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http://www.d-r-t.com/sensortech.htm
http://news.thomasnet.com/fullstory/463874
Outline
• Introduce MEMS
• Applications
• Automotive Specific Information
• Fabrication
• Packaging
What are MEMS?
• Micro(small)
http://eed.gsfc.nasa.gov/562/SA_MEMs.htm
• Mechanical(mechanical components/functionality)
http://www.memx.com/
http://singularityhub.com/wp-content/uploads/2008/08/red-blood-cells.bmp
http://media-2.web.britannica.com/eb-media/22/78522-004-BB539CA9.jpg
Why MEMS
• Favorable scaling for a lot of applications
– Flow-rate sensors
– Electrostatics
– Magnetism
– Many others
http://www.quantummatrix.com.my/v1/content/view/231/59/
MAP Sensor
Who Developed It
• Two groups
– Delco Electronics Group(General Motors)
• Used piezoresistive sensing
– Ford
• Used capacitive sensing
Piezoresistive Sensors
• Use the piezoresistive effect
– Applied stress changes resistivity of material
Source: IMG(UF)
• Disadvantages
– Parasitic capacitance
– Small signal
What about Actuators?
• Traditionally only sensors were developed
for automobiles
• Actuators started to become popular as
MEMs development costs decreased
• Popular actuators include
– Microphones
– Fuel injection nozzles
Fabrication
• Use basic IC fabrication
– Masks/layers/CVD/oxidation/etc
Precision Engineering
By V. C. Venkatesh, Sudin Izman
Thank You
References
• Application of MEMS Technology in
Automotive Sensors and Actuators, David
Eddy and Douglas Spanks
• http://www.img.ufl.edu/ms/eel5225/html/as
signments.htm