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  • Automotive MEMS Sensors and Actuators

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    Anish Pai
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    MEMS (Micro-Electro-Mechanical Systems) are tiny integrated devices or systems that combine electrical and mechanical components. They are typically between 1-100 micrometers in size. MEMS are used in various applications including printers, projectors, cell phones, and automobiles. In automobiles, MEMS sensors and actuators help control elements like the powertrain and provide comfort features. MEMS were first used in cars in 1979 to monitor air-fuel ratios by measuring air density and temperature values. Major automotive MEMS include manifold pressure and temperature sensors. Fabrication uses standard IC processes while packaging is important but challenging, especially for automotive environments.

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    sensors

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    Automotive Sensors

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    MEMS (Micro-Electro-Mechanical Systems) are tiny integrated devices or systems that combine electrical and mechanical components. They are typically between 1-100 micrometers in size. MEMS are used in various applications including printers, projectors, cell phones, and automobiles. In automobiles, MEMS sensors and actuators help control elements like the powertrain and provide comfort features. MEMS were first used in cars in 1979 to monitor air-fuel ratios by measuring air density and temperature values. Major automotive MEMS include manifold pressure and temperature sensors. Fabrication uses standard IC processes while packaging is important but challenging, especially for automotive environments.

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    © All Rights Reserved
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    69 views20 pages

    Automotive MEMS Sensors and Actuators

    Uploaded by

    Anish Pai
    MEMS (Micro-Electro-Mechanical Systems) are tiny integrated devices or systems that combine electrical and mechanical components. They are typically between 1-100 micrometers in size. MEMS are used in various applications including printers, projectors, cell phones, and automobiles. In automobiles, MEMS sensors and actuators help control elements like the powertrain and provide comfort features. MEMS were first used in cars in 1979 to monitor air-fuel ratios by measuring air density and temperature values. Major automotive MEMS include manifold pressure and temperature sensors. Fabrication uses standard IC processes while packaging is important but challenging, especially for automotive environments.

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    of 20

    ChrisMosser

    http://www.d-r-t.com/sensortech.htm
    http://news.thomasnet.com/fullstory/463874

    Outline

    IntroduceMEMS
    Applications
    AutomotiveSpecificInformation
    Fabrication
    Packaging

    WhatareMEMS?
    Micro(small)
    http://eed.gsfc.nasa.gov/562/SA_MEMs.htm

    Electro(electriccomponents/functionality)

    http://www.memx.com/

    Mechanical(mechanicalcomponents/functionality)
    http://www.memx.com/

    Systems(integrated,systemlikefunctionality)
    http://www.forbes.com/2008/04/22/mems-apple-nintendo_leadership_clayton_in_jw_0421claytonchristensen_inl_slide.html

    WheredoyoufindMEMs?
    Printers
    HighDPIinkjets

    Projectors
    MicroMirrorsfromTexasInstruments

    CellPhones
    KnowlesMicrophonesusedinmostnewcell
    phones

    Automobiles

    WhyMEMS
    Small

    Typically.1100umfeaturesize

    http://singularityhub.com/wp-content/uploads/2008/08/red-blood-cells.bmp

    Red Blood Cells ~ 10um


    http://www.vendian.org/envelope/dir2/scaling_construct.html

    Human Hair thickness ~ 50um

    WhyMEMS
    Lowcost,Highyield
    UseexistingICfabricationtechnology
    MadeprimarilyonSiliconWafers

    http://media-2.web.britannica.com/eb-media/22/78522-004-BB539CA9.jpg

    WhyMEMS
    Favorablescalingforalotofapplications

    Flowratesensors
    Electrostatics
    Magnetism
    Manyothers

    Notallapplications
    SolarPower
    TurbulentBoundaryEnergyHarvesting

    TypicalApplications

    Accelerometers
    Magnetometers
    Microphones
    MicroFluidics
    RFMEMS
    BridgetoNanotechnology

    AutomotiveMEMS
    MEMSSensorsandActuatorsusedto
    controlvariouselementsoftheautomobile
    PowertrainandChassiscontrol
    Ex:ManifoldAirTemperature

    ComfortandConvenience
    Ex:AirTemperatureControl

    Communications
    Ex:Wireless

    WhereitBegan
    1979FirstrecordeduseofMEMsinautomobiles
    Federalemissionstandardsrequiredmonitoringtheairto
    fuelratiooftheengine
    Densityofairvaluewasneeded

    Manydifferentsensortechnologieswereintroducedto
    solvethisproblem
    MAP(manifoldabsolutepressure)andMAT(manifoldair
    temperature)sensorsweredevelopedusingMEMS
    SiliconbasedMEMSsensorsbecamethedeviceofchoice
    duetolowcostandhighyield

    http://www.quantummatrix.com.my/v1/content/view/231/59/

    MAP Sensor

    WhoDevelopedIt
    Twogroups
    DelcoElectronicsGroup(GeneralMotors)
    Usedpiezoresistivesensing

    Ford
    Usedcapacitivesensing

    PiezoresistiveSensors
    Usethepiezoresistiveeffect
    Appliedstresschangesresistivityofmaterial

    Source: IMG(UF)

    Diaphragm with two embedded piezoresisters

    CapacitiveSensors
    Varytwoparameters
    Gap
    Overlaparea

    Advantages

    Lowpower
    Highaccuracy
    Temperatureindependent

    Importantforalotofautomobileapplications

    Reciprocal

    Disadvantages

    Parasiticcapacitance
    Smallsignal

    http://www.nanoshift.net/Technology.htm

    WhataboutActuators?
    Traditionallyonlysensorsweredeveloped
    forautomobiles
    Actuatorsstartedtobecomepopularas
    MEMsdevelopmentcostsdecreased
    Popularactuatorsinclude
    Microphones
    Fuelinjectionnozzles

    Fabrication
    UsebasicICfabrication
    Masks/layers/CVD/oxidation/etc

    MEMSspecificfabrication
    DRIE(Deepreactiveionetch)
    SOI(silicononinsulator)

    GeneralMEMSPackaging
    Themostimportantandexpensivepartofa
    MEMSsensor/actuator
    ~45%ofthecostofdesigningaMEMSdeviceisspent
    onpackaging

    Oftentimespackagingconstraintswillpreventa
    designfrombeingproduced
    Mayrequiretoocomplexofapackagedesignfor
    realisticimplementation

    Packagecangreatlychangetheresponseofa
    device
    Sensitivity/DynamicRange/etcalleffectedbypackage

    AutomotiveMEMSPackaging
    Automotivesensorsgenerallyonlyallowed
    tohave3wiresconnectedtothem
    Minimizescost

    Environmentconcernsareespecially
    importantinautomotiveapplications
    Engineheat
    Highacceleration/deceleration
    Humidity

    AutomotiveMEMSSummary

    Precision Engineering
    By V. C. Venkatesh, Sudin Izman

    ThankYou

    References
    ApplicationofMEMSTechnologyin
    AutomotiveSensorsandActuators,
    DavidEddyandDouglasSpanks
    http://www.img.ufl.edu/ms/eel5225/html/as
    signments.htm

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