You are on page 1of 20

ChrisMosser

http://www.d-r-t.com/sensortech.htm
http://news.thomasnet.com/fullstory/463874

Outline

IntroduceMEMS
Applications
AutomotiveSpecificInformation
Fabrication
Packaging

WhatareMEMS?
Micro(small)
http://eed.gsfc.nasa.gov/562/SA_MEMs.htm

Electro(electriccomponents/functionality)

http://www.memx.com/

Mechanical(mechanicalcomponents/functionality)
http://www.memx.com/

Systems(integrated,systemlikefunctionality)
http://www.forbes.com/2008/04/22/mems-apple-nintendo_leadership_clayton_in_jw_0421claytonchristensen_inl_slide.html

WheredoyoufindMEMs?
Printers
HighDPIinkjets

Projectors
MicroMirrorsfromTexasInstruments

CellPhones
KnowlesMicrophonesusedinmostnewcell
phones

Automobiles

WhyMEMS
Small

Typically.1100umfeaturesize

http://singularityhub.com/wp-content/uploads/2008/08/red-blood-cells.bmp

Red Blood Cells ~ 10um


http://www.vendian.org/envelope/dir2/scaling_construct.html

Human Hair thickness ~ 50um

WhyMEMS
Lowcost,Highyield
UseexistingICfabricationtechnology
MadeprimarilyonSiliconWafers

http://media-2.web.britannica.com/eb-media/22/78522-004-BB539CA9.jpg

WhyMEMS
Favorablescalingforalotofapplications

Flowratesensors
Electrostatics
Magnetism
Manyothers

Notallapplications
SolarPower
TurbulentBoundaryEnergyHarvesting

TypicalApplications

Accelerometers
Magnetometers
Microphones
MicroFluidics
RFMEMS
BridgetoNanotechnology

AutomotiveMEMS
MEMSSensorsandActuatorsusedto
controlvariouselementsoftheautomobile
PowertrainandChassiscontrol
Ex:ManifoldAirTemperature

ComfortandConvenience
Ex:AirTemperatureControl

Communications
Ex:Wireless

WhereitBegan
1979FirstrecordeduseofMEMsinautomobiles
Federalemissionstandardsrequiredmonitoringtheairto
fuelratiooftheengine
Densityofairvaluewasneeded

Manydifferentsensortechnologieswereintroducedto
solvethisproblem
MAP(manifoldabsolutepressure)andMAT(manifoldair
temperature)sensorsweredevelopedusingMEMS
SiliconbasedMEMSsensorsbecamethedeviceofchoice
duetolowcostandhighyield

http://www.quantummatrix.com.my/v1/content/view/231/59/

MAP Sensor

WhoDevelopedIt
Twogroups
DelcoElectronicsGroup(GeneralMotors)
Usedpiezoresistivesensing

Ford
Usedcapacitivesensing

PiezoresistiveSensors
Usethepiezoresistiveeffect
Appliedstresschangesresistivityofmaterial

Source: IMG(UF)

Diaphragm with two embedded piezoresisters

CapacitiveSensors
Varytwoparameters
Gap
Overlaparea

Advantages

Lowpower
Highaccuracy
Temperatureindependent

Importantforalotofautomobileapplications

Reciprocal

Disadvantages

Parasiticcapacitance
Smallsignal

http://www.nanoshift.net/Technology.htm

WhataboutActuators?
Traditionallyonlysensorsweredeveloped
forautomobiles
Actuatorsstartedtobecomepopularas
MEMsdevelopmentcostsdecreased
Popularactuatorsinclude
Microphones
Fuelinjectionnozzles

Fabrication
UsebasicICfabrication
Masks/layers/CVD/oxidation/etc

MEMSspecificfabrication
DRIE(Deepreactiveionetch)
SOI(silicononinsulator)

GeneralMEMSPackaging
Themostimportantandexpensivepartofa
MEMSsensor/actuator
~45%ofthecostofdesigningaMEMSdeviceisspent
onpackaging

Oftentimespackagingconstraintswillpreventa
designfrombeingproduced
Mayrequiretoocomplexofapackagedesignfor
realisticimplementation

Packagecangreatlychangetheresponseofa
device
Sensitivity/DynamicRange/etcalleffectedbypackage

AutomotiveMEMSPackaging
Automotivesensorsgenerallyonlyallowed
tohave3wiresconnectedtothem
Minimizescost

Environmentconcernsareespecially
importantinautomotiveapplications
Engineheat
Highacceleration/deceleration
Humidity

AutomotiveMEMSSummary

Precision Engineering
By V. C. Venkatesh, Sudin Izman

ThankYou

References
ApplicationofMEMSTechnologyin
AutomotiveSensorsandActuators,
DavidEddyandDouglasSpanks
http://www.img.ufl.edu/ms/eel5225/html/as
signments.htm