Review and projects

David T. Shaw 11/29/12

MASS UIUC

Review Optical MEMS

Read the paper by Wu

Bulk fabrication on (100) and (110)

Bulk etching is useful for making optical MEMS because of special properties of (111) as the etching stopper. It makes perfect beam splitters and mirrors.
Mach-Zehnder interferometer

Bulk on (100)
Bulk etching on (100) makes alignment groves for optical fibers. Pyramidal-shaped holes are ideal for holding optical chip components.

Surface micromachining optical MEMS

Free-space microoptical bench (FSMOB; below) can be constructed using 2-layer hinges (right). In free-space optical systems, photons propagate between optical elements without being confined in optical fibers the technique is useful in switching.

Diffractive vs. refractive lenses

Fresnel Zone plate on polysilicon plate, which is rotated out of the plane on microhinges. The fact that the lens is an amplitude grating limits its diffraction efficiency.

Fresnel lenses were first developed for lighthouses

By using a thinner piece of glass, the lens is much lighter

Fabrication of Fresnel Zone diffractive lenses

By direct e-beam writing By repeated etching processes

Refractive vs. diffractive microlenses

(See Wus paper p.1838-1840)

Diffractive vs. refractive lenses

Efficiency of diffractive lenses is less than that of refractive lenses, although greater than 80% efficiency can be achieved by multilevel Fresnel lenses at the expense of more complicated fabrication processes.
Another potential issue of fabricating diffractive optical elements on the surface micromachined polysilicon plates is the surface roughness.

Refractive microlenses do not suffer from diffraction loss, and it is easier to make a high efficiency lens at low cost.

Surface micromachined actuators

How do they work? (Wu paper p.1841-2)

GLV (grating light valve)

How does it work?

3D FS-MOB
Using parallel beam-shifting, we can move FS light in 3D i.e., translating the optical beams in the lateral directions as shown below.

Optical switching
With a sliding mirror by surface micromachining (right) or bulk machining (below).

Review -- BioMEMS

BioMEMS
Read two papers by Bashir Our discussions were mainly on mechanical sensing. Two types: measuring Dz due to changes in Ds, and measuring frequency f shift due to increase in mass

You should know the measuring principles of both methods

Resonance quality factor

(Q = fo/Df)

Resonance quality Q
General speaking, resonance quality Q describes how under-damped an oscillator or resonator is,
It characterizes a resonator's bandwidth relative to its center frequency.

Higher Q indicates a lower rate of energy loss relative to the stored energy of the resonator, i.e., the oscillations die out more slowly. For example, a pendulum suspended from a highquality bearing, oscillating in air, has a high Q.
while a pendulum immersed in oil has a low one.

Assignment
Read two Bashids papers on Biomems attached in ublearns Using and explain the figure.

Review -- Labs
Review all lab materials; including reading materials, lab reports, etc.

Assignment (Do not turn in) 1. Describe the kinesin motility (walking) cycle based on ATP + water ADP + Pi + Energy. 2. Using Wikipedia, describe the muscle contraction based on sliding filament model by myosin.

Important dates
The presentations are scheduled on Wed Dec 5 (6:30-10PM) and Friday, Dec 7 (6-10PM) at Davis 101. The final project reports and presentation ppts are due at 5PM Sunday, Dec 9. The final exam (optional) is scheduled on Thursday, Dec 13 (7:15 -10:15PM) at Norton 214. The final grade will be posted before 5PM on Sat Dec 15.

Project report
Please remember your project should be about something new or an improvement on the existing MEMS devices, not only doing paper review. You can change your project not following your proposal before the presentation date. Use the format of project sample posted on 10/16/12
You may use either single-column (7-8 pages) or double column (3-4 pages) format.

The project report should have:

Abstract Introduction (to the MEMS product of your project) Conceptual design (design issues, modeling approaches, performance specs, etc.) Fabrication methods (selection of materials, processing flow, performance, etc.) Product market evaluation (Who will buy the product? How large is the market? Who are the competitors?) Discussions (product uniqueness in properties, marketing advantages, etc.) Conclusions

Project presentations
18 min (2 or 3 in the group); 20 min (4 in the group) Introduction (1 ppt)
Attention getter (1st sentence in introduction) Forecast of your main points (last sentence in introduction)

Body (10 -13 ppt):

The main challenges in the project Conceptual design
Analyze design (materials selections, fabrication processes and performance)

Evaluation (Who will buy the product? How large is the market? Who are the competitors?

Conclusion (1-2 ppt)

Brief summary of main points Final comments on main points Say Thank you and sit down as we applaud

Delivery
You should deliver this speech extemporaneously
i.e., although you have completely written out your speech, you will essentially speak the speech rather than read it. You should write out key phrases or ideas on a 4 x 6 note card (less distracting to your audience than a full sheet of paper)

Practice
You should practice giving your whole speech all the way through without stopping 3-5 times before the day of the presentation. It is particularly useful if you can practice your speech at least once or twice in front of someone (a friend), or a mirror.

Power Points preparations

Review the lecture on 10/16/12