolecules are absorbed by the material there is a volumetric change in the sensing material Volumetric change is measured by resistance change in cantilever Advantages-Low cost
*Viral

detection using an embedded piezoresistive microcantilever sensor. Sensors and Actuators A: Physical 107 (3), 219224

Cantilever Sensors
As mass is added to the cantilever shifts the resonance frequency.

In this receptor only allow specific analyte to get adsorbed Rest remain out of contact Since analyte increases the mass so there is shift in resonance frequency

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Virus detection using NEMS

We have used a resonating mechanical cantilever to detect immunospecific binding of viruses, captured from liquid. Arrays of surface micromachined, antibody-coated polycrystalline silicon nanomechanical cantilever beams were used to detect binding from various concentrations of baculoviruses in a buffer solution. Because of their small mass, the 0.5 mm X 36 mm cantilevers have mass sensitivities on the order of 10 -19g/Hz, enabling the detection of a mass of about 3 X 10 -15 gm.

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*Amit K. Gupta, Pradeep R. Nair, Demir Akin, Michael R. Ladisch, Steve Broyles, Muhammad A. Alam, and Rashid Bashir (2006) Anomalous resonance in a nanomechanical biosensor. PNAS 103 (36): 13362-13367

With these devices, we can detect the mass of single-virus particles bound to the cantilever. Resonant frequency shift resulting from the adsorbed mass of the virus particles

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Nanocalorimetry
# Calorimetry is the science of measuring the heat of chemical reactions or physical changes. Calorimetry is performed with a calorimeter.
# The device consists of a substrate with an array of micromachined nanocalorimeter sensors. # Each nanocalorimeter consists of a silicon nitride membrane and a tungsten heating element that also serves as a temperature gauge. # The nanocalorimeter sensors are very sensitive, with a resolution of 10 nJ/K, allowing thermal analysis of small quantities of material.

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# The small mass of the individual nanocalorimeters enables measurements on samples as small as a few hundred nanograms at heating rates up to 104K/s.

# Each nanocalorimetric sensor consists of a thin-film thermistor sandwiched between two electrically insulating ceramic layers that form a membrane supported by the substrate

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Photograph of the parallel nano-scanning calorimeter.

Layout of the nanocalorimeter cell

J. Mater. Res., Vol. 25, No. 11, Nov 2010

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 The thermistor is fabricated from an electrically conductive film and serves to both measure temperature and heat the sample. Samples to be measured are limited to the thermistor area of each sensor, and may be deposited on either side of the membrane. The membrane design of the sensor thermally insulates the sample from the surroundings and ensures that the thermal mass of the sensor, i.e., the addendum, is very small.
A current passed through the heating element heats the sample and the calorimetric cell The power dissipated in the thermistor is determined experimentally from the current supplied to the thermistor and the potential drop between the voltage probes. The local temperature change is determined from a four-point thermistor resistance measurement that has been calibrated to temperature
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 Measurements are performed in vacuum to eliminate convection losses and to provide a chemically inert testing environment. ceramic membrane consists of silicon nitride, selected because it is a good electrical insulator and because it is made easily into thin membranes. low thermal effusivity, which reduces the heat loss into the membrane. The thermistor is made of tungsten, because of its large temperature coefficient of resistance and its small resistivity, both of which are beneficial to measurement sensitivity

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Operating Principle
The power dissipated in the thermistor can be parsed into stored power and power lost to the surroundings. At constant pressure, the stored power results in a change of the enthalpy of the sample and calorimeter addendum. If we define a control volume (CV) that comprises the sample and the calorimeter addendum P is the total power dissipated in the thermistor, H is the time rate of change of the enthalpy within the CV, Q is the heat loss through the boundaries of the CV.

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 The rate of change of the enthalpy can be written as

where T is the temperature of the thermistor. Substituting Eq. (2) into Eq. (1) and rearranging results in

where T is the heating rate of the thermistor. The left side of Eq.3 can be directly calculated from measured quantities and is defined as the calorimetric signal from the sensor. If Q is known or if its contribution to Eq. (3) is negligible (e.g., in the case of large heating rates), the change in enthalpy with temperature, dH/dT, can be determined directly from the calorimetric signal. J. Mater. Res., Vol. 25, No. 11, Nov 2010
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 To reduce the effect of the calorimeter addendum and/or heat loss on the measurement, it is often convenient to perform a reference measurement Equation (3) can then be rewritten to define the differential calorimetric signal as

del represents the difference between a sensor with a sample and a sensor that is either empty or contains a reference sample.

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Application of Nanocalorimetry
Studying molecular interactions It is also used to investigate the kinetics of phase transformations and reactions. Nanocalorimetry makes use of thin-film and micromachining technologies to significantly reduce the addendum of the calorimeter, enabling ultrasensitive calorimetric measurements

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Pros And Cons

Potential Positive Impacts
Reduction of disease. Job opportunities in new fields. Low-cost energy. Cost reductions with improved efficiencies. Improved product and building materials. Transportation improvements Material toxicity Non-biodegradable materials. Unanticipated consequences. Job losses due to increased manufacturing efficiencies.

Potential Negative Impacts

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 NEMS are extensively used and now a days they play vital role in our life. Further technology development are going to improve their synthesis and performance. Many life saving robot are still to come. R&D work is still on and lots of new ideas are still to be implemented.

CONCLUSION

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REFERENCES
MEMS AND NEMS Systems, Devices, and Structures by Sergey Edward Lyshevski http://mems.sandia.gov

http://www.memsnet.org/mems/
http://gen.lib.rus.ec/ www.wikipedia.org

http://www.links999.net/robotics/robots/robots_introduction.html

Applied Physics Letters Volume 85, Number 13

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THANK YOU

NANO ERA HAS ARRIVED

Thank you

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